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Supplier: ABTech, Inc.
Description: ABTech’s precision air bearing rotary tables address the metrology needs for different weights and part size. Built for the most demanding applications, every table provides ultra-smooth motion, sub-micron accuracy and absolute repeatability. Designed and manufactured in-house
- Drive Mechanism: Electric Drive
- Mounting Capability: Horizontal, Vertical
- Rotary Table Applications: Machining, Equipment Positioning, Automation, Inspection, Assembly
- Rotary Table Features: Position Encoder, Tilting Table, Indexing
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Supplier: ABTech, Inc.
Description: ABTech’s precision air bearing rotary tables address the metrology needs for different weights and part size. Built for the most demanding applications, every table provides ultra-smooth motion, sub-micron accuracy and absolute repeatability. Designed and manufactured in-house
- Design Units: English, Metric
- Load Capacity: 300 to 5000 lbs
- Shape: Cylindrical / Bushing
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Supplier: ASME
Description: Product Definition Specifications (PDS) are a set of standards used to document and interpret engineering and verification requirements. PDS standards are jointly developed and approved by the B46, B89, and Y14 committees. PDS standards are harmonized to address engineering and verification
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Supplier: ASME Standards and Certification
Description: Product Definition Specifications (PDS) are a set of standards used to document and interpret engineering and verification requirements. PDS standards are jointly developed and approved by the B46, B89, and Y14 committees. PDS standards are harmonized to address engineering and verification
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Supplier: TPA Motion
Description: capture bearing. They are often used in rotary stage applications where you wish to move an object in a very precise circular or oscillating motion. These instrument quality bearings can be found in metrology or medical scanning devices where micro level precision is required. Flat Mount
- Bore: 1.57 to 3.94 inch
- Gear Options: Non-geared
- Moment Load: 20.65 to 62.68 Ft-lbs
- Outside Diameter: 4.72 to 7.09 inch
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Supplier: PI (Physik Instrumente) L.P.
Description: suited for many high-precision applications, such as metrology, photonics, and precision scanning as well as in semiconductor or flat panel display manufacturing. Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications. 3
- Design Units: Metric
- Load Capacity: 55.08 lbs
- Shape: Flat, Rectangular / Square
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Supplier: PI (Physik Instrumente) L.P.
Description: optical encoders. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. Applications include optical alignment, metrology, inspection, calibration, and scanning. The RM stages offer superior runout, flatness, and wobble
- Drive Mechanism: Other
- Mounting Capability: Horizontal, Vertical
- Rotary Table Applications: Inspection, Other
- Rotary Table Features: Indexing
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Supplier: Carl Zeiss Industrial Metrology, LLC
Description: rotation tracing driver for standards-compliant effective surface measurement on rotationally symmetric features Optional hand wheel to turn the tracing driver ±15 degrees Upgrade possibility through combined CNC modular system: Y table, horizontal rotary table, vertical rotary
- Display & Special Features: Computer Interface / Networkable, SPC / Software Capability
- Measurement Capability: 3D / Areal Topography, Roughness Parameters (Ra, RMS / Rq, Rz, etc.), Waviness Parameters (Wa,Wt )
- Mounting / Loading: Benchtop
- Standards Compliance: ASME, ISO / EN, DIN, JIS, Other
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Supplier: Carl Zeiss Industrial Metrology, LLC
Description: upgradeable on site Optional rotation tracing driver for standards-compliant effective surface measurement on rotationally symmetric features Optional hand wheel to turn the tracing driver ±15 degrees Upgrade possibility through combined CNC modular system: Y table
- Display & Special Features: Computer Interface / Networkable, SPC / Software Capability
- Measurement Capability: 2D / Line Profiles, 3D / Areal Topography, Roughness Parameters (Ra, RMS / Rq, Rz, etc.), Waviness Parameters (Wa,Wt )
- Mounting / Loading: Benchtop
- Standards Compliance: ASME, ISO / EN, DIN, JIS, Other
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Supplier: Carl Zeiss Industrial Metrology, LLC
Description: table, horizontal rotary table, vertical rotary table Various furniture solutions for SD versions and fully enclosed DX versions with integrated vibration damping and a minimal footprint SURFCOM 1500 Convenient measuring station for surface measurements
