The 2001 Series flow meters provide a means of indication at the lowest cost for non-corrosive flow applications. The tapered metering tube is integrally machined in the acrylic body while a standard direct reading scale engraved on the body affords maximum simplicity of installation and operation. Available options include integral needle control valves, as well as flow controllers on the inlet or outlet.

Features

• Ultra fast 300 millisecond settling time
• MultiFloTM gas and range programmability
• User Accessible Service Port with Advanced Diagnostics with User-Friendly Interface
• Corrosion resistant Hastelloy® sensor tube and valve seat.
• Pressure Transient Insensitivity (PTI), High Accuracy (HA), Safe Delivery System (SDS) Options
• Local display
• Extremely low wetted surface area

Benefits

• Delivers outstanding performance, reliability, and flexibility.
• Ability to reconfigure the mass flow controller for new gas calibrations and full scale ranges without the time and costs of removing the device from the gas line.
• Convenient interface to diagnostics for maximum uptime.
• Ensures device is operating within user specified limits for high yield and maximum uptime.
• Provides unmatched long-term sensor stability ensuring maximum yield and throughput.
• Improves yield. Reduces overall gas panel costs.

Key Applications

• Semiconductor
• MOCVD
• Gas flow control applications that require a high purity all-metal flow path

Seeking an affordable solution for non-corrosive and low-pressure applications? Now there's a clear choice: 2500 Series plastic variable area flow meters.

Constructed from precision-machined acrylic, 2500 Series flow meters use annealed, unibody construction that eliminates the leaks and panel detachment common with non-annealed, molded designs. An easy-to-read scale, rod-guided float and positive-stop valve ensure performance and safety. Choose from several valve, fitting, o-ring and float options to fit your specific project.

Features

• Direct reading air or water scales available in English or metric scales
• Measure flow rates from 40 ccm to 4000 lpm air and 4 ccm to 20 gpm water
• Three accuracy levels to choose from: 2%, 3% or 5% Full Scale
• Premium, threaded brass panel mounting inserts keep meter from detaching
• Can be configured with a control valve (or no valve)
• Fittings and valves available in brass, stainless steel or FNPT PVC pipe connections for in-line or panel mount
• Removable back plate and hex head for wrench

Benefits

• Durable, one-piece, clear acrylic construction
• Large scales are easy-to-read
• Valve with positive stop stays in place under pressure
• Rod guided float for stable measurements
• Fitting, valve and o-ring options accommodate multiple applications
• Multiple connection options for easier installation
• Easy disassembly and assembly for maintenance

Applications

• Air sampling equipment aquaculture
• Desalinization equipment
• Gas analyzers
• Medical systems
• Photo processing equipment
• Water treatment and distribution systems
• Purge

Achieve superior accuracy and unmatched zero stability in ultra-low-flow gas and liquid measurement and control with the Quantim® Coriolis mass flow controllers and meters from Brooks Instrument. Brooks has taken the lead in driving improvements in Coriolis flow technology: Our patented Coriolis sensor design measures low flows independent of fluid type or process variables. The result: unsurpassed performance - the most accurate, stable, repeatable and reproducible mass flow measurement and control, even under changing conditions.

Features

• True mass flow measurement
• Accurate density measurement
• 100% of fluid flows through low-mass sensor tube (no bypass)
• Proprietary optical sensing technique enables accuracy at extreme low flows
• Measures both liquids and gases over a wide flow range
• Coplanar valve delivers super-fast response times
• Smallest, lowest-flow Coriolis meter and controller available on the market
• Measures and outputs two of four parameters: mass flow, volumetric flow, temperature, density
• Independent diagnostic/service port and user display
• Variety of material options, enclosure types and area classifications available

Benefits

• Advanced sensor and tube technology enable accuracy at extreme low flows
• Process chemistry and/or process conditions can be altered without the need to change or recalibrate the measurement system
• Multivariable outputs improve and simplify process monitoring and diagnostics, increasing yields and reducing cost of ownership
• Integrated sensor, valve and PID control in one package simplifies purchase, installation and startup
• Reaches set point in <2 seconds reducing wasted material
• Compact size enables easy integration into intricate process systems
• No internal moving parts minimizes maintenance

Applications

• Vacuum processes
• Catalyst research
• Liquid precursor delivery to vaporizers
• Precision coating
• High accuracy filling stations
• Metering pump feedback/control loop

