Design Features

• Designed for high-performance scanning and inspection
• Active air preload on all air-bearing surfaces
• Linear encoder feedback provides subnanometer resolution
• High stiffness for heavy loads and excellent geometrical performance
• Four models with travels from 50 to 200 mm
• Integral counterbalance

Design Features

• Designed for high-performance alignment and assembly
• 0.5 nm closed-loop resolution
• Fully preloaded air-bearing
• Low-noise linear amplifiers
• Complete noncontact design

Design Features

• Designed for high-performance scanning and inspection
• 450 mm wafer compatible
• Active air preload on all air-bearing surfaces
• Linear encoder feedback provides subnanometer resolution
• High stiffness for heavy loads and excellent geometric performance
• Travel up to 500 mm

Design Features

• Integral bellows protect the drive and bearing system from contamination
• Designed for high-performance scanning and inspection
• Air-on-air preload on all air-bearing surfaces
• Linear encoder feedback provides nanometer-level
• High stiffness for heavy loads and excellent
• Travel up to 500 mm

Design Features

• Wide base for large offset loads
• 450 mm wafer compatible
• Powerful dual linear motor drive
• Designed for high-performance scanning and inspection
• Active air preload on all air-bearing surfaces
• Linear encoder feedback provides sub-nanometer resolution
• High stiffness for heavy loads and excellent geometric performance
• Four models with travels from 200 mm to 500 mm

Design Features

• Integral bellows protect the drive and bearing system from contamination
• Wide base for large offset loads
• Powerful dual linear motor drive
• Designed for high-performance scanning and inspection
• Air-on-air preload on all air-bearing surfaces
• Linear encoder feedback provides nanometer-level resolution
• High stiffness for heavy loads and excellent geometric performance
• Four models with travels from 200 mm to 500 mm

Design Features

• Fully preloaded air-bearing
• 450 mm wafer compatible
• Travel to 1.2 meter
• Linear encoder or laser interferometer feedback
• Complete noncontact design
• Ultra-smooth design for outstanding velocity stability

Design Features

• Active air preload on all air-bearing surfaces
• Travel to 1 meter
• Linear encoder or laser interferometer feedback
• High stiffness for heavy loads and excellent geometric performance
• Integrated XY subsystems including granite

Design Features

• Large clear aperture
• Full preload on all axes
• Dual linear-motor-driven X and Y axes
• Noncontact linear encoder for high accuracy

Design Features

• 450 mm wafer compatible
• Full preload on all axes
• Dual linear-motor-driven Y axes
• Travel to 1.2 meter by 1.2 meter
• Linear encoder or laser interferometer feedback
• Active yaw control

Design Features

• 450 mm wafer compatible
• Maximize throughput with 2 m/s scan velocity and 5 g acceleration
• Faster turnaround and minimized settling times
• Active yaw control
• Linear encoder or laser interferometer feedback
• Travel to 1.2 m by 1.2 m

Design Features

• Air bearings for ultra-smooth motion
• All axes are fully preloaded
• Dual linear-motor-driven lower axis
• Travel to 1 m x 1 m
• Options include Z axis, vibration isolation, machine base and control enclosure

Design Features

• Unique Z stage design incorporates fully preloaded air bearings
• Less than or equal to ??2 arc sec roll, pitch and yaw over full travel
• Submicron closed-loop positioning
• Travel options from 50 to 150 mm
• Precision-ground ball-screw-drive eliminates the need for special counterbalance

Design Features

• Integrated low-profile XY linear motor stage
• Nanometer-level performance in a large travel format
• High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis
• In-position stability of <1 nm
• Anti-creep crossed-roller bearings
• High dynamic performance

Design Features

• Integrated, low-profile, XY linear motor stage
• 25 mm x 25 mm or 50 mm x 50 mm travel
• Nanometer-level performance in a large travel format
• High resolution (1 nm), repeatability (75 nm) and accuracy (250 nm) per axis
• In-position stability of <1 nm
• Anti-creep crossed-roller bearings
• High dynamic performance

Design Features

• Linear brushless servomotors for superior performance and longevity
• Customizable Z and theta axes for increased flexibility
• Optional machine base and risers
• Optional electroless nickel for ESD protection and medical applications
• Compact design reduces overall machine size
• Ideal for die bonding, wire bonding, WLP and DNA profiling

