Interferometric Microscopes

Interferometric microscopes use the interference patterns of light waves for precise determinations of distance, thickness, surface or step heights, wavelength, roughness and non-contact 3D surface profiles. As in conventional interferometers, measurements are made by analyzing the phase shift or interference between the two beams of white light. One beam is reflected off a reference surface and the other beam is reflected off the sample or part. Interferometric microscopy provides higher vertical or height resolution compared to conventional optical imaging methods. Interferometric microscopes are useful in wafer or semiconductor manufacturing, MEMS production, optical component fabrication, precision machined surfaces (ground, lapped, honed and superfinished parts), plating and thin film coatings and layers, wear surfaces, surface research, biomaterials and implants, and high performance mechanical components such as bearings, cams and fuel injectors.