- Display & Special Features: Computer Interface / Networkable, SPC / Software Capability
- Measurement Capability: 3D / Areal Topography, Roughness Parameters (Ra, RMS / Rq, Rz, etc.), Waviness Parameters (Wa,Wt )
- Mounting / Loading: Benchtop
- Standards Compliance: ASME, ISO / EN, DIN, JIS, Other
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Supplier: Carl Zeiss Industrial Metrology, LLC
Description: for standards-compliant effective surface measurement on rotationally symmetric features Optional hand wheel to turn the tracing driver ±15 degrees Upgrade possibility through combined CNC modular system: Y table, horizontal rotary table, vertical rotary table
- Display & Special Features: Computer Interface / Networkable, SPC / Software Capability
- Measurement Capability: 2D / Line Profiles, 3D / Areal Topography, Roughness Parameters (Ra, RMS / Rq, Rz, etc.), Waviness Parameters (Wa,Wt )
- Mounting / Loading: Benchtop
- Standards Compliance: ASME, ISO / EN, DIN, JIS, Other
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Supplier: Hitachi High-Tech America
Description: technique, offering easy-to-use, fast and non-destructive analysis, requiring little to no sample preparation, capable of analyzing solids or liquids over a wide element range from 13Al to 92U on the periodic table. FT160 High Resolution SDD
- Applications: Semiconductor Wafers, Electroplated Films
- Form Factor: Monitor / Instrument
- Maximum Wafer / Part Size: 102 to 305 mm
- Measurement Capability: Composition, Thickness - Film / Layer
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Supplier: PI (Physik Instrumente) L.P.
Description: systems, wafer metrology, wafer inspection, measuring technology, inspection systems, calibration, scanning. Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications. 3-Phase torque motor Brushless
- Design Units: Metric
- Load Capacity: 42.71 to 173 lbs
- Shape: Flat, Round
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Supplier: PI (Physik Instrumente) L.P.
Description: systems, wafer metrology, wafer inspection, measuring technology, inspection systems, calibration, scanning. Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications. 3-Phase torque motor Brushless
- Load Capacity: 42.71 to 173 lbs
- Maximum Torque: 345 to 752 In-lbs
- Rotary Velocity / Speed: 3000 deg/sec
- Stage Type: Rotary Positioning
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Supplier: Mahr Inc.
Description: Product features Reference form measuring machine for the precision measuring room and production with tactile and optical probe. Use of the benefits of the most modern, optical metrology Non-tacticle measurement of sensitive parts Particularly high
- Measurement Capability: Coaxiality, Cylindricity, Differential / Taper, Flatness, Eccentricity / Concentricity, Parallelism, Roundness, Runout, Straightness
- Mounting / Loading: Floor / Free Standing
- Surface Metrology: Form Measurement
- Technology: Non-contact - Optical / Laser
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Supplier: Mahr Inc.
Description: Product features MarForm MMQ 150 - The entry into the world of cylindricity metrology The MMQ 150 is an automatic measuring machine for the testing of form and location tolerances: Use in production or measuring room Fast and easy operation Measuring
- Measurement Capability: Roundness, Runout, Straightness
- Mounting / Loading: Benchtop
- Surface Metrology: Form Measurement
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Supplier: Mahr Inc.
Description: Product features MarSurf CNC modular. CNC measuring stations based on standard components A standard surface measuring station can be expanded into a user-friendly, partially automatic CNC measuring station simply by adding auxiliary table axes and possibly a
- Display & Special Features: Computer Interface / Networkable
- Industrial Applications: Other
- Measurement Capability: 3D / Areal Topography
- Mounting / Loading: Benchtop
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Supplier: Mahr Inc.
Description: axis (C) Motorized vertical measuring axis (Z) Motorized horizontal positioning axis (X) Manual centering and tilting table T20W manual length measuring probe or T7W motorized probe Ergonomic control panel, can also be used to start selected measuring programs (P1, P2, P3)
- Measurement Capability: Roundness, Runout, Straightness
- Mounting / Loading: Benchtop
- Surface Metrology: Form Measurement
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Supplier: SemiProbe
Description: of automation or test requirements change. A complete line of accessories is available for the M12 system including probe card holders, manipulators, manipulator arms & bases, probe tips, lasers, optics, CCTV systems, vibration isolation tables, dark boxes and much more.
