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  • Plastics for plasma etching
    It's a mistake to assume wafer clamp rings have to polyimide. Several other work about as well. Some surprising conclusions came out of clamp-ring material tests, which took place in a plasma-etch equipment from Tek-Vac Industries Inc. Each process chamber (square boxes, left and right) handles
  • Steppers go shaftless
    backlash. Two Size 17 IOS motors accurately position pneumatic grippers that clamp test tubes filled with DNA fluid to within 0.001 in. The exploded view of the IOS motor shows the reversal of the rotor and stator and the hollow core construction. The graph shows the torque-versus-speed qualities

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