Thin Film Equipment Reference Materials
Reference Articles 1 - 3 of 3
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Mass Spectroscopy of Metastable Species during Plasma Processing - GEC 2011
From: Hiden AnalyticalDescription: Among the techniques in common use for mass spectrometric studies of processing plasmas, the so-called 'threshold ionisation' (TI) method for examining the neutral species generated in a plasma has ...
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Low Energy Ne Scattering from Metal Surfaces using MARISS (.pdf)
From: Hiden AnalyticalDescription: An updated dual-isotope method based on MARISS technique with two isotopes of Ne+ as primary-ion beam was developed. The data for characteristic velocity vc for Cu,Ag, Au and Pt were estimated. An ...
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A SIMS Primer
From: Hiden AnalyticalDescription: Secondary Ion Mass Spectrometry is the most sensitive surface analysis technique providing quantifiable data to the ppb level and surface specificity to the uppermost monolayer. It can be used to ...