- Applications: Semiconductor Wafers
- Form Factor: Wafer Probing System
- Maximum Wafer / Part Size: 300 mm
- Measurement Capability: Electrical Test - Parametric / In-line
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Supplier: SemiProbe
Description: of automation or test requirements change. A complete line of accessories is available for the M8 system including probe card holders, manipulators, manipulator arms & bases, probe tips, lasers, optics, CCTV systems, vibration isolation tables, dark boxes and much more.
- Applications: Semiconductor Wafers
- Form Factor: Wafer Probing System
- Maximum Wafer / Part Size: 200 mm
- Measurement Capability: Electrical Test - Parametric / In-line
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Supplier: SemiProbe
Description: of automation or test requirements change. A complete line of accessories is available for the M4 system including probe card holders, manipulators, manipulator arms & bases, probe tips, lasers, optics, CCTV systems, vibration isolation tables, dark boxes and much more.
- Applications: Semiconductor Wafers
- Form Factor: Wafer Probing System
- Maximum Wafer / Part Size: 100 mm
- Measurement Capability: Electrical Test - Parametric / In-line
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Supplier: SemiProbe
Description: of automation or test requirements change. A complete line of accessories is available for the M6 system including probe card holders, manipulators, manipulator arms & bases, probe tips, lasers, optics, CCTV systems, vibration isolation tables, dark boxes and much more.
- Applications: Semiconductor Wafers
- Form Factor: Wafer Probing System
- Maximum Wafer / Part Size: 150 mm
- Measurement Capability: Electrical Test - Parametric / In-line
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Supplier: Dexter Magnetic Technologies, Inc.
Description: Preconditioning with a write head is a slow process. For spin stand metrology, preconditioning with a head can be easily incorporated into existing tests. It complicates and lengthens the evaluation of read-write properties but is manageable. For drive builds, this can be a time consuming and
- Features: Self Powered
- Form Factor: Table top
- Type: Other
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Supplier: Primatics, Inc.
Description: Primatics PDR210 rotary tables are among the most advanced direct drive tables available. They feature a high performance direct drive motor that creates sub arc-second repeatability and fast settling times, making the PDR series ideal for semiconductor wafer inspection, high speed
- Drive Mechanism: Direct Drive
- Drive Type: Brushless Servo
- Features: Center Bore
- Load Capacity: 66.15 lbs
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Supplier: Primatics, Inc.
Description: Primatics PDR160B rotary tables are among the most advanced direct drive tables available. They feature a high performance direct drive motor that creates sub arc-second repeatability and fast settling times, making the PDR series ideal for semiconductor wafer inspection, high speed
- Drive Mechanism: Direct Drive
- Drive Type: Brushless Servo
- Features: Center Bore
- Load Capacity: 44.1 lbs
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Supplier: Primatics, Inc.
Description: Primatics PDR110B rotary tables are among the most advanced direct drive tables available. They feature a high performance direct drive motor that creates sub arc-second repeatability and fast settling times, making the PDR series ideal for semiconductor wafer inspection, high speed
- Drive Mechanism: Direct Drive
- Drive Type: Brushless Servo
- Features: Center Bore
- Load Capacity: 22.05 lbs
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Supplier: Bell-Everman Inc.
Description: TheDDT200 Rotary Axis combines affordability with precision in a clean,low profile package, perfect for fulfilling your rotary motionrequirements for metrology and light mechanical processes. Alarge diameter (44.5mm) center hole is perfect for bringing utilitiesto your payload
- Drive Mechanism: Direct Drive
- Drive Type: DC Servo
- Features: Center Bore
- Maximum Torque: 9.47 In-lbs
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Supplier: Bell-Everman Inc.
Description: The DDT100 Rotary Axis combines affordability with accuracy and repeatability in a clean, low profile package, perfect for fulfilling your rotary motion requirements for metrology and light mechanical processes. The four-bolt pattern of the DDT100 allows for quick installation into your
- Drive Mechanism: Direct Drive
- Drive Type: DC Servo
- Features: Center Bore
- Maximum Torque: 6.55 In-lbs
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Supplier: Bell-Everman Inc.
