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On-Demand Webinar:

The Fundamentals of Sputtering Targets - Key Building Block of a Semiconductor Chip

This webinar will introduce key material properties of a sputtering target to the audience, and how they affect the product performance at our customer site. Purity and microstructure of a material are the biggest differentiators in the sputtering target market and essentially, the focus will be on a few of the process manufacturing levers that PST's Electronics Deposition Materials uses to control said properties, and meet the customer requirements, which keeps getting stringent with ever-decreasing node size of transistors.




Originally presented: February 22, 2023
Duration: 1 hour
Presented by:

Overview

The webinar will provide a high-level overview of the sputtering target industry and how it fits into the semiconductor market, followed by a showcase of some of the key products of Praxair Surface Technologies' (PST) Electronics Deposition Materials, its customers, and end-market applications.

The audience will be introduced to the key properties of a sputtering target, and how/why they are important to the sputtering performance at our customer’s semiconductor chip fabrication facilities. It will also show various manufacturing process levers that EDM uses such as refining, casting and thermo-mechanical processing to achieve strict control of the material properties from target to target.

A vertically integrated supply chain is one of the most valued traits of a sputtering target manufacturer since it provides complete control over the material processing: the webinar will aspire to drive that point home by providing an overview of PST's Electronics Deposition Materials refining/melting capabilities, and how we are able to differentiate ourselves in a competitive market by providing sputtering targets with both consistency in purity and homogeneity in micro-structure.

Key Takeaways

  • Gain a high-level overview of the manufacturing process of sputtering targets
  • Explore key material properties that affect the desired performance of sputter targets
  • Examine capabilities of PST's Electronics Deposition Materials in the sputtering target market
  • Discover manufacturing process levers that can control the various material properties of sputtering and how consistency in material property between every single target is achieved

Speakers

Archish Srinivasan, Business Development Specialist, Linde Electronic Deposition Materials

Srinivasan has been with Linde Electronic Deposition Materials based in Orangeburg, NY since 2014, where he started as an engineering specialist in the R&D department working on the development of copper products. He has since worked as an R&D product engineer responsible for not only establishing the manufacturing process but also leading cross-functional teams and suppliers worldwide to establish supply chain for the HVM process for key products such as copper and carbon sputtering targets. He currently serves as the business development specialist at the company, where he is responsible for EDM’s global growth by studying market trends and identifying potential business opportunities. 

Dr. Gregory Boisier, Technology Manager & Head of European Technology Team, Linde Electronics Deposition Materials

Dr. Boisier is the technology manager and the head of European Technology Team for Linde Electronics Deposition Materials, where he leads several R&D projects related to high purity sputtering targets (Al, Cu), serving different applications pertaining to automotive, communication, and memory devices. He has over 15 years’ experience in leading R&D projects for hHigh purity Al and Cu materials (>99.999%) and associated processes for sputtering target manufacturing. He received his master’s degree in material and chemistry engineering from ENSIACET Toulouse – France and his PhD in materials science from CIRIMAT Laboratory & EADS IW - France