Design Features

• High velocity to 3 m/s and high acceleration to 3 g
• High-power linear brushless servomotors
• Customizable Z and theta axes
• Noncontact linear encoders
• Optional machine base and risers

Design Features

• Optimized design for precise contouring in a compact footprint
• Velocity to 3 m/s and acceleration to 5 g
• High power brushless linear servomotors for smooth motion
• Travels up to 500 mm X 500 mm
• Optional electroless nickel for ESD protection
• Customizable Z and theta axes for flexible configurations
• Noncontact linear encoders
• Configurable cable management system allows for integration of fiber lasers, cameras, air lines, etc. for multiple applications

Design Features

• Optimized design for precise contouring
• Velocity to 3 m/s and acceleration to 5 g
• High power brushless linear servomotors for smooth motion
• Travels up to 1.3 m X 1.3 m
• Customizable Z and theta axes for flexible configurations
• Noncontact linear encoders
• Configurable cable management system allows for integration of fiber lasers, cameras, air lines, etc. for multiple applications

Design Features

• Configurable T-style robot up to 1.5 m x 0.5 m x 0.3 m travel
• Velocities up to 1.4 m/s provide high throughput
• Integrated Cable Management System (CMS) shortens your machine build
• 3-axis load up to 25 kg for demanding applications
• Customizable Z and/or theta axis for easy integration of any process equipment
• Teach mode with Aerotech controllers for fast deployment

Design Features

• Shown with optional YZ, two motorized axis head and granite bridge
• 2 m/s, 3g max speeds with 1 kg load
• 100 kg load capacity
• Accuracy ±4 µm calibrated, ±25 µm uncalibrated

This is the two-meter travel, direct-drive PRO225LM linear-motor stage. It is used for laser processing, testing, and high-accuracy motion metrology. It is shown mounted (not mandatory) to a granite spar with a motorized YZ two-axis head. The stage can be configured to provide three-axis linear motion.

Design Features

• Closed-loop laser interferometer or linear encoder feedback
• Fully preloaded air bearing
• Advanced PCI-bus-based or Automation 3200 software-only controller
• Low-noise linear amplifiers
• Complete noncontact design
• Includes granite base and optional vibration isolation system
• Ultra-precise velocity control

Design Features

• Dual carriage on common bearing
• Independent or coordinated motion
• 2.5 nm resolution
• Noncontact linear motor drive
• Turnkey drive and control electronics
• Auxiliary axes available

Design Features

• Designed for high-performance photonics alignment and assembly
• Linear encoder feedback provides up to 2 nm resolution
• 62 picometer resolution available with the Automation 3200
• Fully-preloaded air bearing
• Complete noncontact design
• Ultra-smooth velocity control

Design Features

• 3- to 6-axis photonics alignment
• Noncontact linear motor drive
• 2.5 nm resolution linear motion
• 0.027 to 0.058 arc second angular resolution
• Turnkey drive and control electronics
• Direct-drive rotary axes
• Raster, spiral, or power peaking algorithms
• Interface to industry-standard power meters
• Integrated vision systems options

Design Features

• 3-axis photonics alignment
• Noncontact linear motor drive
• 2.5 nm resolution linear motion
• Low C.T.E. construction
• Insensitive to environmental changes

Design Features

• 450 mm wafer compatible
• Air-bearing scan axis; mechanical-bearing step axis
• Dual linear-motor-driven step axis
• Travel to 1.2 meter by 1.2 meter
• Linear encoder or laser interferometer feedback

Design Features

• Three-axis photomask alignment stage
• Standard interface for six or eight-inch masks
• Integral vacuum groove for mask retention
• Low profile for easy integration into optics train
• Direct-drive brushless servomotors

Design Features

• High-performance in a cost-effective, economic package
• Rugged mechanical design
• Available with servomotor or stepping motor
• Nine models with travels from 50 mm to 600 mm
• Vacuum and cleanroom versions available

The ECO115SL is part of the ECO linear stage family, building upon Aerotech’s long tradition of producing low total cost of ownership motion designs. Excellent positioning specifications, high stiffness, and a variety of options and features combined with economic pricing make the ECO115SL stage ideal for medium-performance production applications requiring ball-screw stage actuation

Quality Mechanical Construction

A long-life recirculating linear guide bearing system and quality construction make the ECO115SL an attractive solution for applications where up-time is critical. Unlike low-cost competitive motion stages, the ECO115SL can be integrated into complex machines with the assurance it will perform at a high level and outlast other machine components.