Description: The DDT200 Rotary Axis combines affordability with precision in a clean, low profile package, perfect for fulfilling your rotary motion requirements for metrology and light mechanical processes. A large diameter (44.5mm) center hole is perfect for bringing utilities to your payload with the
- Drive Mechanism: Direct Drive
- Drive Type: DC Servo
- Features: Center Bore
- Maximum Torque: 9.47 In-lbs
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Supplier: ASME
Description: A critical issue in industrial coordinate metrology is the measurement of a work piece to assure compliance with its dimensional requirements. When using a computerized Coordinate Measurement System (CMS), the usual practice is to correlate computer calculated outputs with the dimensional
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Supplier: ASME Standards and Certification
Description: A critical issue in industrial coordinate metrology is the measurement of a work piece to assure compliance with its dimensional requirements. When using a computerized Coordinate Measurement System (CMS), the usual practice is to correlate computer calculated outputs with the dimensional
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Description: CIE x036:2010 ISBN 978 3 901 906 89 3 This Symposium was organised by CIE Division 2 in cooperation with the Swiss Lighting Society (SLG), and was hosted by the Federal Office of Metrology (METAS), Bern, Switzerland. The two-day Symposium included a one day tutorial presenting the state
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Supplier: Artifex Engineering
Description: lasers and LEDs alike. Several options of photodiode material and optical input, make these units useful in a wide range of applications in cluding non-telecom metrology. These amplifiers have a particularly high sensitivity and large dynamic range. There are 16 gain ranges covering 5
- Detector Mechanism: Semiconductor
- Operating Temperature: 0.0 to 60 C
- Optical Meter Type: Power Meter
- Power Range: 0.0030 to 0.0300 watts
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Supplier: Isotech North America
Description: Thermocouple characteristics are sufficiently smooth to allow interpolation of deviations from the reference table to be carried out over fairly wide temperature spans without introducing unacceptable errors. In world class metrology, the most important consideration is the quality of
- # of Inputs / Channels: 2 #
- Display Type: Digital Readouts, Analog Meter or Indicator
- Input Options: RTD Inputs
- Local Interface: Analog Front Panel
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Supplier: Marposs Corp
Description: of the machining process. This option enables users to monitor how the shape of the machined part evolves in real time, and implement the necessary corrections while the process is still in progress, thus avoiding the need to carry out manual checks in the metrology lab (increased
- Technology: Electronic, Mechanical
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Description: The definitive bench micrometer, the Universal Supermicrometer (USM), offers the advantage of being two instruments in one, by providing the ability to measure both internal and external parts, gages or standards. Additionally, as a high precision, direct-reading metrology instrument, it is
- Display: Dial / Analog / Direct Reading Scale, Digital Display
- Gage Calibrator: Yes
- Mounting / Loading Options: Benchtop / Floor
- NIST Traceability: Yes
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Supplier: ValueTronics International, Inc.
Description: metrology and calibration laboratory environments. The enhanced thermistor power meter comes with a digital color LCD display, and user-friendly front panel interface. Its built-in calibration factor table provides a more convenient and accurate method of storing calibration factors as
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Supplier: DR. JOHANNES HEIDENHAIN GmbH
Description: shaft speeds and medium loads, with high to very high bearing accuracies as well as the highest degree of repeatability. They are suited to the specific requirements of metrology applications. Typical applications therefore include laser trackers for metrology, highprecision rotary
- Encoder Output: Digital: Square Wave, Other
- Encoder Type: Incremental
- Features: Hollow Shaft
- Operating Temperature: 32 to 122 F
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Supplier: DR. JOHANNES HEIDENHAIN GmbH
Description: shaft speeds and medium loads, with high to very high bearing accuracies as well as the highest degree of repeatability. They are suited to the specific requirements of metrology applications. Typical applications therefore include laser trackers for metrology, highprecision rotary
- Absolute Encoder Resolution: 28 bits
- Encoder Output: Digital: Square Wave, Other
- Encoder Type: Absolute
- Features: Hollow Shaft
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Supplier: ABTech, Inc.
Description: higher accuracy with more reliable results. Designed specifically for checking total indicator readings (TIR) on OD, ID, and faces of cylindrical parts, the MicroTIR is focused on maximizing throughput. The friction free ultra-precise rotary air bearing table provides a stable, robust
- Display: Digital Display
- Mounting / Loading Options: Benchtop / Floor
- Range: 32 inch
- Technology: Mechanical
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Supplier: Marposs Corp
Description: avoiding the need to carry out manual checks in the metrology lab (increased productivity) BENEFITS Increased production quality (reduced rejects) High precision measurement Flexibility Highly reliable and robust Ease of
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Supplier: Aerotech, Inc.
