Go to GlobalSpec.com Home
Alert   Product Alerts
Keep current on the latest products, new suppliers, and technical articles of interest to you. (See Topics)

Rapid Deployment OEM Sensor for High Precision Measurement Applications

From MTI Instruments Inc.
 

 
Capacitance based measurement probes have long been employed for high precision non-contact measurement. The ability to customize the probe/amplifier configuration makes them a popular choice for measurement applications demanding maximum accuracy and repeatability. One specific area where capacitance systems excel is high resolution focusing of complex lens systems such as those found in atomic force microscopes, vision inspection machines and photolithography tools. In a multi-million dollar photolithography tool, high accuracy, nanometer resolution and maximum thermal stability are absolutely critical to maintain proper focus and obtain integrated circuit line widths as small as 45 nanometers. Additionally, most systems demand low power consumption and maximum heat dissipation to eliminate any adverse affects from temperature gradients. A leading supplier of photolithography equipment contracted MTII to develop a custom OEM measurement sensor for active feedback control in the lens systems for their latest generation tools. Working closely with our customer's engineers, MTII's Application and Design team developed a multi-channel, capacitance based solution featuring a measurement accuracy of 3 nanometers and astonishing resolution of less than 1 nanometer.
Product Announcements
MTI Instruments Inc. - Capacitance Displacement Sensor
The Accumeasure 9000 is a compact single or dual channel capacitance based position, displacement and vibration sensor with nanometer accuracy. The 9000D provides the same features as the 9000, but... (read more)
MTI Instruments Inc. - Solar Wafer Thickness Tool from MTI
Solar Wafer Thickness Tool from MTI. The PV-1000 is a High speed, multi-channel thickness, TTV and bow measurement module for in-process monitoring of solar/photovoltaic wafers and other materials. (read more)
MTI Instruments Inc. - Microcap - A Capacitance Measurement System
The Accumeasure MicroCap is a compact, custom designed, OEM capacitance system for high precision non-contact measurement of displacement, position, and vibration. It provides exceptional value,... (read more)
MTI Instruments Inc. - Capacitance Displacement and Position Sensors
High-precision, noncontact capacitance displacement and vibration measurement system with nanometer accuracy... (read more)
Kaman Precision Products Measuring - Semiconductor Wafer Positioning Measuring System2
The Kaman SMU-9000-15N measuring system is a noncontact, high resolution system. It offers repeatability and is versatile. (read more)
PI (Physik Instrumente) L.P. - PI: Precision Capacitance Gauge for Nanometrology
A new single-probe sensor and signal conditioner from PI provides sub-nanometer resolution and linearity with very high bandwidth for dynamic measurements. Capacitive displacement gauges can perform... (read more)
Micro-Epsilon - eddyNCDT 3700: High Resolution Displacement Sensor
Non-Contact Displacement Sensors, series NCDT 3700 are based on the eddy current principle and are used for measurements against electrically conductive materials. They measure with extreme resolution... (read more)
Micro-Epsilon - Confocal Displacement Sensor, optoNCDT 2401
REVOLUTIONARY TECHNOLOGY !! The new optoNCDT 2401 can measure specular targets like mirror and glass with the highest precision. Profiling curved specular or transparent targets is possible. It can... (read more)
Scienscope International Corporation - XT-1000 VMS Economy Video Measurement System
Economical / Cost Effective; Compact System: Versatile; OEM Ready. Available in 4"x8" XY or 4"x8"x6" XYZ. Place it on the workstation table, cabinet stand, or table top as standalone with your choice... (read more)
Renishaw - Interferometer Encoder for Picometer Positioning
Innovative RLE10 and RLE20 fiber-optic laser encoders convert the laser interferometer from a complex scientific instrument into a simple production solution to ultra-precise process control, enabling... (read more)
Topics of Interest
Precision shafts and spindles are generally finished utilizing a centerless grinding process. This machining technique is cost effective and typically produces a quality cylindrical surface in which... (Read More)
A Displacement Measuring Interferometer (DMI) measures linear and angular displacements with very high accuracy and precision. DMI's are used in a variety of applications which can be broken into two... (Read More)
A cylindrical grinding process finishes most wheel spindle surfaces. It is essential that this grinding process leave a surface finish that is smooth and free of defects with minimal runout. Any... (Read More)
The ongoing evolution of scanning probe microscopy has yielded analytical instruments featuring numerous capabilities for a wide range of applications. The ability of these instruments to perform... (Read More)
Measurement systems of one kind or another are as old as recorded history. In this book we deal with basic electrical/electronic units of measurement. We measure and explain the fundamental units... (Read More)