Stepper Motor Option

For cost sensitive applications, the ECO115SL series includes several NEMA 23 stepper motor options. With the ability to run on standard wall voltages, the ECO115SL provides plug-and-play capability with a minimal amount of supporting electrical equipment.

Design and Integration Flexibility

The ECO115SL is designed with many standard features and options that make the design adaptable to specific applications. It is available in nine different models with travels ranging from 50 mm to 600 mm and speeds up to 300 mm/s.

The base mounting holes are accessible from the outside of the stage for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. Each stage also mounts to another ECO115SL or ECO165SL for easy integration of multi-axis systems.

Optional tabletops are available with either English or metric mounting patterns. A third tabletop option features hole patterns to allow the direct attachment of several types of Aerotech rotary stages.
Aerotech BM or BMS series brushless servomotors are available with a variety of encoder options providing net resolutions ranging from 0.5 µm down to sub-nm. A holding brake can be added to the motor for vertical applications. A motor fold-back kit is available for space-constrained applications to reduce the overall stage length.
The ECO115SL stage series offers many options to fit the exact requirements of numerous applications. Its flexible, cost-effective design easily makes it one of the best value linear ball-screw stage series available today.

Design Features

• High-performance in a cost-effective, economic package
• Rugged mechanical design
• Available with servomotor or stepping motor
• Nine models with travels from 50 mm to 600 mm
• Vacuum and cleanroom versions available

The ECO165SL is part of the ECO linear stage family, building upon Aerotech’s long tradition of producing low total cost of ownership motion designs. Excellent positioning specifications, high stiffness, and a variety of options and features combined with economic pricing make the ECO165SL stage ideal for medium-performance production applications requiring ball-screw stage actuation.

Quality Mechanical Construction

A long-life recirculating linear guide bearing system and quality construction make the ECO165SL an attractive solution for applications where up-time is critical. Unlike low-cost competitive motion stages, the ECO165SL can be integrated into complex machines with the assurance it will perform at a high level and outlast other machine components.

Stepper Motor Option

For cost sensitive applications, the ECO165SL series includes several NEMA 23 stepper motor options. With the ability to run on standard wall voltages, the ECO165SL provides plug-and-play capability with a minimal amount of supporting electrical equipment.

Design and Integration Flexibility

The ECO165SL is designed with many standard features and options that make the design adaptable to specific applications. It is available in nine different models with travels ranging from 50 mm to 600 mm and speeds up to 300 mm/s.

The base mounting holes are accessible from the outside of the stage for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. Each stage also mounts to another ECO165SL or ECO225SL for easy integration of multi-axis systems.

Optional tabletops are available with either English or metric mounting patterns. A third tabletop option features hole patterns to allow the direct attachment of several types of Aerotech rotary stages.
Aerotech BM or BMS series brushless servomotors are available with a variety of encoder options providing net resolutions ranging from 0.5 µm down to sub-nm. A holding brake can be added to the motor for vertical applications. A motor fold-back kit is available for space-constrained applications to reduce the overall stage length.
The ECO165SL stage series offers many options to fit the exact requirements of numerous applications. Its flexible, cost-effective design easily makes it one of the best value linear ball-screw stage series available today.

Design Features

• High-performance in a cost-effective, economic package
• Rugged mechanical design
• Available with servomotor or stepping motor
• Nine models with travels from 100 mm to 800 mm
• Vacuum and cleanroom versions available

The ECO225SL is part of the ECO linear stage family, building upon Aerotech’s long tradition of producing low total cost of ownership motion designs. Excellent positioning specifications, high stiffness, and load capacity combined with economic pricing make the ECO225SL stage ideal for medium-performance production applications requiring higher load capability in a ball-screw stage.

Quality Mechanical Construction

A long-life recirculating linear guide bearing system and quality construction make the ECO225SL an attractive solution for applications where up-time is critical. Unlike low-cost competitive motion stages, the ECO225SL can be integrated into complex machines with the assurance it will perform at a high level and outlast other machine components.

Stepper Motor Option

For cost-sensitive applications, the ECO225SL series includes several NEMA 34 stepper motor options. With the ability to run on standard wall voltages, the ECO225SL provides plug-and-play capability with a minimal amount of supporting electrical equipment.

