Unmatched in Semiconductor process fluid heating. Single chamber sizes up to 18kW

• FEATURES

• Ruggedly designed for the most demanding recirculation or single pass chemical applications.
• Able to achieve the highest temperature heating, up to 210°C.
• All fluoropolymer wetted surfaces for virtually any wet chemistry application. Thick walled chamber provides long service life in the harshest high temperature applications.
• Long heater life for reduced cost of ownership (COO): Patented heater gas purge system continuously removes any chemical permeation and ensures long element life.
• Certification: CE, UL, Semi S2 and S3

• SPECIFICATIONS

• 1,000 watts up to 18,000 watts
• 200 to 600 volts, single or three phase (12kW and larger require three phase)
• Watt Density: 10 watts per square inch (1.5w/cm2)
• Fluid Connections: ¼-inch (6mm) to 1-inch (25mm); ½-inch (12mm) to 1-inch (25mm) Super 300 Type Pillar®
• Element Purge: Small amount of clean dry air (CDA) or N2 gas flows between the metal grounded element and the PTFE sheath. Purge minimizes potential for ionic contamination. Removes chemical permeation for longer service life

• OPTIONS AVAILABLE (CONSULT FACTORY)

• Horizontally mounted configuration
• PVDF high temperature mounting brackets
• Custom configurations, connections and cable lengths
• Capacitive style liquid level verification

Increased customization of high purity fluid heaters requires matching of size/price/performance with application requirements. Smaller, higher density, less expensive, recirculation heaters are increasingly required to match all of these constraints and improve yields in new and existing tools.

Process Technology has developed the Pulsar POU (point-of-use) heater to provide the perfect outcome for your application.

Product Description

Proven technology for UPDI heating applications and is suitable for the most stringent high purity specifications

• Features

• Small size enables mounting near point of dispense.
• Increased yield due to enhanced chamber matching.
• Enhanced yield due to optimized temperature gradient across the wafer surface.
• Reduced cost of ownership since decreased recirculation loop temperature extends bath chemical lifetime.
• Flexible mounting orientation: vertical or horizontal.
• Certification: UL499 and SEMI S2

• Specifications

• 50 to 2000 watts
• 120 volt to 480 volt, single phase.
• Temperature Range: Up to 180°C
• Temperature Accuracy: ≤+/-0.1° C, depending on operating conditions
• Flow Rate: 0.1 LPM to 3 LPM
• Pressure Range: 3 bar at 120°C
• Fluid Connections: 6 mm or 10 mm Pillar S300

• Options Available (consult factory)

• Overtemperature sensor
• High limit thermal protector

Delivers superior temperature stability and outstanding performance over a wide range of flow and temperature requirements.

• FEATURES

• Enhanced features include a non-casted structure, versatile flow rates, an expanded wattage range, and high-quality electropolished surfaces resulting in superior cleanliness.
• Grounded metal construction, multiple element thermocouples, insulated housing, and a hermetically sealed high limit thermal cutoff device (TCO)
• Can be used in single pass or recirculating applications for safely heating chemistries such as: EKC265, EKC8730, EKC270, ST28, ST26, ACT690C, MEK, NMP and IPA
• Certification: UL 823, UL 499, CSA 22.2, and CE; rated for Class I, Division 2 hazardous locations.

• SPECIFICATIONS

• 3,000-36,000 watts
• 120-600 V, single or three phase
• Pressure range: Up to 100 PSIG (689 kPa)
• Temperature range: Up to 180°C (356°F)
• Fluid Connections: ½-inch (12mm), ¾-inch (19mm), 1-inch (25mm) tube stubs (or custom connections); custom connections available.
• Electropolished 316L stainless steel, PFA and PTFE wetted surfaces, and a fluid pathway through a patented circular tubing array.

• OPTIONS AVAILABLE (CONSULT FACTORY)

• Custom configurations, connections and controller packages available.

Product Description

PFA and PTFE-wetted surfaces provide a higher level of purity for metal-free solvent heating.

• Features

• Frontier Plus+ is a high-wattage, inline chemical/solvent heater suitable for the most demanding high-purity applications.
• No wetted o-rings maintain an ultra clean heating process.
• The Frontier Plus+ offers outstanding performance in a flexible range of low to high (21 lpm) flows and temperature requirements.
• Safely heat process chemistries, including IPA
• Certification: UL499, Semi S2 and CE certified (pending).

