Equilibar introduces a new type of vacuum regulator with more than 5X the flow stability of traditional spring regulators. That means that your vacuum process can remain stable even as gas flow rate changes over wide ranges.

• Can be used with manual set-point adjustment or computer automation
• Is installed between your vacuum pump and your process
• Does not allow air into your vacuum system
• Controls in range 0.4 - 30 inHg
• Available sizes 1/4” through 3”
• Available in Stainless Steel, PVC, or other materials

• Precision Back Pressure Regulator for Hygienic Service
• For gas, liquid and mixed phase processes
• Wide Range of working Pressures and Flows
• Rugged 316 stainless steel Bar Stock Design with no Welded Fittings
• Hygienic: No Crevices, <32Ra Finish
• 3 Piece Low Dead Volume Design
• Ports are the lowest point to allow gravity draining

The FD back pressure regulator (BPR) series is specifically designed for a variety of gas, mixed phased and liquid applications where high precision and sanitary or crevice free internals are a must. The FD series hygienic back pressure regulators are designed such that the inlet and outlet ports are the lowest points in the regulator. This allows all internal fluids to drain by gravity. Easy disassembly facilitates maintenance and quick cleaning. Tri-Clamp fittings standard with 6mm, 10mm, and ½ inch internal porting. The direct diaphragm sealing technology allows for precision and turn down ratios that cannot be found in traditional BPR designs.

• Precision Back Pressure Regulator
• For gas & mixed phase processes
• Rugged Bar Stock Design
• Available in ¼ inch through 1 inch sizes
• SS316 standard with Hastelloy C optional
• Diaphragms available in PTFE, Hastelloy, SS316, and polyimide

The GS series is specifically designed for a variety of gas service and mixed flow applications where precision is a must.

Applications span from ultra low flow rates to extreme high pressures. By using unique combinations of diaphragms and o-ring materials, Equilibar regulators are able to perform in the harshest environments that include high temperature and aggressive chemicals. Based on a patented direct diaphragm sealing technology that offers high turn down ratio’s and incredible sensitivity. This allows the GS series back pressure regulator (BPR) to operate where traditional BPR designs fail.

Equilibar's Research Series back pressure regulator offer precision performance for high pressure applications up to 5000 psig. These regulators provide stable inlet pressure across widely varying flow rates, for liquid, gas, and mixed phase fluids.

We can provide diaphragms of Stainless Steel 316, Polyimide, and Hastelloy for in this pressure range.

EHP Series Details

The EHP is a variant of Equilibar’s popular HP Serie s and has very similar performance to the HP1 and HP2 units. However, this unit has been designed to withstand the high pressure stresses that occur at pressures at up to 10,000 psig serv - ice. The unit can be machined with high pressure fittings such as Speedbite and HPLC (Valco-style) compression fittings.

New Beta HT Series Extends Temperature to 450C

Equilibar has just made its HT Series back pressure regulators available for beta release to select customers. These regulators utilize a graphite seal for temperatures to 450C and pressures to 5000 psig. The Grafoil GTA seal is nuclear grade purity (99.9% graphite).

• Controls Back Pressures from: 0.02 (.5” WC) to 1000 psig
• Can be configured for vacuum service
• Temperatures to 327ºC (620ºF )
• Used in higher flow rate applications
• Standard Cv from 1E-11 to 0.6
• Standard 316L Stainless Steel Body; Hastelloy C and PTFE also available
• NPT, VCR/VCO type and Valco (low dead volume) ports available
• Wide Variety of Diaphragms Including PTFE, Polyimide, SS316, Viton, and Nitrile
• Chemical Compatibility: Can be configured to meet your aggressive chemistry
• Highest available sensitivity and precision

Each of these standard Instrument Series models is based on our patented Equilibar precision back pressure regulator (BPR) technology. These models are capable of greater than 1000:1 flow rate turn-down ratios in most applications.

The HF High Flow Series BPR functions like the LF Low Flow Series, except with higher flow capacity.

• Controls Back Pressures Between: 0.02 (.5” WC) to 5000 psig
• High precision and accuracy
• Temperatures to 327ºC (620ºF )
• Standard Cv from 1E-11 to 0.07
• Standard 316L Stainless Steel Body; Hastelloy C also available
• NPT, VCR/VCO type and Valco (low dead volume) ends available
• Wide Variety of Diaphragms Including PTFE, Polyimide, SS316, and glass reinforced PTFE
• Chemical Compatibility: Can be configured to meet your aggressive chemistry

Each of these standard Instrument Series models is based on our patented Equilibar precision back pressure regulator (BPR) technology. These models are capable of greater than 1000:1 flow rate turn-down ratios in most applications.