Design and Integration Flexibility

The ECO225SL is designed with many standard features and options that make the design adaptable to specific applications. It is available in nine different models with travels ranging from 100 mm to 800 mm and speeds up to 300 mm/s.

The base mounting holes are accessible from the outside of the stage for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. Each stage also mounts to another ECO225SL for easy integration of multi-axis systems.

Optional tabletops are available with either English or metric mounting patterns. A third tabletop option features hole patterns to allow the direct attachment of several types of Aerotech rotary stages.
Aerotech BM or BMS series brushless servomotors are available with a variety of encoder options providing net resolutions ranging from 0.5 μm down to sub-nm. A holding brake can be added to the motor for vertical applications. A motor fold-back kit is available for space-constrained applications to reduce the overall stage length.
The ECO225SL stage series offers many options to fit the exact requirements of numerous applications. Its flexible, cost-effective design easily makes it one of the best value linear ball-screw stage series available today.

Design Features

• Improved second-generation design
• High-performance in a cost-effective package
• Rugged mechanical construction
• Optional linear encoder
• 18 models with travels from 50 mm to 600 mm
• Vacuum and cleanroom versions available

The PRO115SL and PRO115SLE are Aerotech’s second-generation PRO115 stage designs with many improvements and added features. Enhanced positioning specifications coupled with competitive pricing make the PRO115SL/SLE stage the ideal choice for both medium and high-performance applications.

Rugged Mechanical Construction

A long-life recirculating linear guide bearing system and a low-friction sealing solution make the PRO115SL/SLE an attractive solution for industrial applications such as laser machining. The basic external construction of the PRO115SL/SLE design provides protection from debris while the side-seals prevent dirt and particulates from entering the stage. The curved hard-cover design provides a natural shape that prevents excessive debris from collecting on the stage.

Linear Encoder Option

For applications requiring direct-metrology of the output carriage, the PRO115SLE integrates a direct linear encoder that is protected by the stage sealing system. Amplified sine and digital TTL output are available as standard options for the linear encoder.

Design and Integration Flexibility

The PRO115SL/SLE is designed with many standard features and options that make the design incredibly flexible and allow it to be easily tailored to a specific application. The PRO115SL/SLE is available in 18 different models with travels ranging from 50 mm to 600 mm and speeds up to 300 mm/s.

The base mounting holes are accessible from the outside of the stage allowing for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. The tabletop is available with both English and metric mounting patterns and can be ordered with brush attachments to clear any debris that may collect on the stage hard cover. Tabletops with hole patterns that allow the direct attachment of Aerotech’s ADRS, ACS-LP, and AGR rotary stages are also available.

Aerotech BM or BMS series brushless servomotors are available with a variety of encoder options providing net electronic resolutions ranging from 0.5 μm down to sub-nm. A holding brake can be added to the motor for vertical applications. A motor foldback kit is available for spaceconstrained applications to reduce the overall stage length.

The PRO115SL/SLE series is also available with cleanroom preparation and vacuum versions.

Design Features

• Improved second-generation design
• High-performance in a cost-effective package
• Rugged mechanical construction
• Optional linear encoder
• 18 models with travels from 50 mm to 600 mm
• Vacuum and cleanroom versions available

The PRO165SL and PRO165SLE are Aerotech’s second-generation PRO165 stage designs with many improvements and added features. Enhanced positioning specifications coupled with competitive pricing make the PRO165SL/SLEstage the ideal choice for both medium and high-performance applications. The design is similar to the PRO115SL/SLE series, providing additional load capacity and stiffness with larger bearings and a wider cross-section.

Rugged Mechanical Construction

A long-life recirculating linear guide bearing system and a low-friction sealing solution make the PRO165SL/SLE an attractive solution for industrial applications such as laser machining. The basic external construction of the PRO165SL/SLE design provides protection from debris while the side-seals prevent dirt and particulates from entering the stage. The curved hard-cover design provides a
natural shape that prevents excessive debris from collecting on the stage.

Linear Encoder Option

For applications requiring direct-metrology of the output carriage, the PRO165SLE integrates a direct linear encoder that is protected by the stage sealing system. Amplified sine, digital TTL output, and absolute encoders are available as standard options for linear feedback.

