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  • MICRO: Industry News: Lead Story (June2000)
    the analogy to draw attention to an important new set of SEMI standards on equipment voltage. Fab management often doesn't pay much attention to its power supply until glitches occur, explains Malhoit. And, as any process or facilities engineer will tell you, such sags in voltage occur regularly
  • MICRO: Semicon West Technical Program (June 2002)
    to assist both suppliers and users. STEP: Practical Experiences with SEMI F47 Voltage Sag Immunity Chair: Cliff Greenberg, Nikon Precision The new SEMI F47 standard sets requirements for how equipment must tolerate voltage sags on the ac power line. This program reviews the practical experience

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