TABLE OF CONTENTS 
Library of Congress Cataloging-in-Publication Data
A catalog record for this book is available from the U.S. Library of Congress.
British Library Cataloguing in Publication Data
Maluf, Nadim.An Introduction to microelectromechanical systems engineering-2nd ed. -(Artech Housemicroelectromechanical library)
621.3'81
Cover design by Igor Valdman
Copyright
2004 ARTECH HOUSE, INC.
685 Canton Street
Norwood, MA 02062
All rights reserved. Printed and bound in the United States of America. No part of this book may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying, recording, or by any information storage and retrieval system, without permission in writing from the publisher.
All terms mentioned in this book that are known to be trademarks or service marks have been appropriately capitalized. Artech House cannot attest to the accuracy of this information. Use of a term in this book should not be regarded as affecting the validity of any trademark or service mark.
International Standard Book Number: 1-58053-590-9
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To our families Tanya, Ella, and Jad Erika, Gordon, Brynn, and Reed
About the Authors
Nadim Maluf received a B.E. from the American University of Beirut, Lebanon, an M.S. from the California Institute of Technology, and a Ph.D. from Stanford University, all in electrical engineering.
He is currently vice president of marketing at New Focus, a division of Bookham...
