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Supplier: Bronkhorst USA
Description: General CORI-FLOW™ series mass flow meter / mass flow controller are designed to provide high accuracy.CORI-FLOW™ utilizes a patented, advanced Coriolis type direct mass flow sensor to achieve unsurpassed performance, even with changing
- Mass Flow Rate: 0.1837 to 2.21 lbs/min
- Electrical Output: Analog Current, Analog Voltage
- End Fittings: Compression
- Features: Controller Functions, Recorder / Totalizer Functions
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Supplier: Bronkhorst USA
Description: General mini CORI-FLOW™ series by Bronkhorst are precise and compact Mass Flow Meters and Controllers, based on the Coriolis measuring principle. Designed to cover the needs of the low flow market, there are 4 models to overlap flow ranges from 5 g/h up to
- Mass Flow Rate: 7.35E-4 to 1.1 lbs/min
- Electrical Output: Analog Current, Analog Voltage
- End Fittings: Compression
- Features: Controller Functions, Measures Density, Measures Temperature
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Supplier: Malema Sensors
Description: . Series 8800 sensors are specially designed for measuring liquids in high-purity semiconductor, bio-pharmaceutical and other applications that require all PFA-wetted* surfaces and provide a Mass Flow Rate, Total Mass and Temperature. *Models 8808-1 and 8808-2 are also
- Mass Flow Rate: 0.0011 to 11.03 lbs/min
- Electrical Output: Analog Current
- End Fittings: Tube End / Hose Nipple
- Features: Measures Temperature, Recorder / Totalizer Functions
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Supplier: Bronkhorst USA
Description: Coriolis Mass Flow Controllers The pc-board of a mini CORI-FLOW™ Mass Flow device features integrated, adaptable PID control for fast and smooth control of any electronically driven control valve. Depending on the application this could be an integrated
- Mass Flow Rate: 3.67E-6 to 0.0073 lbs/min
- Electrical Output: Analog Current, Analog Voltage
- End Fittings: Compression
- Features: Controller Functions, Measures Density, Measures Temperature, Recorder / Totalizer Functions
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Supplier: Bronkhorst USA
Description: Coriolis Mass Flow Controllers The pc-board of a mini CORI-FLOW™ Mass Flow device features integrated, adaptable PID control for fast and smooth control of any electronically driven control valve. Depending on the application this could be an integrated
- Mass Flow Rate: 3.67E-5 to 0.0735 lbs/min
- Electrical Output: Analog Current, Analog Voltage
- End Fittings: Compression
- Features: Controller Functions, Measures Density, Measures Temperature, Recorder / Totalizer Functions
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Supplier: Brooks Instrument
Description: For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast response sensor and patented 4th generation MultiFlo™ technology
- Mass Flow Rate: 8.26E-6 to 0.8259 lbs/min
- Electrical Output: Analog Current, Analog Voltage
- Features: Controller Functions
- Interface Options: Serial / Digital, Network / Fieldbus
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Supplier: Sierra Instruments, Inc.
Description: RedySmart thermal mass flow meters and mass flow controllers with ultra-stable no-drift CMOS (Complementary Metal Oxide Semiconductor) sensor are ideal for BioPharm OEMs with its modular design, cabling system, compact footprint, easy integration into a
- Gas Volumetric Flow Rate: 0.0 to 17.66 SCFM
- Electrical Output: Analog Voltage
- End Fittings: Compression, VCO® / VCR®, Other
- Features: Recorder / Totalizer Functions
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Supplier: Servoflo Corporation
Description: depending on the requests. The meters can work at an environment of -20 to 60°C and pressure up to 1.5 MPa. Applications include semiconductor gas process monitoring and control, hospital oxygen gas monitoring, etc. GET THE MASS FLOW PRODUCT & PRICING GUIDE Features Highly
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Supplier: Brooks Instrument
Description: Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to bring PTI mass flow control technology to market, GF125
- Mass Flow Rate: 8.26E-6 to 0.8259 lbs/min
- Electrical Output: Analog Voltage
- Features: Controller Functions
- Interface Options: Serial / Digital, Network / Fieldbus
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Supplier: Sierra Instruments, Inc.
Description: The RedyCompact mass flow meters and regulators offers users a valuable digital upgrade to mechanical rotameters. A true thermal mass flow meter, RedyCompact is for those that want the highest accuracy and repeatability and need a drop-in replacement for a Rotameter.
- Gas Volumetric Flow Rate: 0.0 to 17.66 SCFM
- Features: Audible or Visual Alarms
- Media Temperature: 32 to 122 F
- Mounting Type: In-line
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Mass Flow Meters and Controllers - Mass Flow Controller - Digital Multi Range/Multi Gas -- SEC-Z500XSupplier: HORIBA Instruments, Inc.
