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  • Supplier: CoorsTek

    Description: CoorsTek provides wafer boats, pedestals, and custom wafer carriers for both vertical / column and horizontal configurations. Advanced ceramics deliver excellent thermal resistance and plasma durability while mitigating particles and contaminants. Semiconductor-grade silicon

    • Material Type: Carbide Materials, Silicon Carbide
    • Shape / Form: Fabricated / Custom Shape, Wafer Carrier / Holder
    • Features: Other

  • Supplier: CoorsTek

    Description: End effectors, also referred to as semiconductor handling "blades", are the robot's hand to handle and move semiconductor wafers between positions. So end effectors must be dimensionally precise and thermally stable, while having a smooth, abrasion-resistant surface to safely handle

    • Features: Alumina / Aluminum Oxide, Carbide Materials, Silica / Silicate Materials, Specialty Ceramic
    • Specialty Ceramic Type: Aluminum Nitride, Quartz, Silicon Carbide, Yttria
    • Applications: Chemical / Materials Processing, Wear Parts / Tooling
    • Shape / Form: Wafer Carrier / Holder

  • Supplier: CoorsTek

    Description: ideal for microscopic patterning from wafers to large flat panel displays (FPD). Ceramic Components for Lithography & Wafer Inspection Perfect for next-generation lithography and wafer-handling applications, our ultra-pure ceramic components ensure minimal contamination and

    • Applications: Chemical / Materials Processing
    • Features: Dielectric / Electrical Insulation, Other
    • Shape / Form: Wafer Carrier / Holder

  • Supplier: CoorsTek

    Description: Lift pins are used in assemblies to lift and move wafers through semiconductor processing positions. Since they are exposed to chamber or other processing conditions, they require robust thermal stability and corrosion resistance. Semiconductor Processing Components CoorsTek is your partner

    • Features: Alumina / Aluminum Oxide, Carbide Materials, Silica / Silicate Materials, Specialty Ceramic
    • Specialty Ceramic Type: Aluminum Nitride, Quartz, Silicon Carbide, Yttria
    • Applications: Chemical / Materials Processing, Wear Parts / Tooling
    • Shape / Form: Wafer Carrier / Holder

  • Description: to the pressure plate. The pressure plate is designed to swivel up from the horizontal working position to just past vertical to facilitate work piece loading and unloading. The LLCD series is also offered in a dual faced configuration, processing both sides at once via an oscillating carrier

    • Maximum Part Diameter / Width: 780 mm
    • Features: Automated Loading, Flat Panel Display, Integral Process Controller, MEMS, Magnetic Storage, Optical Coatings, Other, Semiconductor Manufacturing
    • Type: Batch System (Single Chamber / Multiple Wafers), Continuous / Web System, Inline System (Semi-continuous)
    • Materials Processed: Dielectric / Ceramic, Metal, Oxides, Silicon


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