The WM-5000 unpatterned-wafer inspection system for 0.07-µm design rules uses a 400-nm-wavelength laser light source (a violet laser diode). Distributed by Macrotron Process Technologies in Europe, the tool achieves very high detection sensitivity down to 0.041 µm. The system can inspect 100 300-mm wafers/hr at 0.079-µm sensitivity. The instrument's multibeam and polarize optical system offers excellent detection for such new materials as high- and low-k dielectrics, silicon on insulator, and silicon germanium. A strictly mechanical edge-grip handling system supports the wafer to improve coordinate accuracy (<20 µm), minimize the edge exclusion zone, and enable backside inspection. (Semicon West, S.F., South Hall, Booth 130A) Ricor Cryogenic and Vacuum Systems The MicroStar, a cooled-water-vapor high-vacuum pump, uses Stirling cycle technology instead of the usual Gifford McMahon (GM) cycle, allowing a much smaller compressor to be connected to the cold panel. Compared with the 3000-W power consumption needed to drive a typical GM-cycle pump, the MicroStar consumes <200 W. Because the unit does not use costly helium hoses or large compressors, space savings and reduced installation times are possible. A patented regeneration cycle eliminates heaters during regeneration, offering further cost savings and simplification. The pump and compressor package have an operating time between maintenance cycles of 40,000 hours. An ultraprecision pancake-style load cell with a pull plate and calibration adaptor, the Model 48 ensures high repeatability when used in a test frame. The load cell is calibrated and traceable to NIST, making it suitable for most high-accuracy applications, including in metrology processes and as a reference standard for calibrating other load cells. The tension/compression load cell offers low creep and delivers accuracy to 0.02% in loads ranging from 250 to 100,000 lb. The standard output is 4 mV/V for ranges >5000 lb, with an excitation of 10 V dc. The unit has amplifier options
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Bladder pumps consist of a flexible, squeezable bladder encased in a rigid outer casing. They are low-flow pneumatic devices used for sampling applications.
HEPA Filters and ULPA Filters
High-efficiency particulate air (HEPA) filters and ultra-low particulate air (ULPA) filters are designed to screen particles larger than 0.3 µm
Heat lamps are also known as infrared emitters, infrared bulbs, infrared tubes, or infrared lamps. Heat lamps differ from illuminating lamps in their low filament temperature, resulting in much less light and more infrared radiation.
Heating, ventilation and air conditioning (HVAC) chillers are refrigeration systems that provide cooling for industrial and commercial applications. They use water, oils or other fluids as refrigerants.
Topics of Interest
The NanoLattice standard is a CD-SEM calibration standard for next-generation semiconductor manufacturing. With a 0.1-µm pitch, the standard enables accurate sub-0.13-µm lithography as well...
Designed for inspecting wafers in CMP and other advanced interconnect processes, the ILM-2230 combines small-pixel, high-data-rate image processing with oblique-angle darkfield laser illumination for...
and Anantha Sethuraman, Younsoo Ra, and Hawk Kim, A real-time classification system incorporates multiple modes of defect classification into a single estimate of the overall defect performance of the...
Designed for making semiconductors with geometries 0.18 µm, the AIT II patterned process tool monitor minimizes the number of wafers exposed to out-of-control process conditions. The system...
There is no fundamental physical reason why defect inspection sensitivity, speed, and classification cannot keep pace with the steadily increasing complexity of manufacturing integrated circuits at...