Design and Integration Flexibility

The PRO165SL/SLE is designed with many standard features and options that make the design incredibly flexible and allow it to be easily tailored to a specific
application. The PRO165SL/SLE is available in 18 different models with travels ranging from 50 mm to 600 mm and speeds up to 300 mm/s.

The base mounting holes are accessible from the outside of the stage allowing for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. The tabletop is available with both English and metric mounting patterns and can be ordered with brush attachments to clear any debris that may collect on the stage hard cover. Tabletops with hole patterns that allow the direct attachment of Aerotech’s ADRS, ACS-LP, ADRT, ACS, and AGR rotary stages are also available.

Aerotech BM or BMS series brushless servomotors are available with a variety of encoder options providing net electronic resolutions ranging from 0.5 μm down to sub-nm. A holding brake can be added to the motor for vertical applications. A motor foldback kit is available for spaceconstrained applications to reduce the overall stage length.

The PRO165SL/SLE series is also available with cleanroom preparation and vacuum versions.

Design Features

• Improved second-generation design
• High-performance in a cost-effective package
• Rugged mechanical construction
• Optional linear encoder
• 20 models with travels from 100 mm to 1000 mm
• Vacuum and cleanroom versions available

The PRO225SL and PRO225SLE are Aerotech’s second-generation PRO225 stage designs with many improvements and added features. Enhanced positioning specifications coupled with competitive pricing make the PRO225SL/SLE stage the ideal choice for both medium and high-performance applications. The design is similar to the PRO165SL/SLE series, providing additional load capacity and stiffness with larger bearings and a wider cross-section.

Rugged Mechanical Construction

A long-life recirculating linear guide bearing system and a low-friction sealing solution make the PRO225SL/SLE an attractive solution for industrial applications such as laser machining. The basic external construction of the PRO225SL/SLE design provides protection from debris while the side-seals prevent dirt and particulates from entering the stage. The curved hard-cover design provides a natural shape that prevents excessive debris from collecting on the stage.

Linear Encoder Option

For applications requiring direct-metrology of the output carriage, the PRO225SLE integrates a direct linear encoder that is protected by the stage sealing system. Amplified sine, digital TTL output, and absolute encoders are available as standard options for linear feedback.

Design and Integration Flexibility

The PRO225SL/SLE is designed with many standard features and options that make the design incredibly flexible and allow it to be easily tailored to a specific application. The PRO225SL/SLE is available in 20 different models with travels ranging from 100 mm to 1000 mm and speeds up to 220 mm/s.

The base mounting holes are accessible from the outside of the stage allowing for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. The tabletop is available with both English and metric mounting patterns and can be ordered with brush attachments to clear any debris that may collect on the stage hard cover. Tabletops with hole patterns that allow the direct attachment of Aerotech’s ADRS, ACS-LP, ADRT, ACS, CCS, ALAR, and AGR rotary stages are also available.

Aerotech BM or BMS series brushless servomotors are available with a variety of encoder options providing net electronic resolutions ranging from 0.5 μm down to sub-nm. A holding brake can be added to the motor for vertical applications. A motor foldback kit is available for spaceconstrained applications to reduce the overall stage length.

The PRO255SL/SLE series is also available with cleanroom preparation and vacuum versions.

Design Features

• Improved second-generation design
• High-performance in a cost-effective package
• Rugged mechanical construction
• Optional linear encoder
• 12 models with travels from 300 mm to 1000 mm
• Vacuum and cleanroom versions available

The PRO280SL and PRO280SLE are Aerotech’s second-generation
PRO280 stage designs with many improvements and added features. Enhanced positioning specifications coupled with competitive pricing make the PRO280SL/SLE stage the ideal choice for both medium and high-performance applications. The design is similar to the PRO225SL/SLE series, providing additional load capacity and stiffness with larger bearings and a wider cross-section.

Rugged Mechanical Construction

A long-life recirculating linear guide bearing system and a low-friction sealing solution make the PRO280SL/SLE an attractive solution for industrial applications such as laser machining. The basic external construction of the PRO280SL/SLE design provides protection from debris while the side-seals prevent dirt and particulates from entering the stage. The curved hard-cover design provides a natural shape that prevents excessive debris from collecting on the stage.

Linear Encoder Option

For applications requiring direct-metrology of the output carriage, the PRO280SLE integrates a direct linear encoder that is protected by the stage sealing system. Amplified sine, digital TTL output, and absolute encoders are available as standard options for linear feedback.