Description: controllers required; saving both time and costs. The Mass Flow Controller SEC-Z500X is suitable for various applications as well as semiconductor manufacturing. Read our Case Study and find out how the SEC-Z500X improved results for The National Oceanic &
- Mass Flow Rate: 1.38E-6 to 1.38 lbs/min
- Electrical Output: Analog Voltage
- End Fittings: VCO® / VCR®
- Features: Controller Functions
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Supplier: Brooks Instrument
Description: Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control
- Mass Flow Rate: 8.26E-6 to 0.8259 lbs/min
- Electrical Output: Analog Voltage
- Features: Controller Functions
- Interface Options: Serial / Digital, Network / Fieldbus
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Supplier: Kurz Instruments, Inc.
Description: field fabrication and assembly of inlet and outlet mating pipe sizes. The Series 534FTB has 8 basic Models covering mass flow ranges to 2350 SCFM and in line sizes from ½” to 8”. This unique design uses special flow nozzles and flow diffusers to obtain flow
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Supplier: HORIBA Instruments, Inc.
Description: The SEC-8000F/D/E series can operate in high temperature environments, from 15 ? to 120 ?, for a variety of tasks including semiconductor and compound semiconductor processing. View our MFC comparison chart here. Equipped with digital facility: high accuracy- ±1.0% S.P. High Speed
- Mass Flow Rate: 1.38E-5 to 0.4129 lbs/min
- End Fittings: VCO® / VCR®
- Features: Controller Functions
- Interface Options: Serial / Digital, Network / Fieldbus
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Supplier: HORIBA Instruments, Inc.
Description: This leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve. The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing
- End Fittings: Compression
- Interface Options: Serial / Digital, Network / Fieldbus
- Mounting Type: In-line
- Operating Pressure: 109 psi
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Supplier: Brooks Instrument
Description: 5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & i Series MFCs. Its metal sealed construction and electro-polished wetted
- Accuracy: 1 ±% FS
- Control Signal Output: Analog Voltage, Current Loop
- Media: Gas / Air
- Number of Control Outputs: 1 outputs
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Supplier: Sierra Instruments, Inc.
Description: Our Ultra High Purity 780S-UHP mass flow meter is the industry-choice for bulk gas distribution service in semiconductor fabs, in pharmaceutical production and other ultra-clean processes. Real-time monitoring of gas usage provides reliable information on consumption and usage
- Gas Volumetric Flow Rate: 0.0 to 7000 SCFM
- Electrical Output: Analog Current, Analog Voltage, Switch
- End Fittings: Socket Weld / Union, Threaded, Tube End / Hose Nipple
- Features: Audible or Visual Alarms, Programmable, Recorder / Totalizer Functions
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Supplier: Siargo Ltd.
Description: pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally (1.5+0.2FS%) or better depending on the requests. The meters can work at an environment of -20 to 60°C and pressure up to 2.5 MPa. Applications
- End Fittings: Threaded
- Interface Options: Serial / Digital
- Mounting Type: In-line
- Operating Pressure: 435 psi
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Supplier: HORIBA Instruments, Inc.
Description: highly responsive mass flow controller (MFC) is essential for performing control of reactive gas while monitoring changes in plasma emission. HORIBA STEC, enjoying the largest market share of MFC production for semiconductor manufacturing systems*, offers the best MFC for
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Supplier: Saint-Gobain Coating Solutions
Description: along with mass flow meters for gas regulation ProPlasma controller – features Siemens industrial touch screen control board with 30.5 cm (12”) TFT display ProPlasma PR80-8 power source – operates up to 65 kW (88 hp) up to 800 amps Pro
- Mounting: Machine / Reciprocator
- System Options / Components: Feeder / Metering Unit, Controller / Sensing System, Power Supply
- Thermal Spray Technology: Plasma Spray
- Type: Complete Machine
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Video demonstration on a Burkert Multi Channel Gas Flow Control System
(read more)
Browse Gas Valves Datasheets for Burkert Fluid Control Systems -
. Mass flow controllers are accurate enough to supply inline gas to critical semiconductor processes, which is a testament to their performance, quality, and efficiency. How Are Mass Flow Controllers Used To Enable Accurate Calibration Standards? The accuracy and (read more)
Browse Calibration Instruments Datasheets for Environics, Inc. -
Thermal Mass Flow HVAC meters are used in a wide variety of applications. Virtually every commercial structure — factories, office buildings, hotels, etc. — has an air distribution system for heating, ventilation and air-conditioning (HVAC). A well (read more)
Browse Mass Flow Meters and Controllers Datasheets for Eldridge Products, Inc. -
The CentriFlow® Low Flow Meter is a specially designed solid-particle mass flow meter that can accurately measure bulk solids from pellets and granular materials to powders at extremely low flow rates. What is the CentriFlow Low Flow Meter? The (read more)
Browse Solids Flow Meters Datasheets for Eastern Instruments -
8735 achieves nominal flow ranges from 0.01 Nl/min to 20 Nl/min with a low physical footprint. Burkert's Type 8735 is available as an MFC with a proportional control solenoid valve, PI controller and mass flow sensor or as an MFM with the mass flow sensor alone. The device's standardized (read more)
Browse Gas Valves Datasheets for Burkert Fluid Control Systems -
