Liquid Chemical Delivery Module (CDM) for Semiconductor Fabrication and Ultra-High Purity Manufacturing

In the world of semiconductor fabrication, precision is everything. A Chemical Delivery Module (CDM) serves as the critical “point-of-use” brain within a facility’s fluid infrastructure, ensuring that process chemicals are delivered with absolute consistency and ultra-high purity (UHP).

Unlike bulk systems that simply transport fluids, a CDM is designed for high-accuracy blending and dilution. It takes concentrated chemicals and mixes them with deionized water to create exact “recipes” required for sensitive processes like etching and cleaning. To maintain parts-per-trillion (ppt) purity, these modules are constructed using 316L electropolished stainless steel and high-grade fluoropolymers, preventing any particle shedding that could ruin a silicon wafer.

Beyond purity, the CDM is a powerhouse of safety and automation. Integrated PLC controls allow for “set-and-forget” reliability, while secondary containment and leak detection sensors protect the cleanroom environment from hazardous materials. By bridging the gap between bulk storage and production tools, the Chemical Delivery Module ensures that the “circulatory system” of a microchip factory remains contamination-free, efficient, and safe.

Technical Data

Optional
*UV/IR Flame Detector
*Cylinder heating
*Panel heating
*Ethernet communication module
*Weight Scale
*Excess Flow Switch
*Smoke Sensor Switch