Design and Integration Flexibility

The PRO280SL/SLE is designed with many standard features and options that make the design incredibly flexible and allow it to be easily tailored to a specific application. The PRO280SL/SLE is available in 12 different models with travels ranging from 300 mm to 1000 mm and speeds up to 220 mm/s.

The base mounting holes are accessible from the outside of the stage allowing for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. The tabletop is available with both English and metric mounting patterns and can be ordered with brush attachments to clear any debris that may collect on the stage hard cover. Tabletops with hole patterns that allow the direct attachment of Aerotech’s ADRS, ACS-LP, ADRT, ACS, CCS, ALAR, and AGR rotary stages are also available.

Aerotech BM or BMS series brushless servomotors are available with a variety of encoder options providing net electronic resolutions ranging from 0.5 μm down to sub-nm. A holding brake can be added to the motor for vertical applications. A motor foldback kit is available for spaceconstrained applications to reduce the overall stage length.

The PRO280SL/SLE series is also available with cleanroom preparation and vacuum versions.

Design Features

• Improved second-generation design
• High-performance in a cost-effective package
• Rugged mechanical construction
• Optional linear encoder
• 12 models with travels from 300 mm to 1000 mm
• Vacuum and cleanroom versions available

The PRO560SL and PRO560SLE are Aerotech’s second-generation PRO560 stage designs with many improvements and added features. Enhanced positioning specifications coupled with competitive pricing make the PRO560SL/SLE stage the ideal choice for both medium and high-performance applications. The design is similar to the PRO280SL/SLE series, providing additional load capacity and stiffness with a wider cross-section.

Rugged Mechanical Construction

A long-life recirculating linear guide bearing system and a low-friction sealing solution make the PRO560SL/SLE an attractive solution for industrial applications such as laser machining. The basic external construction of the PRO560SL/SLE design provides protection from debris while the side-seals prevent dirt and particulates from entering the stage. The curved hard-cover design provides a natural shape that prevents excessive debris from collecting on the stage.

Linear Encoder Option

For applications requiring direct-metrology of the output carriage, the PRO560SLE integrates a direct linear encoder that is protected by the stage sealing system. Amplified sine, digital TTL output, and absolute encoders are available as standard options for linear feedback.

Design and Integration Flexibility

The PRO560SL/SLE is designed with many standard features and options that make the design incredibly flexible and allow it to be easily tailored to a specific application. The PRO560SL/SLE is available in 12 different models with travels ranging from 300 mm to 1000 mm and speeds up to 220 mm/s.

The base mounting holes are accessible from the outside of the stage allowing for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. The tabletop is available with both English and metric mounting patterns and can be ordered with brush attachments to clear any debris that may collect on the stage hard cover. Tabletops with hole patterns that allow the direct attachment of Aerotech’s ADRS, ACS-LP, ADRT, ACS, CCS, ALAR, and AGR rotary stages are also available.

Aerotech BM or BMS series brushless servomotors are available with a variety of encoder options providing net electronic resolutions ranging from 0.5 μm down to sub-nm. A holding brake can be added to the motor for vertical applications. A motor foldback kit is available for spaceconstrained applications to reduce the overall stage length.

The PRO560SL/SLE series is also available with cleanroom preparation and vacuum versions.

Design Features

• High-performance in a cost-effective, economic package
• Rugged mechanical design
• Direct-drive linear motor for precision motion
• Eight models with travels from 100 mm to 600 mm

The ECO165LM series, part of the ECO linear stage family, builds upon Aerotech’s long tradition of producing low total cost of ownership motion designs. Excellent positioning specifications, high stiffness, and a variety of options and features combined with economic pricing make ECO165LM stages an ideal choice for medium-performance production applications.

Quality Mechanical Construction

A long-life recirculating linear guide bearing system and quality construction make the ECO165LM an attractive solution for applications where uptime is critical. Unlike low-cost competitive motion stages, the ECO165LM can be integrated into complex machines with the assurance it will perform at a high level and outlast other machine components.

Precision Motion Performance

ECO165LM series stages are optimized with high precision, noncontact linear encoders. Precision recirculating linear bearings, along with Aerotech’s machining and assembly craftsmanship, enable the best geometric performance per unit price on the market.

The precision noncontact encoders enable minimum incremental motion to 10 nm with micrometer-level repeatability. The optional HALAR factory calibration improves positioning accuracy to ±1.5 µm.