Semiconductor manufacturing is a complex and specialized process with numerous applications for precision gas and pressure control. Learn more about how Clippard's engineering team combined our DR-2 regulator and analytical valve with a special manifold to create a precision flow (read more)
Browse Gas Valves Datasheets for Clippard -
Our gas mixing technology is based on very precise control of thermal mass flow controllers (MFCs). Normally, thermal MFCs offer an accuracy /- 1% o full-scale flow. However, when combined with Environics computerization and calibration, this accuracy specification is improved to /- 1% o (read more)
Browse Gas Generation Equipment Datasheets for Environics, Inc. -
The light and dynamic mass flow controller VEMD works extremely quietly, thanks to piezo technology. The integrated electronics and sensor record, control, and meter the flow rate of air and inert gases proportionally. Compact module with integrated control electronics Dynamic (read more)
Browse Control Valves Datasheets for Festo Corporation -
What is batch dosing? Batch dosing and/or filling involve the controlled interruption of the flow of fluid. Along with sensors and valves, the batch controller plays a particularly important part: as the central control unit in the dosing process, the batch controller monitors (read more)
Browse Control Valves Datasheets for Burkert Fluid Control Systems -
Be it research laboratory or pilot plant: Bürkert mass flow controllers (MFCs) make the fermentation process reproducible. Since setting of the flow rate can be automated with repeat accuracy. Using just one device, you can control standard fermenter gases such as air, oxygen, nitrogen and carbon dioxide according to the needs of your cultures. (read more)
Browse Flow Controllers Datasheets for Burkert Fluid Control Systems
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What is a Mass Flow Controller?
From their beginnings in the 1970s, mass flow controllers have come a long way in terms of their efficiency and capabilities. In the 1980s, the semiconductor industry was the biggest consumer of controllers. Then in the 1990s, manufacturers began making them more rugged and durable to suit more
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Capillary Tube Thermal Mass Flow Meters & Controllers - A User's Guide
This paper describes capillary tube mass flow meters and controllers for use in general purpose industrial and laboratory applications and in the fabrication of semiconductor devices. It provides a detailed description of the major components---flow body, flow conditioner, bypass, capillary sensor
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Understanding Capillary Tube Thermal Mass Flow Meters & Controllers:
, capillary tube flow meters and controllers. Capillary tube thermal mass flow meters and controllers have two broad fields of application: general purpose industrial and laboratory applications and semiconductor manufacturing and other high purity vacuum processes. More MFCs are manufactured than MFMs
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Video: Select The Right Mass Flow Controller For Your Application
Video: https://youtu.be/3naKb4-o6sk. Which mass flow controller will work best for my application?. Many times, we have had university professors and students contact us in tech support about which scientific flow meter they should get for their research. Sierra has two primary options for you
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Celerity Introduces Next Generation GF100 Series Mass Flow Controllers For Semiconductor Device And Solar Cell Manufacturing
Celerity Introduces Next Generation GF100 Series Mass Flow Controllers For Semiconductor Device And Solar Cell Manufacturing .
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Profile monitoring of reflow process using approximations of mixture second‐order polynomials
The other example applied the linear profile method to evaluate the process performance for calibration of a mass flow controller in semiconductor manufacturing.
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Surface NO and NO2 mixing ratios measured between 30° N and 30° S in the Atlantic region
The calibration mixture was prepared by using two thermostatted mass flow controllers (Advanced Semiconductor Materials), which had been calibrated by soap bubble flow meters.
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NIST Manuscript Publication Search
flow measurement, mass flow controller , semiconductor industry .
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1.26.09 -- Feature Article: Semiconducting Nanotubes Produced In Quantity At Duke
Celerity Introduces Next Generation GF100 Series Mass Flow Controllers For Semiconductor Device And Solar Cell Manufacturing .
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Thermal Mass Flow Controller (MFC) Selection For Specific Applications
• Brooks Introduces Pressure Transient Insensitive Mass Flow Controller for Semiconductor Manufacturing .
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Addressing Issues in Fiber Optics Using Direct Liquid Injection (DLI) Vaporization
• Brooks Introduces Pressure Transient Insensitive Mass Flow Controller for Semiconductor Manufacturing .
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Multi-Gas and Multi-Range Programmability in Mass Flow Technology
• Brooks Introduces Pressure Transient Insensitive Mass Flow Controller for Semiconductor Manufacturing .
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Innovations In Variable Area Flow Meters (Rotameters) – An Interview With Jim Dillon
• Brooks Introduces Pressure Transient Insensitive Mass Flow Controller for Semiconductor Manufacturing .
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Supporting NASA Research With Mass Flow Controllers
• Brooks Introduces Pressure Transient Insensitive Mass Flow Controller for Semiconductor Manufacturing .