Round Wafer Chucks

4 Results
Porous ceramic vacuum chuck
from Suntech Applied Materials (Hefei) Co.,Ltd

Material High-purity aluminum oxide (Al ₂O ₃), silicon carbide (SiC), or silicon nitride (Si ₃N ₄). Advanced porous ceramic structure for uniform vacuum distribution. Features The porosity is high: An important feature of porous ceramics is that they have more uniform and... [See More]

  • Chuck Geometry: Round
  • Diameter: 4 to 12
  • Chuck Type: Vacuum clamp, vise or holder
  • Materials: Ceramic
Electrostatic Chuck
from Fountyl Technologies Pte. Ltd.

Electrostatic chuck has the function of normal use in vacuum atmosphere, and plays the role of holding and temperature control of wafer in high vacuum plasma or special gas environment, assisting semiconductor process equipment to realize the change of electrical characteristics and physical form of... [See More]

  • Chuck Geometry: Round
  • Materials: Polymer Dielectric Material; Ceramic (optional feature)
  • Chuck Type: Electrostatic
Ultra-Flat Ceramic Vacuum Wafer Chucks
from CoorsTek

Our ultra-flat ceramic vacuum wafer chucks, stepper chucks, porous chucks, and electrostatic chucks improve yield management for semiconductor wafer processing. Low-surface-contact configurations minimize the risk of back-side particles for sensitive applications. Our wafer chucks provide:... [See More]

  • Chuck Geometry: Round
  • Materials: Ceramic
  • Chuck Type: Vacuum clamp, vise or holder
Vacuum Chuck of Quartz or Ceramics
from Jiangyin Deli Laser Solutions Co., Ltd.

We are experienced of all kinds of vacuum chuck for automation and mechinery industries,especially these with glass, quartz and ceramics material. With glass or quartz transparent material, the light could transmits from bottom, or the designer could put CCD under the table for alignment and... [See More]

  • Chuck Geometry: Round
  • Materials: Quartz; Ceramic
  • Chuck Type: Vacuum clamp, vise or holder