Features

• Wide range of flow ratings
• Operating temperature range 33 to 125°F (1°C to 52°C)
• Pressure ratings up to 500 psig / 34 bar
• Two accuracy levels to choose from: 2% or 1% Full Scale
• Optional high and low-flow reed switch or inductive alarm, also for safe use in explosive hazardous areas
• Calibrated to process conditions with 127mm or high resolution 250mm direct reading scales
• Brass or 316L stainless steel end fittings
• Flanged or threaded connections
• Horizontal or vertical connections
• Horizontal end fittings 360° rotatable
• 180° viewing window
• Rugged, vented polycarbonate enclosure available on most models

Benefits

• Tube and float can be re-ranged in line, minimizing process downtime
• Rotatable connections for easy installation at any angle
• Packing gland or O-ring sealing to meet piping requirements or customer preference
• No power required; reduces installation cost and provides flow measurement in hazardous areas
• Low-pressure drop allows for economical pump selection
• Optional needle valve mounted to inlet or outlet for setting the desired flow
• Optional economical brass fittings for delicate applications (e.g. avoidance of hydrogen embrittlement)

Applications

• Industrial processes
• Pharmaceutical production
• Oil and gas pumping and refining processes
• Chemical manufacturing
• Burner control
• Water treatment and distribution systems

The GT130x Series glass tube VA flow meters are a family of versatile and economical meters designed for general use in applications with moderate metering accuracy requirements — typical accuracy ranges are 1% to 10% full scale, depending on the model selected. They are ideal for purge type service, seal oil systems, bearing lubrication and cooling water indication, and offer o-ring seal construction with ten-to-one rangeability, as well as a wide range of float types and capacity ranges.

The GT130x Seal Series flow meters provide an excellent and modular drop-in replacement for existing Brooks Instrument Full View® 1100 Series meters: models 1110, 1114, 1140, 1144.

Features

• Broad range of flow ratings from 0.8 to 25 gpm; 3 to 50 scfm
• Pressure ratings up to 500 psig / 34 bar
• Accuracy ranges from 1% to 10% Full Scale
• Calibrated to process conditions with 75mm, 127mm or high resolution 250mm direct reading scales
• Sturdy bolted side-plate construction
• Standard NPT or flanged connections
• Vertical inlets and outlets standard
• Glass containment safety sleeve ensures personal safety

Benefits

• Cost-effective accuracy combined with long-lasting repeatable measurement
• Reliable O-ring seal design for leak-free process connections
• Rugged side-plate construction protects glass tube from piping stress and/or vibration
• Vertical and/or horizontal NPT or flanged connections enables easy connection with existing process piping
• Meter inlet and outlet same size; provides positive seal that is easy to maintain
• Optional needle valve mounted to inlet or outlet for setting the desired flow
• Optional economical brass fittings for delicate applications (i.e. avoidance of hydrogen embrittlement)

Applications

• Industrial processes
• Pharmaceutical production
• Oil and gas pumping and refining processes
• Chemical manufacturing
• Burner control
• Water treatment and distribution systems

For a wide range of chemical, petrochemical, biotechnology, research and analytical applications, Sho-Rate™ Series glass tube variable area flow meters provide industry-leading repeatability and reliability in two versatile lines.

Sho-Rate™ 1350/1355 flow meters deliver up to 3% accuracy and 0.25% repeatability depending on the model. Sho-Rate™ 1250/1255 flow meters offer a durable, cost-effective design to meet OEM requirements for systems requiring metering and analyzer integrators.

Features

• Flow Ranges:
• Air: Up to 140 scfh / 63 slpm
• Water: Up to 34 gph / 2000 cc/min
• Borosilicate glass tubes are compatible with most gases and fluids
• Float materials include black glass, 316 stainless steel, sapphire, Carboloy®, tantalum
• Magnification ensures scales are easy to read

Sho-Rate™ 1350 / 1355 / 1358 features include:

• Three accuracy levels: 3% (low-flow Model 1355), 5% (low-flow Model 1350) or standard accuracy of 10% (high-flow Model 1358)
• Repeatability of 0.25% Full Scale (0.5% Full Scale for Model 1358)
• Scale includes built-in magnifier – scale decals can be applied directly to the tube to support unique flow ranges and units of measure
• Options include standard or NRSTM integral needle control valves, as well as flow controllers on the inlet or outlet to go beyond measurement