Direct-Drive Linear Motor

The ECO165LM comes standard with Aerotech’s field-proven linear motor technology. It is available with a high-performance linear-motor option for applications requiring higher force and acceleration motion profiles. In both cases the ironless forcer coil provides high force with zero cogging for super-smooth velocity and position control. This ironless design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor stages, the linear motor has zero backlash, no windup, zero friction, and excellent dynamic responsiveness.

Design and Integration Flexibility

The ECO165LM is available in eight different models with travels ranging from 100 mm to 600 mm and speeds up to 2 m/s. Configurable cable management solutions are available for single and multi-axis systems as standard options.

The base mounting holes are accessible from the outside of the stage for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. Tabletops are available with both English and metric mounting patterns. Tabletop hole patterns allow the direct attachment of several types of Aerotech rotary stages.

The ECO165LM stage is a flexible, yet cost-effective, linear motion stage with many options to fit the exact needs of the application. It is easily the best performing and most versatile linear stage per unit price that money can buy.

Design Features

• High-performance in a cost-effective, economic package
• Rugged mechanical design
• Direct-drive linear motor for precision motion
• Nine models with travels from 100 mm to 800 mm

The ECO225LM series, part of the ECO linear stage family, builds upon Aerotech’s long tradition of producing low total cost of ownership motion designs. Excellent positioning specifications, high stiffness and load capacity, and a variety of options and features combined with economic pricing make ECO225LM stages an ideal choice for medium-performance production applications.

Quality Mechanical Construction

A long-life recirculating linear guide bearing system and quality construction make the ECO225LM an attractive solution for applications where up-time is critical. Unlike low-cost competitive motion stages, the ECO225LM can be integrated into complex machines with the assurance it will perform at a high level and outlast other machine components.

Precision Motion Performance

ECO225LM series stages are optimized with high precision, noncontact linear encoders. Precision recirculating linear bearings, along with Aerotech’s machining and assembly craftsmanship, enable the best geometric performance per unit price on the market.
The precision noncontact encoders enable minimum incremental motion to 10 nm with micrometer-level repeatability. The optional HALAR factory calibration improves positioning accuracy to ±1.5 µm.

Direct-Drive Linear Motor

The ECO225LM comes standard with Aerotech’s field-proven linear motor technology. It is available with a high-performance linear-motor option for applications requiring higher force and acceleration motion profiles. In both cases the ironless forcer coil provides high force with zero cogging for super-smooth velocity and position control. This ironless design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor stages, the linear motor has zero backlash, no windup, zero friction, and excellent dynamic responsiveness.

Design and Integration Flexibility

The ECO225LM is available in nine different models with travels ranging from 100 mm to 800 mm and speeds up to 2 m/s. Configurable cable management solutions are available for single and multi-axis systems as standard options.
The base mounting holes are accessible from the outside of the stage for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. Tabletops are available with both English and metric mounting patterns. Tabletop hole patterns allow the direct attachment of several types of Aerotech rotary stages.
The ECO225LM stage is a flexible, yet cost-effective, linear motion stage with many options to fit the exact needs of the application. It is easily the best performing and most versatile linear stage per unit price that money can buy.

Design Features

• Compact, high-performance elevation stage
• Precision-ground ball screw or lead screw
• DC or stepper motor options
• High-vacuum capable
• Precision crossed-roller bearings
• Multi-axis configurations available with MPS linear and rotary stages

Aerotech’s MPS-SV series lift stages provide high-performance elevation motion in a compact, cost-effective design. Offered in two sizes (MPS50SV and MPS75SV), these lift stages are perfect for applications ranging from light-duty laboratory research to high-duty-cycle production processes. Multi-axis stage configurations can be assembled easily with other MPS linear and rotary stages using the multitude of adapter brackets and mounting compatibility inherent in the entire MPS stage family designs.

High-Accuracy Construction

All MPS-SV stages feature a precision-ground ball screw and preloaded crossed-roller bearings providing smooth and accurate geometric performance, exceptional accuracy and repeatability, and 0.05 µm minimum incremental motion capabilities. The MPS50SV is also offered with a lead-screw drive option for more cost-sensitive applications.
MPS-SV motor options include a DC servomotor with rotary encoder and a stepper motor. A precision-machined wedge design and lateral constraint system provide high stiffness and load capacity while at the same time providing proper constraint of lateral motions.

