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  • MICRO:Analysis and Metrology (Jan '99)
    the partial pressure (in torr) of almost all species present in the gas being sampled and the atomic masses of the detected species. Species identification is then usually straightforward, using either the periodic table or stored libraries of PPA data. The price of most PPAs versus the amount and value
  • 21st Century Measuring Challenges
    . It also made it possible to take measurements more quickly and more often, fostering huge improvements in response time and quality. Far from the comfort of metrology labs where qualified inspectors operate digital CMMs with their heavy, stable granite table, portable measurement is still facing
  • MICRO: Products
    An overlay metrology tool that performs lithography process control for the 65-nm node and beyond captures design-rule overlay errors and improves stepper correction accuracy. The Archer AIM uses a grating-style technology to reduce the measurement uncertainty associated with traditional overlay

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