Cu-Gr Cold Plates for RTP

Featured Product from ToneCooling Technology Co., Ltd

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Semiconductor engineers face extreme thermal challenges, including rapid 1000°C cycling and precise ±0.5°C control for 3D IC bonding and microLED manufacturing. Traditional copper plates often fail under these high-speed thermal stresses, causing yield losses and energy inefficiencies.

Our Cu-Gr cold plates combine 800 W/m·K thermal conductivity, low CTE (4×10-6/°C), and biomimetic fractal coolant channels, enabling sub-second annealing cycles, 35% energy savings, and minimal void formation. This ensures high-yield, reliable, and repeatable thermal management, helping engineers achieve optimal performance in RTP systems.

Discover how to enhance your Å-node RTP processes with our customizable Cu-Gr solutions. Contact us for detailed specifications or tailored engineering support to integrate cutting-edge thermal control into your production line.