The NovaLine A4005 is a 193-nm ultranarrow-bandwidth laser for optical lithography systems. The unit's line-narrowing optics and high repetition rate of 4 kHz yield an output power of 20 W at a...
009;A medium-current ion implanter for 0.18-µm processes can deliver throughput up to 210 wafers/hr. The fully automated, serial processing 8250 features 4- to 3500-µA beam currents...
A noncontact, single-wafer, double-sided cleaner satisfies the demands of next-generation technology nodes. The 8200 spin processor has a throughput of 200 wafers per hour, providing an alternative to...
009;A small-footprint single-wafer spin processor developed for 0.13-µm etching can handle 8-in. wafers and eventually will be offered in a 300-mm version. The design of the MP-2000 processor's...
Terri Couteau, Gary Dawson, and John Halladay, Spansion; and Leo Archer, As the semiconductor industry continues to progress, it is developing high-performance devices at the lowest cost of ownership...
