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Electrical Characterization with Scanning Probe Microscopes (AN79)

From Veeco Instruments
 

 

The ongoing evolution of scanning probe microscopy has yielded analytical instruments featuring numerous capabilities for a wide range of applications. The ability of these instruments to perform ultra high resolution topographic profiling has been augmented to provide detailed information about hardness, work function, and electric and magnetic field strength. More recently, scanning probe microscopes have been developed that can even accurately measure electrical currents, resistance, and capacitance. These advanced capabilities - Conductive AFM (CAFM), Tunneling AFM (TUNA), Scanning Spreading Resistance Microscopy (SSRM), and Scanning Capacitance Microscopy (SCM) - measure a wide range of electrical properties with nanometer-scale resolution on various materials.

Tunneling AFM (TUNA) and conductive AFM (CAFM) are powerful current sensing techniques for the electrical characterization of conductivity variations in highly-to-medium resistive samples. The SSRM module images the variation of sample resistivity (or conductivity) over a large dynamic range. With the SCM module, the variation in carrier concentration inside semiconductor structures can be imaged through measurement of the dC/dV signal of the MOS capacitor formed by the probe and the semiconductor sample.


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