Sho-Rate™ 1250 / 1255 features include:

• Two accuracy levels: 5% Full Scale (Model 1250), 10% Full Scale (Model 1255)
• Standard direct-read scales for common units and fluids – 65 mm, 150 mm scale lengths (approximate)
• Inlet valve and outlet valve with options of cartridge valve, precision control valve or no valve
• Easy-change design allows quick interchangeability of tube assemblies
• Rotating lens provides a 180° view with magnification

Benefits

• Options offer value-added features to meet project or OEM requirements
• Borosilicate glass is resistant to thermal shock and corrosive gases and fluids
• Corrosion-resistant material options for scales, floats, fittings and valves accommodate demanding applications
• Integral float stops prevent loss of float during tube removal
• Enhance accuracy with easy-to-read scales with magnification

Applications

• Pharmaceutical production
• Research
• Chemical manufacturing
• Analytical instrumentation
• Water treatment and distribution systems

Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFlo^TM technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

The result: increased process flexibility and efficiency combined with the industry’s highest levels of process gas purity to help maximize yields and productivity.

Features

• Long-term zero stability of <±0.5% full scale per year
• Settling times: 700 ms - <1 second
• Full-scale flow rates up to 300 slpm
• All-metal seal flow path: option for 4µ or 10µ inch Ra surface finish
• Corrosion-resistant Hastelloy® T-Rise sensor improves measurement reproducibility at elevated temperatures
• MultiFlo^TM gas and range programmability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
• Local display
• Optional SDS gas delivery
• DeviceNet^TM, RS-485 L-Protocol and analog interfaces

Benefits

• High-performance components marathon tested to seven times semiconductor industry standards for reliability
• All metal, corrosion resistant flow path with reduced surface area and unswept volumes ensures faster dry-down during purge steps
• With MultiFlo^TM, new process gases and/or ranges can be set in under 60 seconds – no more removing and calibrating MFCs
• Highly configurable platform enables drop-in replacement and upgrade of most brands of metal sealed MFCs, including the former Celerity, Mykrolis, Tylan and UNIT brands
• GF120 Safe Delivery System (SDS®) is Brooks’ state-of-the-art low pressure drop mass flow controller for the delivery of sub atmospheric safe delivery system (SDS) gases used in Implant and Etch processes
• Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting

Applications

• Semiconductor etch tools
• Thin-film chemical vapor deposition systems (CVD, MOCVD, PECVD, ALD)
• Physical vapor deposition (PVD) systems
• Epitaxial process systems

Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to bring PTI mass flow control technology to market, GF125 minimizes process gas flow variation due to pressure and temperature fluctuations. Standard MultiFlo™ technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.

The result: reduced size and cost of gas panels, by eliminating the need for point of use pressure regulators, pressure transducers, and associated hardware, combined with the industry’s best PTI performance to maximize yields and productivity.

Features

• Long-term zero stability of <±0.5% full scale per year
• Ultra-fast settling times: 300 ms - <700 ms
• Full-scale flow rates up to 300 slpm
• Ultra-high purity flow path - 4µ inch Ra surface finish
• SEMI F20 compliant wetted materials
• Corrosion-resistant Hastelloy® T-Rise sensor with high speed ARM processor
• Fast acting, diaphragm-free valve assembly is unaffected by differential pressure and tested for over seven million cycles without any failures
• MultiFlo^TM technology offers unparalleled flexibility—one device can be programmed for thousands of different gas and flow range configurations without removing the MFC from the gas line or compromising accuracy
• Local display indicates flow, temperature, pressure and network address for easy troubleshooting of gas supply and isolation valve issues
• Optional High Accuracy configuration
• DeviceNet^TM, RS-485 L-Protocol and analog interfaces

