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  • Phase Conjugate Laser Optics - Preface
    of the gain media induces aberrated thermal lenses, which severely. affects the beam quality. It thus results in wavefront aberrations that reduce the. brightness of the source and that evolve when changing the operating conditions of. the source. Adaptive correction of phase aberrations in a laser
  • Transmission Sphere Selection Guide
    Brief provides a basic understanding of transmission sphere selection for spherical surface testing. A transmission sphere is used to transform the collimated output beam of the interferometer mainframe into a spherical wavefront, and is used as a beamsplitter to divide the laser light into separate
  • Novel Interferometer Enables Challenging Measurements
    utilizing a proprietary laser source and patented optical configuration has enabled wavefront measurements which until now have been difficult or impossible to complete with standard temporal phase-shifting systems. This article describes a short coherence Fizeau interferometer and its applications
  • MICRO: Product Technology News (May '2000)
    The FPA-5000ES2+ KrF scanner accommodates devices with either 0.18- and 0.15- um design rules. Using a 2-kHz excimer laser, the scanner has improved throughput compared to previous tools and can expose 125 200-mm wafers per hour. The platform can be field converted from a 200- to 300-mm wafer

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