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On-Demand Webinar:

Capacitive Sensors – Discover the Advantages and Use Them for Measurement Tasks

Discover the world of capacitive displacement sensors! In our webinar, we will demonstrate how this sensor technology is used in both industrial applications and the semiconductor industry. Learn how to use them in various measurement tasks in industrial applications and profit from unmatched stability and nanometer resolution.




Date: October 1, 2024
Time: 9 AM EDT (6 AM PDT / 3:00 PM CEST)
Duration: 1 hour
Presented by:

Overview

Compared to other non-contact measurement techniques, capacitive displacement measurement is characterized by extreme precision and measurement stability. Capacitive sensors from Micro-Epsilon can be used for displacement and thickness measurements even in harsh environments when sub micrometer or nanometer accuracy is required.

Micro-Epsilon’s capacitive sensors are designed for non-contact measurement of displacement, distance and position, as well as for thickness measurement. Due to their high signal stability and resolution, capacitive displacement sensors are applied in laboratories and industrial measurement tasks. In production control, for example, capacitive sensors measure film thickness and application of the adhesive. Installed in machines, they monitor displacement and tool positions, e.g. in semiconductor lithography production with vacuum and cleanroom environments.

This webinar describes why capacitive sensors can even be used in environments with strong magnetic fields, dust and temperature fluctuations. In order to achieve maximum accuracy and stability, users must consider some useful facts when installing capacitive displacement sensors. Sensor alignment and arrangement, influences due to different target geometries and ambient conditions are some of the most important ones. The different sensor designs and their fields of application will also be shown.

This Micro-Epsilon webinar explains how to use capacitive displacement sensors for a variety of business tasks. Attendees will learn the operating principles and how to setup for displacement and thickness measurement with just one sensor. Various animations and graphics show detailed application examples and give important tips. Additional resources such as whitepaper and slideshows with further details are provided by Micro-Epsilon.

Key Takeaways

  • Learn the metrology fundamentals and basics of capacitive sensors
  • Understand the effects of the environment and relevant process impacts, e.g. for thickness measurement of batter film
  • Learn how to achieve sub micrometer and nanometer resolution in industrial applications
  • Explore industrials applications: air gap measurement in motors and generators, brake disc thickness, wafer position in vacuum and many more

Speaker

Martin Dumberger, Managing Director, Micro-Epsilon America

Martin Dumberger has more than 25 years of experience in high precision measurement and sensors. His focus has been on non-contact measuring technologies such as eddy current, capacitive and optical sensors. With a background in engineering and 10 years of R&D exposure in this field, Dumberger has been educating and supporting customers in all industries to solve challenging measurement applications.