Our Sites: GlobalSpec.com | GlobalSpec Electronics | CR4
Free Registration 

LIGA


Print
Share via Email
 

LIGA, a German acronym for x-ray lithography (lithographie), electroplating (galvanoformung), and molding (abformung), is used to fabricate high aspect-ratio structures in micro-electromechanical systems (MEMS). LIGA combines photolithography, electroplating and molding process to obtain depth. Patterns are created in a substrate and then electroplated to create three-dimensional (3D) molds. These molds can be used as final products, or various materials can be cast or injected into them. LIGA is a type of high aspect ratio micromachining (HARM) that can be used with materials other than silicon (e.g., metal, plastic). There are three main types of LIGA processes: x-ray LIGA, UV LIGA, and silicon LIGA. The original LIGA technology, x-ray LIGA uses x-rays from a synchrotron. UV LIGA uses ultraviolet (UV) light, typically from a mercury lamp. Silicon LIGA uses deep reactive, ion-etched silicon.

Products & Services
MEMS foundry services suppliers design and manufacture microelectromechanical devices on a contract basis, in prototype to production quantities. Search by Specification | Learn more about MEMS Foundry
X-ray instruments and X-ray systems use penetrating X-rays or gamma radiation to capture images of the internal structure of a part or finished product. Search by Specification | Learn more about X-ray Instruments and X-ray Systems | X-ray Instruments and X-ray Systems Insights
UV cameras have image sensors that detect light in the ultraviolet (UV) range. They are used to spot defects in industrial applications and as imagers in scientific applications. Search by Specification | Learn more about UV Cameras
MEMS processing equipment is used to create micro-electro-mechanical systems (MEMS) sensors and wafers. Search by Specification | Learn more about MEMS Processing Equipment
Plating chemical and anodizing chemicals include metal salts, formula additives, and other consumables for the electrodeposition, electroless plating, electroplating and anodized layer formation. Search by Specification | Learn more about Plating Chemicals and Anodizing Chemicals
Product Announcements
Hamamatsu Corporation USA - CCD Image Sensors
Hamamatsu designs and manufactures various types of image sensors that cover a wide range of intensity levels and spectral response ranges. Devices operate from near infrared (NIR) at 2.6 µm, through... (read more)
Hamamatsu Corporation USA - Solid State Division
Hamamatsu designs and manufactures a wide range of solid state detectors, imaging chips and light sources. The range of materials from which our products are made include Silicon (Si), Indium Gallium... (read more)
Plastic Ingenuity, Inc. - Molded Fiber For Over The Counter Medications
Recently Plastic Ingenuity partnered with Team Technologies Molding, Little Fury, and ChappsMalina to create a Molded Fiber package for Help Remedies personal first aid packages. The packages hold... (read more)
Raytheon ELCAN Optical Technologies - Reduced cost and increased performance...
IDC Dreamt... ELCAN Created IT! Raytheon ELCAN redesigned the entire assembly and subsequently reduced the manufacturing costs while simultaneously advancing the performance of the unit... (read more)
Raytheon ELCAN Optical Technologies - Reduced Cost and Increase Performance - ELCAN!
IDC Dreamt... ELCAN Created IT! ELCAN redesigned the entire assembly and subsequently reduced the manufacturing costs while simultaneously advancing the performance of the unit... (read more)
Hamamatsu Corporation USA - S10141-1008S CCD Image Sensor
The S10141-1008S CCD Image Sensor is a back-thinned type FFT-CCD with pixel size of 12 um. It also features a low readout noise and high resolution back-thinned CCD image sensor with built-in... (read more)
Topics of Interest
Wolfgang Menz, Institute for Microsystems Technology (IMTEK), Albert-Ludwigs-University Freiburg Germany J rgen Mohr, Institute for Microstructure Technology (IMT), Research Center...
3.1 Basic Microtechniques This section aims to provide the readers an overview of basic microtechniques, which are not only used for microfluidics but also for microelectronics and MEMS. Refer to...
7.1 Introduction In the previous chapters, we have discussed various routes for the synthesis and fabrication of a variety of nanomaterials; however, the synthesis routes applied have been focused...
Passive Micromachined Mechanical Structures Fluid Nozzles Nozzles are among the simplest microstructures to fabricate using anisotropic etching of silicon, electroforming, or laser drilling of a...
Invisible Parts By Elizabeth Modic, Senior Editor It sure is tough to promote your business when 95% of your customers won't let you talk about the work you do for them - mainly out of fear that...
Product Announcements
MEMS Foundry - Custom Device Design
MEMS Foundry - Custom Device Design
Rogue Valley Microdevices, Inc.


PVD Sputter Metals Films for Semiconductor
PVD Sputter Metals Films for Semiconductor
Rogue Valley Microdevices, Inc.


Nitrogen, Nitrogen/Oxygen & Forming Gas Annealing
Nitrogen, Nitrogen/Oxygen & Forming Gas Annealing
Rogue Valley Microdevices, Inc.