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  • MICRO: Products
    dense-fluid processor is a fully integrated, 200-mm single-wafer chamber that enables the development and evaluation of technologies for deposition, cleaning, conditioning, and lithography applications using supercritical CO . The vacuum-compatible system can be integrated with vacuum
  • MICRO:Product Technology News (March 2001)
    A noncontact, single-wafer, double-sided cleaner satisfies the demands of next-generation technology nodes. The 8200 spin processor has a throughput of 200 wafers per hour, providing an alternative to conventional cleaning technologies. The four-chamber tool is based on the 4200 Spin-Processor

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