Resistance Probe (Four-point / SRP) Semiconductor Metrology Instruments Datasheets

Resistivity Mapping System -- RS-100
from KLA-Tencor Corporation

The RS-100 resistivity measurement system is a production worthy tool used in nearly all fabs worldwide. This resistivity measurement system provides capabilities such as advanced automation and improved edge performance to meet today's production requirements for 300mm wafers. Accurate and... [See More]

  • Technology: Resistance probe - four-point or SRP
  • Mounting / Loading: Floor
  • Form Factor: ProbingSystem
  • Applications: Wafer