From Verantis

The production of trichlorosilane (TCS) is a critical step in the production of polysilica for the solar cell industry. TCS production creates a variety of waste gas streams, including TCS, dichlorosiliane (DCS), Silicon tetrachloride (STC), and HCl. These waste gases must be removed at high efficiency prior to venting process gases to the environment. Specialized pollution control solutions must be designed to accommodate the high levels of hydrogen, heat release, and product handling Issues that are associated with silicic acid by-products of the waste gases.

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Dust Collectors
Dust collectors are used in many processes to either recover valuable granular solid or powder from process streams or to remove granular solid pollutants from exhaust gases prior to venting to the atmosphere.
Electrostatic Precipitators
Electrostatic precipitators use electrostatic forces to separate dust particles from exhaust gases.
Air Scrubbers, Wet Scrubbers, and Gas Scrubbers
Air scrubbers, wet scrubbers, and gas scrubbers are air pollution control devices that use a high-energy liquid spray to remove aerosol and gaseous pollutants from an air stream. The gases are removed either by absorption or chemical reaction.
Mist Collectors and Fume Collectors
Mist collectors and fume collectors reduce the amount of mist, aerosols and fumes in the workplace atmosphere.

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