The MV-2000 Series achieves stable vaporization, even at low temperatures ffor critical process chemistries. An innovative nozzle design, combined with HORIBA's tornado flow heating concept assures efficient vaporization and delivery. This is suitable for vaporization of a range of liquids, including challenging high K sources. Read more...More Product Announcements from HORIBA Instruments, Inc.
MSP’s Turbo-Vaporizers™ use a droplet vaporization, direct liquid injection technique. In thin film applications, our Turbo-Vaporizers’ stable and uniform vapor leads to a higher quality thin film and higher wafer yields with less down time. MSP’s Vaporizers provide faster response time, high precision flow control, and are able to operate at high temperatures. Read more...More Product Announcements from TSI Incorporated