The Proforma 300SA is a benchtop/desktop, semi-automated wafer measurement system for semi-conducting and semi-insulating materials. Based on MTII’s exclusive Push-Pull capacitance technology, the Proforma 300SA delivers full wafer surface scanning for thickness, thickness variation, bow, warp, sori, site and global flatness. User-defined and ASTM/SEMI compliant scan patterns are used to generate full 3-dimensional (3D) wafer images.

Customized data reports are available for viewing tabular data of each wafer measured with quick, easy export to your spreadsheet program.

• Wafer Specifications Diameter: 150 mm, 200 mm, 300 mm
• Material: All semiconducting and semi-insulating wafers including Si, GaAs, Ge, SiC, InP
• Surfaces: As-Cut, Lapped, Etched, Polished, Patterned
• Flat/Notch: All SEMI Standard Flat(s) or Notch
• Conductivity: P or N Type

The Proforma 300i wafer thickness gage is a capacitance based, differential measurement system that performs non-contact thickness measurements of semiconducting and semi-insulating wafers. By utilizing MTI Push/Pull technology, the Proforma 300i does not require the wafers to have a consistent electrical ground resulting in exceptional accuracy and repeatability for most wafer types. The Proforma 300i system includes full remote control operating software and Ethernet network interface capability.

*Gallium-Arsenide requires probe reconfiguration for semi-insulating materials over 10K-Ohm cm bulk resistance

Features

• Front USB port enables easy data storage to flash drives
• MTI Instruments’ Proprietary Capacitance Circuitry for Outstanding Accuracy and Dependability
• Non-contact Measurements
• 76-300 mm Diameter Wafer Range
• Optional wafer measurement rings
• Wafer stops for exact centering
• Ethernet interface
• Full remote control software (Windows compatible)
• Optional calibration wafers

The Proforma 300i wafer thickness gage is a capacitance based, differential measurement system that performs non-contact thickness measurements of semiconducting and semi-insulating wafers. By utilizing MTI Push/Pull technology, the Proforma 300i does not require the wafers to have a consistent electrical ground resulting in exceptional accuracy and repeatability for most wafer types. The Proforma 300i system includes full remote control operating software and Ethernet network interface capability.

*Gallium-Arsenide requires probe reconfiguration for semi-insulating materials over 10K-Ohm cm bulk resistance

Features

• Front USB port enables easy data storage to flash drives
• MTI Instruments’ Proprietary Capacitance Circuitry for Outstanding Accuracy and Dependability
• Non-contact Measurements
• 76-300 mm Diameter Wafer Range
• Optional wafer measurement rings
• Wafer stops for exact centering
• Ethernet interface
• Full remote control software (Windows compatible)
• Optional calibration wafers