The HP Series BPR has the same performance and design as the LF but with a more robust body rated to 5000 psig.

• Controls Back Pressure Between: 0.02 (.5” WC) to 1000 psig
• For pressure control at low flow rates
• Temperatures to 327ºC (620ºF )
• Standard Cv from 1E-11 to 0.07
• Standard 316L Stainless Steel Body; Hastelloy C and PTFE also available
• NPT, VCR/VCO type and Valco (low dead volume) ends available
• Wide Variety of Diaphragms Including PTFE, Polyimide, SS316, Viton, and Nitrile
• Chemical Compatibility: Can be configured to meet your aggressive chemistry
• Highest available sensitivity and accuracy

Each of these standard Instrument Series models is based on our patented Equilibar precision back pressure regulator (BPR) technology. These models are capable of greater than 1000:1 flow rate turn-down ratios in most applications.

The LF Series BPR is capable of low flow operation down to about 10 cc/min of gas.

• Controls Back Pressure Between: 0.02 (.5” WC) to 3000psig
• Optimized for ultra low flow pressure control applications
• Temperatures to 327ºC (620ºF )
• Standard Cv from 1E-11 to 0.05
• Standard 316L Stainless Steel Body; Hastelloy C and PTFE also available
• NPT, VCR/VCO type and Valco (low dead volume) ends available
• Wide Variety of Diaphragms Including PTFE, Polyimide, SS316, Viton, Nitrile
• Chemical Compatibility: Can be configured to meet your aggressive chemistry
• Highest available sensitivity and accuracy

Each of these standard Instrument Series models is based on our patented Equilibar precision back pressure regulator (BPR) technology. These models are capable of greater than 1000:1 flow rate turn-down ratios in most applications.

The ULF Series BPR back pressure regulator (BPR) functions similar to Equilibar’s LF and HP Series BPR’s. In some applications, however, the ULF is able to extend low flow performance down to 0.01 to 0.1 ml/min (gas). Equilibar application engineers will provide guidance when the advantages of the ULF design outweigh any potential disadvantages.

• Standard Pressure Range: 0.02 (.5” WC) to 1500 psig
• Ultra Low to Zero flow performance
• Standard Cv from 1E-11 to 0.01
• Standard 316L Stainless Steel Body; Hastelloy C and PTFE also available
• NPT, VCR/VCO type and Valco (low dead volume) ends available
• Wide Variety of Diaphragms Including PTFE, Polyimide, SS316
• Chemical Compatibility: Can be configured to meet your aggressive chemistry
• Highest available sensitivity and accuracy

The ZF Series Back Pressure Regulator ( BPR) extends Equilibar’s low flow performance down to effective zero flow while maintaining a very stable inlet pressure. While such incredibly low flow capability is not required for most laboratory applications, it is useful for reservoir core analysis and other lab reactor applications with microscopic, microfluidic, or intermittent flow rates.

Unlike traditional designs the patent-pending ZF works by using an elastomeric soft sealing mechanism with a novel seal support structure. At 1000 psig set-point (dome loading), for example, the device will typically hold between 1006 and 1008 psig on the inlet through an incredible 10 to 12 orders of flow rate magnitude. With absolute inlet flow shut-off (static reactor conditions), the regulator retains approximately 1002 psig.

The ZF Series is not suitable for all applications and has a narrow pressure and flow operating range. In order to maintain reasonable elastomeric seal life, flow rates less than 1 standard liter/minute and set-point pressures below 1500 psig are recommended. High temperatures can shorten seal life as well. Equilibar engineers will provide guidance in determining when the ZF Series is applicable.

• Precision Back Pressure Regulator
• For liquid, gas & mixed phase processes
• SS316 Rugged Bar Stock Design
• Unique Chatter Suppression Feature in liquid only applications
• High Precision and sensitivity
• PTFE, stainless steel, and Hastelloy diaphragms available

The NL series back pressure regulators are specifically designed liquid, gas and mixed phase services.

Applications span from ultra low flow rates to extreme high pressures. By using unique combinations of diaphragms and o-ring materials, Equilibar® regulators are able to perform in the harshest environments that include high temperature and aggressive chemicals. The patented direct diaphragm sealing technology allows the NL series of back pressure regulators (BPR’s) to offer sensitivity and turn down ratios much higher than traditional BPR designs.