KEY FEATURES

• Uni-directional repeatability down to 0.015 °
• Maximum speed on request °/sec
• Load capacity up to 0.28 kg
• Integrated reference switch
• Clear aperture 10 mm
• Rotation Range 360°, endless
• With thread mount 1/2 inch UNC
• Compact design

• Uni-directional repeatability down to 0.01 °
• Maximum speed 40 °/sec
• Load capacity up to 2 kg
• Integrated reference switch
• Clear aperture 40 mm
• Rotation range 360°, endless

The rotation stages DT-80 are a low cost alternative to the PI miCos high precision rotation stages DT-65 N and PRS-110. They are mainly developed for simple positioning in the laboratory. The large aperture of 40 mm diameter is suitable for many applications in the microscopy field. The worm screw and worm gear combination is preloaded to produce a near "zero-backlash" and smooth motion. Rotation stages of the series DT-80 can be driven by a DC or 2-phase stepper motor and are equipped with a mechanical reference switch. Additionally the DT-80 can be ordered with our smc pollux motor- controller module.

• Unlimited Rotation Range
• Maximum Payload: 2 kg
• Maximum Angular Velocity: 40 deg/second
• Maximum Angular Resolution: 0.004 deg
• Reproducibility: 0.01 deg unidirectional +/-0.5 deg bidirectional
• Open Aperture: 40 millimeters

• Unlimited Rotation Range
• Maximum Payload: 2 kg
• Maximum Angular Velocity: 7 deg/second
• Maximum Angular Resolution: 0.005 deg
• Reproducibility: 0.005 deg unidirectional +/-0.04 deg bidirectional
• Open Aperture: 20 millimeters

3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without friction. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.

Standard-class rotation stage Worm drive. Aperture with 20 mm Ø. Reference switch. Higher quality for high vacuum applications In this case, special components suitable for high vacuum are used, such as motor, measuring system, and limit switches. In addition, the surface is made of uncoated aluminum, the drive screw and guides are made of stainless steel. With this, the PI V7 vacuum class is reached, which means up to 10-7 hPa.

The L-886 is an accurate, cost-effective goniometer stage. It is based on a stepper motor combined with a linear measurement system for high accuracy. The L-886 is designed for cost conscious applications including micro assembly, component alignment, electronics manufacturing, and inspection. Cost-effective solution, specifically designed for rapid alignment in multichannel photonics Small, precise, and fast

• Extremely space-saving: Edge length only 30 mm, height 12 mm
• Positions small loads quickly and with precision: Velocity to 720 °/s, minimum incremental motion to 105 µrad
• Unlimited rotation range >360°
• Drive torque 10
• Self-locking when switched off: Saves energy and reduces generation of heat
• Light and low noise

Precision-class rotation stage

PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy consumption and heat generation is therefore considerably reduced. Applications with a low duty cycle that are battery-powered or heat-sensitive benefit from these characteristics. The position of the axis is measured by an encoder and an optical reference switch allows reliable repeatable motion. The piezo motor drive principle and its electrical operation is inexpensive and can be customized.

PILine® ultrasonic piezo motor

An integral part of a PILine® ultrasonic piezo motor is a piezo actuator that is preloaded against a movable, guided runner via a coupling element. The piezoceramic actuator is excited to ultrasonic oscillation by a high-frequency AC voltage between 100 and 200 kHz. Deformation of the actuator leads to periodic diagonal motion of the coupling element relative to the runner. The feed created is a few nanometers per cycle; the high frequencies lead to the high velocities. Preloading the piezoceramic actuator against the runner ensures self-locking of the drive when at rest and switched off.

Direct position measurement with incremental encoder

Noncontact optical encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring.

Valid patents

US patent no. 6,765,335B2
European patent no. 1267425B1

Fields of application

Micromanipulation, automation, biotechnology, sample manipulation, sample positioning, applications with limited space, vacuum applications to 10^-6 hPa (optional)

The direct-drive rotation stages of the V-62x series are designed for precision, high stiffness, a long lifetime, and ease of use, and can be mounted in any orientation. The V-62x stages offer superior performance regarding travel accuracy, flatness, and wobble. The ultra-precise deep groove ball bearings are preloaded and lubricated prior to delivery, meaning they are maintenance-free for the whole lifetime of the rotation stage.

• Rotational Range: 10 deg
• Maximum Angular Velocity: 15 degrees/second
• Payload: 2 kg
• Angular Resolution: 0.0000872 deg
• Angular Position Reproducibility: 0.0005 deg (unidirectional); ±0.0005 deg (bidirectional)
• Optional High-Precision Angular Encoder
• 60 x 25mm Clear Aperture

• Uni-directional repeatability down to 0.0005 °
• Maximum speed 15 °/sec
• Load capacity up to 2 kg
• Integrated limit switches
• Optionally: angular scale
• Clear aperture 30 mm
• Precise, smooth continuous 10° motion
• Together with WT-100 one center of rotation

The goniometer stages WT-85 and WT-100 are designed for all tasks where conventional rotation stages cannot be used due to limited space conditions or where a clear aperture is needed. Typical applications are metrology tasks in the area of laser technology and radiology. The goniometer stages WT-85 and WT-100 are designed to work together. When mounted orthogonally to each other they have a common center of rotation. The WT-85 has a 30 mm clear aperture. A unique driving mechanism insures a very quiet and smooth motion. It is driven directly by a DC or 2-phase stepper motor and can achieve a relatively high speed. The WT-85 stages are available with optional optical angular scales and are equipped with two limit switches.