Description: Design Features Travel ranges from 100 µm to 600 µm available Long device lifetime High-precision, frictionless flexure guidance system Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor options
- Axis Configuration: X-Y Axes
- Carriage Load: 2.21 lbs
- Drive Specifications: Other
- Features: Closed Loop Control
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Supplier: Aerotech, Inc.
Description: provides protection from debris while the side-seals prevent dirt and particulates from entering the stage. The curved hard-cover design provides a natural shape that prevents excessive debris from collecting on the stage. Linear Encoder Option For applications requiring direct-metrology
- Actuation Type: Electrical
- Axis Configuration: X Axis Only
- Bearing Type: Other
- Drive Specifications: Ball Screw
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Supplier: Aerotech, Inc.
Description: Design Features Travel ranges from 100 µm to 600 µm available Long device lifetime High-precision, frictionless flexure guidance system Superior positioning resolution and linearity to 0.007% with direct-metrology capacitive sensor options
- Actuation Type: Electrical
- Axis Configuration: X Axis Only
- Carriage Load: 0.1323 to 0.3087 lbs
- Drive Specifications: Other
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Supplier: Aerotech, Inc.
Description: a natural shape that prevents excessive debris from collecting on the stage. Linear Encoder Option For applications requiring direct-metrology of the output carriage, the PRO280SLE integrates a direct linear encoder that is protected by the stage sealing system. Amplified sine
- Actuation Type: Electrical
- Bearing Type: Other
- Drive Specifications: Ball Screw
- Motor Features: Linear Position Feedback
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Description: with reference to spectroradiometric concepts as is the current international standards procedure. The corresponding laboratory calibration and measurement techniques are described in the next section, chapter 6, together with basic instrument requirements and traceability to national
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Supplier: ValueTronics International, Inc.
Description: host-to-device interface cable Documentation CD: Includes user manual in English, French, German, Spanish, Japanese, Portuguese, Simplified Chinese, Traditional Chinese, Korean, and Russian languages. Certificate of calibration: Documents the traceability to National Metrology
- Phase: Single-Phase
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Standards and Technical Documents - A Framework for the Measurement of Visual Appearance -- 175:2006
Description: measurement of its colour. A description of its total appearance, however, cannot be achieved by the definition of colour alone; other attributes of the material from which it is fabricated contribute to the overall appearance. Starting from a definition of soft metrology and a description of
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Supplier: ValueTronics International, Inc.
Description: OpenChoice® Desktop Software (available on the Documentation CD and for download from www.tektronix.com/ downloads.) Calibration certificate documenting traceability to National Metrology Institute(s) and ISO9001 quality system registration Typical Applications
- Bandwidth: 1000 MHz
- Number of Input Channels: 2 (# channels)
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Supplier: ValueTronics International, Inc.
Description: Chinese) Accessory bag Power cord OpenChoice® Desktop Software (available on the Documentation CD and for download from www.tektronix.com/ downloads.) Calibration certificate documenting traceability to National Metrology Institute(s) and ISO9001 quality system
- Bandwidth: 100 MHz
- Number of Input Channels: 4 (# channels)
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conjunction with QuickLoad base plates, which locate to the rail on either side using quick release magnets and location pins. The interchangeable design of the rail and plates aims to maximise the machine operator's ability to inspect and release parts swiftly. Metrology tables, M12 fixtures (read more)
Browse Metrology Fixtures and CMM Fixtures Datasheets for Renishaw -
-High Performance Air Bearing Rotary Tables are essential for Metrology applications Watch PI Videos on (read more)
Browse Datasheets for PI (Physik Instrumente) L.P. -
The Series 9480H is a robust metrology-grade encoder that is equally well-suited for industrial applications. It incorporates four reading heads to eliminate many common sources of encoder errors, while its stainless steel construction greatly enhances resistance to shock and vibration (read more)
Browse Incremental Rotary Encoders Datasheets for Gurley Precision Instruments -
Table with Large Aperture for Test, Metrology, and Precision Manufacturing Superior positioning and geometric performance, absolute high (read more)
Browse Rotary Stages Datasheets for PI (Physik Instrumente) L.P. -
The Series 9480H is a robust metrology-grade encoder that is equally well-suited for industrial applications. It incorporates four reading heads to eliminate many common sources of encoder errors, while its stainless steel construction greatly enhances resistance to shock and vibration (read more)
