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  • MICRO: BEOL Equipment
    Gerald Beyer and Mieke Van Bavel, Research into deposition processes discusses the properties of atomic layer deposition TiN and tungsten-carbon-nitride films on different substrate materials in integrated stacks. nterconnects have been, are, and will continue to be a limiting factor
  • MICRO:May 98:Industry News:Order Desk
    SGS-Thomson will install an Ultima HDP-CVD Centura tool from Applied Materials in its Phoenix fab. The chipmaker will use the high-density plasma deposition system to manufacture advanced logic devices. Applied says the system can be used with a low-k and other materials in film applications
  • Materials Modeling and Simulation Case Studies
    Activity of Lanthanum-based Catalysts at The Dow Chemical Company Additive Design in Paint Formulation Adsorption Mechanism of Carbon Dioxide in Zeolites Application of Carbon Nanotubes as Electromechanical Sensors Atomistic Modeling of Chemical Vapor Deposition (CVD): Silicon Oxynitride Atomistic
  • Electron Radiation as an Indicator of Gold Nodule Defect during E-beam Evaporation
    Gold (Au) nodule defects are a common problem. during metal deposition by evaporation. Small Au spheres,. often referred to as spits in the semiconductor industry, can be. ejected from the molten source under certain conditions. If the. nodules land on the bottom electrode of a metal-insulator
  • Ceramic-Matrix Composites
    vapor deposition. A thick layer of silicon carbide is deposited on a thin fiber substrate of tungsten or carbon. Diameter of the final product is about 140 m. Although developed initially to reinforce aluminum and titanium matrices,
  • MICRO: Green and Clean
    (GWPs) continues to challenge semiconductor manufacturers. While NF has largely replaced GWPs for chemical vapor deposition chamber cleans, identifying suitable substitute gases for use in etch processes has proven more difficult. Therefore, any attempt to reduce etch-related emissions requires
  • Tough Coatings
    Physical-vapor deposition creates ultrathin, ceramiclike coatings that can significantly improve the performance and durability of precision components. In a test with a Kawasaki Ninja, the tappets were coated with Balinit DLC, wrist pins and all gears with Balinit C (WC/C). The dyno result shows
  • U.S. Battery and Fuel Cell Patents | October 2007 | A B T |
    (20070807), Method and apparatus for electrostatic spray deposition for a solid oxide fuel cell, Jan Robert Selman, Hiroshi Nomura, and Said Al Hallaj, Illinois Institute of Technology. U.S. 7,252,884 (20070807), Carbon nanotube reinforced porous carbon having three-dimensionally ordered porosity

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