Polishing / CMP Semiconductor Metrology Instruments Datasheets

Ultra Gage -- 9500
from KLA-Tencor Corporation

Multi-tool functionality including thickness, shape stress, global and site flatness measurements. Measures 8,700 data points in under 60 seconds. Thin film stress on patterned or monitor wafers. Wide range of options including wafer typing. The 9500 UltraGage is a versatile, multifunctional... [See More]

  • Applications: Wafer; Polishing / CMP; Photolithography
  • Mounting / Loading: Manual loading
  • Form Factor: ProbingSystem
  • Technology: Capacitance or electromagnetic gage
Thin-Film Measuring Systems -- TF Series
from StellarNet, Inc.

TF Systems for Non-Contact Film Thickness Measurements. We offer a complete line of film thickness measurement systems that can measure from 5 nm to 200 ┬Ám for analysis of single layer and/or multilayer films in less than a second. StellarNet thin film reflectometry systems consist of a portable USB... [See More]

  • Applications: Wafer (optional feature); CVD / PVD (optional feature); Polishing / CMP (optional feature); Polymer or photoresist films (optional feature); Thin-Film Photovoltaics
  • Technology: Reflectometer
  • Form Factor: Monitor or instrument
  • Measurements: FilmThickness (optional feature); WaferThickness (optional feature)