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  • New FEA Tools For Engineering Analysts
    automatically generates an analysis report that can be printed or distributed by intranet or Internet. The report for Algor's software includes detailed model data, graphics and multimedia files, and userspecified information that can be transmitted to a client or supervisor through any web browser
  • Improving tungsten CVD performance with in situ particle monitoring
    cold-wall reactors and one loadlock chamber. Each chamber independently deposits a blanket tungsten film on the wafer and then etches the wafer backside to remove excess tungsten. Two isolated gas lines deliver reactants through the chamber lid, and a perforated pumping plate distributes

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