Benefits

• By combining Brooks' patented flow sensor technology with a fast acting diaphragm free valve assembly, the GF125 Series delivers up to 3 times faster response and settling time compared to other mass flow controllers
• Optimized wetted flow path for improved dry-down
• With MultiFlo^TM, MFC full scale flow range can be re-scaled down typically by a factor of 3:1 with no impact on accuracy, turndown or leak by specifications, for optimum process and inventory flexibility
• A full gas database delivers the widest process gas coverage
• Pressure Transient Insensitivity (PTI) capability overcomes limitations of conventional MFCs that react strongly to small inlet pressure fluctuations. The result is stable performance and predictable accuracy.
• GF125 High Accuracy (HA) with superior low setpoint accuracy makes it possible to replace two (a high and low flow) mass flow controllers with one, providing immediate cost savings while freeing up a gas line for greater gas panel flexibility.
• Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting

Key Applications

• Semiconductor
• MOCVD
• Gas flow control applications that require a high purity all-metal flow path

For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast response sensor and patented 4^th generation MultiFlo™ technology as our best-selling GF100 series, it’s the right choice for operations that need high performance at a value price point. Moving to a metal sealed MFC brings the full benefit of MultiFlo^TM multi-gas/multi-range capability since there are no limitations in gases that can be used, enhanced purity of the gas due to elimination of oxygen permeation through elastomers, and a reduction in maintenance since metal seals will last indefinitely.

Features

• Long-term zero stability of <±0.5% full scale per year
• <1 second settling times
• Full-scale flow rates up to 300 slpm
• All-metal seal flow path - 16µ inch Ra surface finish
• Corrosion-resistant Hastelloy® sensor can operate at lower temperatures for gases prone to thermal decomposition
• Programmable MultiFlo^TM capability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
• Best-in-class temperature coefficient specification through active temperature compensation
• Embedded self-test routines and independent diagnostic/service port
• Slimline body with VCR fittings
• DeviceNet^TM, Profibus®, RS-485 and analog interfaces

Benefits

• Fast <1 second flow settling time eliminates wasted gas and process variability
• No elastomer seals that can have oxygen permeation, requiring replacement over time
• MultiFlo^TM simplifies and streamlines changing process gases — no more removing and calibrating MFCs
• New gases and/or ranges can be set in under 60 seconds
• Measurement accuracy not affected by temperature variations
• Convenient access to diagnostics port for maximum uptime
• Compact size eases integration into tight machine spaces; excellent choice for retrofits
• Multi-protocol communication interface simplifies integration into existing systems

Applications

• Cost efficient retrofit/upgrade of legacy MFCs in refurbished semiconductor process tools
• Reduce MFC inventory in six-inch/eight-inch semiconductor fabs
• MOCVD for LED and power device manufacturing
• Solar/thin film chemical vapor deposition (CVD) systems
• Analytical OEM equipment

Reliable and affordable, MT3600 metal tube variable area flow meters satisfy the operational and reliability requirements for multiple industrial purge meter applications, such as metering coolants, pump seal fluids, lubricants under pressure and opaque fluids.

Featuring high-temperature and high-pressure ratings, MT3600 flow meters are designed to work safely under difficult and hazardous industrial environments. They are constructed of wetted parts made from industrial grade stainless steel, so they can be used with a wide range of fluids, and feature an integral flow valve and controller, enabling users to read and control the flow rate.

Features

• Measure flow rates from 23 to 1660 scfh air and 5 to 300 gpm water
• Operating temperature range: -20°F to 122°F (-29°C to 50°C)
• Maximum fluid pressure 1500 psig
• Flanged or NPT connections to system piping
• No external power required
• Optional adjustable reed type one or two switches alarm output for signaling high and low flow conditions
• CSA-approved flow alarm

Benefits

• Reliable and economical measurement for high flow rate, high temperature purge applications
• High-strength steel construction designed to work safely under difficult conditions
• Integral control valve and controller enable users to read and control flow rate
• Flanges engineered for easy system integration
• No power required reduces installation cost
• Meter designed for in-situ maintenance and cleaning, minimizing downtime

Applications

• Basic liquid or gas flow measurement
• Metering coolants
• Pump seal fluids
• Lubricants under pressure
• Opaque fluids

Need reliable, durable flow measurement in high-pressure, high-temperature or hazardous process settings? The MT3750 metal tube variable area flow meter from Brooks Instrument is your hard-working answer.

Constructed from high-strength steel, the MT3750 Series VA flow meter features a compact design and multiple threaded and flange connection options to make it easier to install and integrate into existing plants, as well as a cost-effective replacement for glass tube flow meters. Certified explosion proof, it also offers optional transmitters or inductive alarms for more advanced flow measurement and process data capture operations.