Browse Rotary Encoders Datasheets for Gurley Precision Instruments -
. Direct-Drive Rotary Tables, High Precision Rotation Stages with Torque Motors PI’s high-speed, direct-drive rotation stages are equipped with frictionless, brushless, closed-loop torque motors. These (read more)
Browse Rotary Stages Datasheets for PI (Physik Instrumente) L.P. -
, Woodward Inc., General Dynamics, and the U.S. Air Force (AFMETCAL). These include accessories for measuring features of aircraft assemblies and Metrology systems for measuring large and small aircraft engine components. Pratt & Whitney also provides measurement solutions to some of the worlds (read more)
Browse Dimensional Indicators and Comparators Datasheets for Pratt & Whitney Measurement Systems, Inc. -
A global leader in the design and manufacture of advanced optical metrology systems — Zygo Corporation — and Digital Surf, creator of the Mountains® software platform for image and surface analysis in microscopy and metrology, today announced the (read more)
Browse Image Analysis Software Datasheets for Zygo Corporation -
Measuring Precise Thread Lead Although thread lead checks are sometimes ignored in today’s cost-sensitive Metrology laboratories there are two important reasons to insure correct thread lead (read more)
Browse Optical Micrometers and Laser Micrometers Datasheets for Pratt & Whitney Measurement Systems, Inc. -
Universal Model 175 The most popular ID/OD instrument in the world. Automatic probe movement with a push of a button. High accuracy is maintained by its laser interferometer, zero Abbe offset design, and large measuring table with swivel, center, tilt, and elevation control knobs (read more)
Browse Optical Micrometers and Laser Micrometers Datasheets for Pratt & Whitney Measurement Systems, Inc.
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21st Century Measuring Challenges
. It also made it possible to take measurements more quickly and more often, fostering huge improvements in response time and quality. Far from the comfort of metrology labs where qualified inspectors operate digital CMMs with their heavy, stable granite table, portable measurement is still facing
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Tests with a Carlina-type diluted telescope; Primary coherencing
The blue circles symbolize the three primary mirrors at the ground level around the metrology table (Fig. 10).
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Machine Tool Metrology
…Fig. 1.6b, bottom), often known as the points of minimum deflection, which is not valid for End Standards such as Length Bars, but can be utilised more effec- tively for the support points for flat metrology tables , or similar level items…
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Final mechanical and opto-mechanical design of the Magdalena Ridge Observatory interferometer
The measurements were done using a SpotOn detector that was placed 3m away on the adjacent table (the metrology table is made of three 0.7m x 2.4m tables rigidly attached together), next to the metrology block.
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Mechanical design of the Magdalena Ridge Observatory Interferometer
Upon exiting the DLA, light from each UT enters the Inner-BCA, pass above the DL metrology table and reach the Beam Compressing Telescope (BCR) where will be optically compressed from 95mm to 18mm and directed to the Fringe Tracker (FT).
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Use of Non-contact Thin Gap Sensors in Controlling Coater Gap Uniformity
Another traditional method would be to split the extruder die in two and put each half on a granite metrology table .
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Scientific Sources and Teaching Contexts Throughout History: Problems and Perspectives
…as in the case of the surface calculation referred to on tablet UM 29-15-192 mentioned above, there has been a process of conversion of metrological data into sexagesimal place value notation according to the correspondence established in the metrology tables .
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An experimental testbed for NEAT to demonstrate micro-pixel accuracy
Mirror Metrology table Pseudo stellar sources .
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Radiation Protection in Nuclear Medicine
Most individual dosemeters and area monitors are calibrated in terms of the ICRU operational dose quantities for external exposure as part of a legal radiation protection metrology Table 2.3.
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First review of a suitable metrology framework for the 65-nm technology node
LER is to be evaluated according to the definition reported in the ITRS 2001 Lithography Metrology table : LER —Local line width variation (3cr total, all frequency components included, both edges) evaluated along a distance equal to four technology nodes.
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Progress in the stressed-lap polishing of a 1.8-m f/1 mirror
We calibrate and test the lap by placing it on a metrology table consisting of three hard-point supports and an array of 32 spring-loaded displacement transducers located on a square grid that covers the 600-mm diameter working surface.