Vacuum and Mounting Options

As with all MPS-series stages, the MPS-SV stages are available in an optional vacuum preparation to 10^-6 torr that includes a vacuum-rated connector. An optional mounting plate provides direct mounting to both English and metric optical breadboard tables. The inherent mounting compatibility of all MPS stages allows for simple mounting in multi-axis arrangements.

Design Features

• Compact, high-performance elevation stage
• Precision-ground ball screw or lead screw
• DC or stepper motor options
• High-vacuum capable
• Precision crossed-roller bearings
• Multi-axis configurations available with MPS linear and rotary stages

Aerotech’s MPS-SV series lift stages provide high-performance elevation motion in a compact, cost-effective design. Offered in two sizes (MPS50SV and MPS75SV), these lift stages are perfect for applications ranging from light-duty laboratory research to high-duty-cycle production processes. Multi-axis stage configurations can be assembled easily with other MPS linear and rotary stages using the multitude of adapter brackets and mounting compatibility inherent in the entire MPS stage family designs.

High-Accuracy Construction

All MPS-SV stages feature a precision-ground ball screw and preloaded crossed-roller bearings providing smooth and accurate geometric performance, exceptional accuracy and repeatability, and 0.05 µm minimum incremental motion capabilities. The MPS50SV is also offered with a lead-screw drive option for more cost-sensitive applications.
MPS-SV motor options include a DC servomotor with rotary encoder and a stepper motor. A precision-machined wedge design and lateral constraint system provide high stiffness and load capacity while at the same time providing proper constraint of lateral motions.

Vacuum and Mounting Options

As with all MPS-series stages, the MPS-SV stages are available in an optional vacuum preparation to 10^-6 torr that includes a vacuum-rated connector. An optional mounting plate provides direct mounting to both English and metric optical breadboard tables. The inherent mounting compatibility of all MPS stages allows for simple mounting in multi-axis arrangements.

Design Features

• Long-life linear guide bearing system
• Submicron closed-loop positioning
• Low-cost, high-performance stage
• 6, 13 and 25 mm travel models
• Precision-ground ball screw
• Integral or removable motor

Design Features

• High-load lift stage with aperture
• Submicron closed-loop positioning
• Excellent pitch and yaw characteristics over full travel
• 5 mm or 10 mm travel; custom designs for alternate travels available
• Optional cleanroom and ESD protection
• Precision-ground ball screw for high performance

Design Features

• Long life linear motion guide bearing system
• Ultra-fine resolution
• Integral bellows waycovers
• Low-profile compact design
• Includes brushless, slotless motor

Design Features

• Long life linear motion guide bearing system
• Ultra-fine resolution
• Integral bellows waycovers
• Low-profile compact design
• Submicron accuracy
• Optional high-accuracy linear encoder

Design Features

• Low cost; high performance
• Travel to 300 mm
• Crossed-roller bearings
• Three drive-screw choices and accuracy levels
• Low height profile
• Large tabletop mounting area with both metric and English mounting hole spacing and threads

Design Features

• Rugged construction
• Hard-coated tabletop and waycovers
• Optional high-accuracy, noncontact linear encoder
• Sealed design with optional air purge

Design Features

• Compact 50 mm width with travel to 50 mm
• Precision ground ball-screw or lead-screw drive
• DC servo or stepper motor
• Crossed-roller bearings
• High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.5 µm)
• High vacuum capable
• Compact multi-axis configurations

Design Features

• Compact 75 mm width with travel to 100 mm
• Precision ground ball-screw drive
• DC servo or stepper motor
• Anti-creep crossed-roller bearings
• High resolution (0.1 µm), repeatability (±0.75 µm) and accuracy (±1.0 µm)
• High-vacuum compatible
• Optional bellows waycovers
• Compact multi-axis configurations

Design Features

• Large, clear aperture
• Travel range from 100 mm x 100 mm to 400 mm x 400 mm
• High-performance linear motion guides
• 15 arc sec orthogonality
• Noncontact linear encoder for high accuracy

Design Features

• Nanometer performance with 5 mm vertical travel
• High resolution (2 nm), repeatability (100 nm) and accuracy (200 nm)
• In-position stability of <2 nm
• Anti-creep crossed-roller bearings
• High dynamic performance