• Specifications

• Construction: PFA and PTFE wetted surfaces, fluid pathway through manifold tubing oriented in a patented circular array.
• Standard Wattages: 2kW up to 24kW.
• Voltages: 200 to 480 volts, single or three phase (12kW and larger require three phase)
• Temperature Range: Up to 180°C (356°F) (Consult factory for watt density requirements).
• Fluid Connections: ½-inch (12mm), ¾-inch (19mm), or 1-inch (25mm) flared connections (custom connections available).

• Options Available (consult factory)

• Custom configurations, connections and cable lengths

Delivers superior temperature stability with changes in flow, and offer multiple temperature sensors to ensure safe operation.

• FEATURES

• Inline electropolished stainless steel or fluoropolymer heater for heating chemistries, single pass or recirculating.
• Hermetically sealed high limit thermal cutoff device (TCO)
• Insulated housing.
• Positive temperature coefficient (PTC) heating elements
• Certification: CE, ETL (tested to UL 823, UL 499 and CSA C22.2). Rated for Class I, Division 2 hazardous locations.

• SPECIFICATIONS

• 250-2000 watts (varies per product line)
• 120-480V, single phase
• Pressure range: Up to 200 PSIG (1379 kPa)
• Temperature range: Up to 180°C (356°F)
• Fluid Connections: 1/8” (3mm), 1/4” (6mm), 3/8” (9mm) or 1/2” (12mm); custom connections available.
• 316 electropolished stainless steel or PTFE wetted surfaces, fluid pathway through a stainless steel tube embedded in aluminum heating block.

• OPTIONS AVAILABLE (CONSULT FACTORY)

• Dual containment plumbing available

Ultra-fast heatup and superior temperature stability, regardless of application

• FEATURES

• >99% element efficiency contributes to low cost of ownership (COO) and excellent return on investment (ROI)
• 100% titanium heating elements provide very clean performance for precision cleaning applications.
• Excellent temperature accuracy over a wide flow range can substantially improve process consistency.
• Installation is fast and easy, and the TytanTM requires virtually no maintenance
• Certification: cULus

• SPECIFICATIONS

• 12,000 watts up to 144,000 watts
• 208 to 480 volts, three phase
• PID microprocessor based digital temperature control
• Temperature Limit; 194° F (90° C), depending on operating conditions
• Temperature Accuracy: +/-1°F, depending on operating conditions
• All titanium wetted surfaces
• Inlet/Outlet: 1"MNPT through 72kW; 2" MPNT 96kW and higher
• Housing: NEMA 1 rated, powder coated metal enclosure

• OPTIONS AVAILABLE (CONSULT FACTORY)

• CE or S2 compliance
• Remote Interface
• PLC Control
• Stainless steel elements and wetted parts

An excellent choice for SC1, SC2, and other quartz compatible applications.

• FEATURES

• Exceptionally easy maintenance and several plumbing configurations are available for maximum flexibility.
• Ultra-clean performance is achieved through the use of 100% high-purity quartz construction. No ionic or bacterial contamination.
• Patented cooling system significantly extends heater element life versus conventional designs. With cooling air directed only where it is needed (the lamp sockets), the heater uses minimal purge gas and heater efficiencies are maximized.
• The heating element is isolated from the process to virtually eliminate the potential for catastrophic process contamination.
• Space-conscious design minimizes footprint requirements
• Tangential flow pattern eliminates stagnant zones in the heater. The heater is self-draining and self-venting (upon proper installation).
• Certification: Certified to SEMI S2, S3 and UL 499 standards, CE compliant.

• SPECIFICATIONS

• 750 watts up to 12,000 watts
• 208 to 480 volts, single or three phase.
• Temperature Limit: 185° C, depending on operating conditions.
• Fluid Connections: 3/4" MNPT flare quartz connections
• Temperature Accuracy: 1° C, depending on operating conditions.
• Flow Rate: Up to 100 lpm
• Pressure Rating: 50 PSIG working
• MTBF: In excess of 20,000 hours
• Element Purge: Patented system using 3.5 SCFM (min.) clean dry air (CDA) or nitrogen (N,), 1/4" O.D. tube connector

• OPTIONS AVAILABLE (CONSULT FACTORY)

• Several plumbing configurations available, consult factory.
• Solution leak detection - capacitive-style leak detector.
• Solution temperature sensor subassembly: fluoropolymer sheathed “J” type thermocouple in a flared “T” fitting.
• Temperature regulating system with:
• Distributive zero-crossing SSR powered by open looped PID control (consult factory for details)
• Available: RS 232, RS 485, 4-20mA, or 0-10V interface
• Liquid over-temperature shutoff and alarm