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Capacitive Sensors – Find Advantages and Use Them for Measurement Tasks

Capacitive displacement sensors usually measure displacement and distance of electrically conductive targets. However, capacitive displacement sensors from Micro-Epsilon are also used for displacement and thickness measurements of conductive materials and insulators. Learn how to use them in various measurement tasks and profit from unmatched stability and nanometer resolution – also in industrial applications.


Originally presented: July 22, 2022
Duration: 1 hour
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Compared to other non-contact measurement techniques, capacitive displacement measurement is characterized by extreme precision and measurement stability. Capacitive sensors from Micro-Epsilon can be used for displacement and thickness measurements even in harsh environments when sub micrometer or nanometer accuracy is required.

Micro-Epsilon’s capacitive sensors are designed for non-contact measurement of displacement, distance and position, as well as for thickness measurement. Due to their high signal stability and resolution, capacitive displacement sensors are applied in laboratories and industrial measurement tasks. In production control, for example, capacitive sensors measure film thickness and application of the adhesive. Installed in machines, they monitor displacement and tool positions, e.g. in semiconductor lithography production with vacuum and cleanroom environments.

This webinar describes why capacitive sensors can even be used in environments with strong magnetic fields, dust and temperature fluctuations. To achieve maximum accuracy and stability, consider some useful facts when installing capacitive displacement sensors. Sensor alignment and arrangement, influences due to different target geometries and ambient conditions are some of the most important ones. The different sensor designs and their fields of application will also be shown.

This Micro-Epsilon webinar explains how to use capacitive displacement sensors for a variety of business tasks. Attendees will learn the operating principles and how to setup for displacement and thickness measurement with just one sensor. Various animations and graphics show detailed application examples and give important tips. Additional resources such as whitepaper and slideshows with further details are provided by Micro-Epsilon.


Key Takeaways

• Learn the metrology fundamentals and basics of capacitive sensors

• Understand the effects of the environment and how to use these sensors, such as for thickness measurement of plastic

• Discover how to achieve sub micrometer and nanometer resolution in industrial applications

• Explore industrial applications, air gap measurement in motors and generators, brake disc thickness, wafer position in vacuum and many more



Martin Dumberger, Managing Director, Micro-Epsilon America

As Managing Director of Micro-Epsilon America, Martin Dumberger helps customers solve challenging measurement applications across all industries. His areas of expertise involve non-contact measuring technologies such as eddy current, capacitive, and optical sensors.

Aria Green, Sales & Applications Engineer, Micro-Epsilon

Application and Sales Engineer Aria Green, has several years of experience in precise sensors. Her expertise is in solving measurement tasks with non-contact sensors, requiring a high level of integration. Aria holds a Mechanical engineering degree from the University of Arkansas.