Features

• Low flow ranges: Up to 100 I/h or 26 gph
• High pressure and temperature rating
• Miniature size even with process flanges
• Multiple threaded or flanged connections
• Large, easy-to-read indicator
• No external power required
• Optional accessories include needle valve, flow controllers and alarms
• Available with 4-20 mA flow signal transmitter, and/or reed switch alarm signals or inductive alarms for high/low-flow conditions

Benefits

• Engineered for repeatable accuracy in low-flow rate applications with high-pressure or hazardous fluids
• Stainless steel construction and compact size enables easier installation into tight spaces, hazardous environments or remote areas
• Compatible with a wide range of liquids and gases
• Multiple connection types enable use in multiple location in one plant or process
• Optional alarms, transmitters and limit switch controllers provide added levels of measurement and control
• Great replacement for glass tube flow meters (same lay length as Sho-Rate Series 1350)

Applications

• Basic liquid or gas flow measurement
• Rotating equipment flow measurement
• Process analyzers
• High-pressure flow on offshore oil platforms
• Burner control
• Gas chromatography
• Chemical injection
• Purge liquid or gas metering

Engineered to work where you need it: Choose the MT3809 variable area (VA) flow meter (rotameter) for all the high-pressure, high-temperature VA flow measurement and control requirements on your next project.

Proven to deliver reliable, repeatable gas and liquid flow measurement and control in thousands of installed locations, the MT3809 is practical and economical, making it the “go-to” choice for Engineering Procurement Contractors (EPC) and major industrial facilities worldwide.

The MT3809G configuration features a digital LCD display with local operator interface, providing valuable process outputs such as totalization and alarm signals. It also lets users make parameter changes without removing the cover, which means changes can be made even in hazardous areas.

Features

• Extremely wide range of flow ratings - supports very low to very high flow rates
• Temperature ratings from -325°F to 788°F (-198°C to 420°C )
• Pressure ratings up to 6,000 psi (standard products) and up to 20,000 psi (custom models)
• Enhanced LCD display with local operator interface (optional)
• High-/low-flow alarm functions that meet SIL 2 requirements
• 316SS stainless steel flameproof housing meets ATEX gas group IIC/Class 1 Div 1 hazardous area rating
• Selection of corrosion resistant wetted materials and indicator housing to fit demanding application needs
• Gasket sealing surface meets ASME requirements, no special gaskets required
• Improved transmitter has HART 7 capability and worldwide approvals

Benefits

• Repeatable flow measurement even at very low process temperatures and the highest process temperatures of any VA meter
• Designed to meet ASME B31.3 – a requirement requested at the world’s major industrial facilities
• Product documentation, material traceability and project planning perfectly blends with the needs of EPC system integrators
• No power required – reduces usage cost and installation complexity
• A reliable flow measurement technology that can communicate to control systems over analog or digital interfaces even when power is not available
• Broad pressure and temperature range enables choosing one meter for multiple uses
• Excellent reliability and dependability – in use for decades worldwide
• Globally approved for use in explosive, hazardous environments, meeting the highest international explosion safety requirements
• Multiple connection options for easier installation
• Unique flange design avoids the need for special gaskets
• Weldneck flanges are standard and can be examined for integrity

Applications

• Basic liquid or gas flow measurement
• Monitoring lubrication and/or coolant for rotating equipment
• Measurement of additives
• Monitoring gases for furnaces
• High-pressure flow on offshore oil platforms
• Chemical injection

Economy combined with accuracy: 3000 Series variable area flow meters from Brooks Instrument provide a proven, easy-to-read device to monitor and control air and water flows. Well-suited for easy integration into industrial instrument panels, 3000 Series VA flow meters are constructed of high-impact resistant polycarbonate and are available with 24 different air and water ranges.

Features

• Flow Ranges:
• Air: 50 ccm to 100 lpm
• Water: 4 ccm to 40 gph
• Standard black body, custom colors available upon request
• Ideal for OEM panel mounted equipment

Benefits

• Clear, easy-to-read 10:1 turn direct reading scales
• Durable, high-impact materials ensure long-lasting performance
• Precision-adjusting valve for accurate, leak-free control

Applications

• Industrial air and water delivery systems
• Air sampling equipment
• Gas analyzers
• Medical systems
• Water treatment and distribution systems