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From Aerotech, Inc.
Laser interferometers represent the ultimate feedback device for high-precision motion control application. The combination of high resolution and outstanding accuracy has made it the ideal transducer for wafer steppers, flat panel inspection, and high-accuracy laser micromachining. A laser interferometer system employs a highly stabilized light source and precision optics to accurately measure distances. Interferometers are superior to glass encoders for several reasons. The most obvious advantage is that interferometers have greater inherent accuracy and better resolution. An additional advantage is that interferometers measure distances directly at the workpiece. Due to mounting considerations linear encoders are often "buried" inside the positioning stage, some distance away from the workpiece introducing an additional source of error. A well-designed interferometer system is able to take measurements directly at wafer height, maximizing accuracy. Products & Services
Interferometers measure distance in terms of wavelength and determine the wavelengths of light sources.
Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.
Polarimeters determine the amount of polarization of light.
Infrared (IR) spectrometers measure the wavelength and intensity of the absorption of infrared light by a sample.
Wafer and thin film instrumentation includes quartz crystal microbalance (QCM) monitors, ellipsometers, RHEED systems, imaging stations, CD-SEMs, ion mills, and C-V systems specifically designed for wafer metrology or in-situ monitoring of thin film parameters during thin film or semiconductors wafer processing.
Product Announcements
Topics of Interest
Using a semiconductor laser as a light source, laser interferometers employ a noncontact method to measure slight displacements and vibrations on the object's mirror reflection. Canon developed a...
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This paper describes a new light source, called the “Ring of FireTM” (RoF), with a specific spatial coherence function, which greatly reduces the intrinsic instrument noise. The evaluation of a series...
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The technique for measuring changes in diffuse surfaces using Electronic Speckle Pattern Interferometry (ESPI) is well known. We present a new electronic speckle pattern interferometer that takes...
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The wavelength of light provides a very high resolution, linear, and stable reference for dimensional measurement. Labmaster® instruments effectively couple the wavelength of light to the part to be...
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In its most common application interferometry is a versatile measurement technology for examining surface topography with very high precision. At the heart of interferometry is the interferogram,...
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Technical Articles
Laser Interferometer Implementation
- Linear and Rotary Motion Components
Application Note: Position Feedback Device Comparison (March 2003)
- Sensors, Transducers and Detectors
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