The U-622 is the smallest brother of the U-624 and U-628 rotary stages. It provides highly dynamic motion and excellent position stability due to its direct-driven piezoceramic ring-shaped motor with self-locking properties. Very quiet operation with velocity up to 720°/sec.

• 720°/sec Max. Velocity
• Self-Clamping Ultrasonic Motor, No Jitter/Drift, No Holding Current
• Very Small Design: Ø20x10mm
• 175 µrad Encoder Resolution

• Compact: Edge length 50 mm, height 19 mm
• Positions loads quickly and with precision: Velocity to 720 °/s, minimum incremental motion to 51 µrad
• Unlimited rotation range >360°
• Drive torque 25
• Self-locking when switched off: Saves energy and reduces generation of heat
• Central aperture for more fields of application

Precision-class rotation stage

PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy consumption and heat generation is therefore considerably reduced. Applications with a low duty cycle that are battery-powered or heat-sensitive benefit from these characteristics. The position of the axis is measured by an encoder and an optical reference switch allows reliable repeatable motion. The piezo motor drive principle and its electrical operation is inexpensive and can be customized.

PILine® ultrasonic piezo motor

An integral part of a PILine® ultrasonic piezo motor is a piezo actuator that is preloaded against a movable, guided runner via a coupling element. The piezoceramic actuator is excited to ultrasonic oscillation by a high-frequency AC voltage between 100 and 200 kHz. Deformation of the actuator leads to periodic diagonal motion of the coupling element relative to the runner. The feed created is a few nanometers per cycle; the high frequencies lead to the high velocities. Preloading the piezoceramic actuator against the runner ensures self-locking of the drive when at rest and switched off.

Direct position measurement with incremental encoder

Noncontact optical encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring.

Valid patents

US patent no. 6,765,335B2
European patent no. 1267425B1

Fields of application

Micromanipulation, automation, biotechnology, sample manipulation, sample positioning, applications with limited space, optical metrology, vacuum applications to 10^-6 hPa (optional)

PIMag® magnetic direct drive3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without friction. The drives reach high velocities and accelerations. Iron core motors are used when forces and accelerations need to be achieved in a limited installation space. The design with iron cores maximizes the magnetic forces and ensures high thermal stability of the drive.

The directly driven low-profile rotation stages of the PIglide RL series are designed for the highest precision with low-profile design. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. The RL stages offer superior travel accuracy, flatness, and wobble performance. 3-Phase Torque MotorBrushlessSlotlessLow cogging torque Absolute encoder (optional)Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.

The PIglide RM series of motorized rotary air bearing stages are a complete positioning solution designed for accuracy, precision, high stiffness, and ease of use. They can be used in any orientation. These stages feature high performance, low-cogging frameless slotless torque motors, and optical encoders. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. Applications include optical alignment, metrology, inspection, calibration, and scanning. The RM stages offer superior runout, flatness, and wobble performance. Since they are completely frictionless, they exhibit no breakaway “stiction” or drag friction during operation. They are ideal for use in cleanrooms, require no maintenance or lubrication, and have unlimited life.

• Table Diameters from 50mm to 300mm
• 425kg Max Payload
• Radial/Axial Error Motion < 200nm
• Vertical or Horizontal Mounting
• Direct Drive Brushless Torque Motor
• Optical Encoder
• Completely Non-contact and Frictionless

Product overview

The directly driven flat rotation stages of the PIglide RLA series are designed for the highest precision. They have a low profile and a large clear aperture. The RLA stages offer a superior travel accuracy, flatness, and wobble performance.

Absolute encoder (optional)

Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.

Application fields

Tomography, beamline systems, wafer metrology, wafer inspection, measuring technology, inspection systems, calibration, scanning.

Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

3-Phase torque motor

• Brushless
• Low cogging torque

Accessories and options

• Incremental or absolute encoder
• PIglide filter and air preparation kit
• Single or multi-axis motion controllers and servo drives
• Multi-axis/customized setups
• Base plates made of granite and systems for reducing vibration

• Unlimited Rotation Range
• Maximum Payload: 10 kg
• Maximum Angular Velocity: 50 deg/second
• Maximum Angular Resolution: 0.0001 deg
• Reproducibility: 0.0002 deg unidirectional +/-0.0002 deg bidirectional
• Available Rotary Encoder
• Open Aperture: 35 millimeters

• Three Sizes: Ø60 mm: M-060; Ø100mm: M-061; Ø120mm: M-062
• Continuous Rotation
• Ultra - High Resolution
• Velocity up to 90 deg/sec
• Preloaded Worm Drive for Zero Backlash
• Active Drives^TM DC-Motor, Stepper-Motor and Manual Versions
• Choice of Motion Controllers
• Direction - Sensing Origin Switch

• Three Sizes: Ø60 mm: M-060; Ø100mm: M-061; Ø120mm: M-062
• Continuous Rotation
• Ultra - High Resolution
• Velocity up to 90 deg/sec
• Preloaded Worm Drive for Zero Backlash
• Active Drives^TM DC-Motor, Stepper-Motor and Manual Versions
• Choice of Motion Controllers
• Direction - Sensing Origin Switch

• Uni-directional repeatability down to 0.0003 °
• Maximum speed 150 °/sec
• Load capacity up to 50 kg
• Integrated reference switches
• Optionally: angular scale
• Clear aperture 120 mm
• Preloaded worm drive for zero backlash
• Vacuum Datasheet

The large clear aperture with a diameter of 120 mm is particularly significant for the rotation stages PRS-200. The body is fabricated from a special, high-rigidity, tempered aluminum alloy. Two calibrated preloaded zero backlash precision roller bearings guarantee an excellent flatness and smooth motion. A hardened and ground screw worm combined with a calibrated worm gear guarantee a quiet and smooth motion. As an option, the PRS-200 stages can be delivered with an integrated optical angular scale. The rotation stages PRS-200 are equipped with two reference switches which can be easily adjusted by the customer. Drive variations including DC or 2-phase stepper motors are available.

• Only 32 mm wide and 7 mm high
• Direct position measurement with incremental encoder with 0.75 µrad resolution (optional)
• Up to 3 µrad minimum incremental motion
• Rotation range >360°
• Velocity 45 °/s
• Suitable for high vacuum to 10^-6 hPa, ultrahigh vacuum variants for 10^-9 hPa are also available

Precision-class micro positioning stage

Q-Motion stages have very small dimensions and a high position resolution in the nanometer range. The piezo motor drive principle and the electrical operation are cost-efficient and can be customized

PIShift piezo inertia drives

Self-locking at rest, thus no heat generation. Velocity to 45 °/s. 7 m Nm holding torque, 6 m Nm drive torque

Fields of application

Industry and research. For metrology, microscopy, micromanipulation, biotechnology and automation

• Low profile: Only 14 mm in height
• Positions larger loads quickly and with precision: Load to 20 N, closed-loop velocity to 540 °/s, minimum incremental motion to 12 µrad
• Unlimited rotation range >360°
• Drive torque to 0.3 Nm in both directions of rotation
• Self-locking when switched off: Saves energy and reduces generation of heat
• Central aperture for more fields of application
• Vacuum versions available

Precision-class rotation stage

PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy consumption and heat generation is therefore considerably reduced. Applications with a low duty cycle that are battery-powered or heat-sensitive benefit from these characteristics. The position of the axis is measured by an encoder and an optical reference switch allows reliable repeatable motion. The piezo motor drive principle and its electrical operation is inexpensive and can be customized.

PILine® ultrasonic piezo motors

An integral part of a PILine® ultrasonic piezo motor is a piezo actuator that is preloaded against a movable, guided runner via a coupling element. The piezoceramic actuator is excited to ultrasonic oscillation by a high-frequency AC voltage between 100 and 200 kHz. Deformation of the actuator leads to periodic diagonal motion of the coupling element relative to the runner. The feed created is a few nanometers per cycle; the high frequencies lead to the high velocities. Preloading the piezoceramic actuator against the runner ensures self-locking of the drive when at rest and switched off.

Direct position measurement with incremental encoder

Noncontact optical encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring.

Crossed roller bearings

With crossed roller bearings, the point contact of the balls in ball bearings is replaced by a line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller bearings are also distinguished by high guiding accuracy and load capacity. Forced guiding of the rolling body cages prevents the roller bearings from creeping.

Valid patents

US patent no. 6,765,335B2
European patent no. 1267425B1

Fields of application

Micromanipulation, automation, biotechnology, sample manipulation, sample positioning, optical metrology, vacuum applications to 10^-6 hPa (optional)

• Torque motor, up to 360°/sec
• Repeatability to 0.00005°
• Flatness and Eccentricity ±0.1µm
• Wobble ±1.25µrad
• Load Capacity to 20kg
• Optical Reference Switch
• 35mm Clear Aperture

Key features

• High-precision bearings
• Torque motor
• Uni-directional repeatability down to 0.00008 °
• Flatness and eccentricity ± 3 μm
• Wobble ± 25 μrad
• Maximum speed 360 °/sec
• Load capacity up to 20 kg (center mounted, on top of the platform)
• Integrated optical reference switch
• Free center hole 35 mm diameter
• Integrated angular scale