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  • MICRO: 'Round the Circuit
    Nikon Precision says it has accelerated its development plans for argon fluoride (ArF) immersion lithography. The exposure tool supplier plans to ship a mass-production-type system with a "hyper-NA" projection lens (numerical aperture (NA) of >=1.0) by the second half of 2005, a schedule
  • MICRO: Tool Fab Support
    In the last 25 years, there has been dramatic progress in the pursuit of enhanced lithographic resolution, enabling continuous improvements in IC production. These advancements have been driven by reducing the exposure wavelength and increasing the projection lens numerical aperture (NA
  • MICRO: Products
    The Model 5200 PanelPrinter system performs advanced photolithography for large-area substrate applications that require 0.8 -4- um resolution. Fully integrated subsystems include a high-fidelity projection lens and illumination system, a precision x-y stage, an automated substrate-alignment system
  • Society for Information Display New Products February 2003
    an innovative DLP Cinema head design that integrates with industry-standard lamp consoles and fits easily in any type of commercial theater projection booth. It provides SMPTE brightness on screens between 35 and 60 feet wide, and includes as standard an automated three-position lens turret system
  • MICRO: Sematech aims spotlight at breakthrough technology for spotting
    enable operators to characterize aberrations in the projection lenses for steppers and scanners. Because the tools are able to both identify the ability to image critical layers and reduce illuminator errors, one of the primary benefits is an improvement in production yields, Litel claims. One
  • MICRO: Liquid Lithography
    about defect sources. " "Defects are number one, " says Will Conley. The two International Sematech assignees are, of course, speaking about immersion lithography (IML), the technology that places water between lens and wafer, thus extending optical lithography's lifetime once again. With a lens
  • Coming to a theater near you
    dinosaurs. The DMD's highly reflective surface uses the projector's light source by eliminating obstacles in its path and reflecting more light onto the screen. Depending on an image's content, DLP's light source reflects the image either through a lens and onto the screen or directly to a light absorber
  • Diffraction, Fourier Optics and Imaging - Preface
    as a flat lens. Chapter 16 is a continuation of Chapter 15, and covers new methods of coding. DOEs and their further refinements. The method of projections onto convex sets. (POCS) discussed in Chapter 14 is used in several ways for this purpose. The. methods discussed are virtual holography, which makes

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