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Supplier: Bronkhorst USA
Description: Mass Flow Meters/Controllers A CORI-FLOW™ Coriolis Mass Flow Meter / Mass Flow Controller is offered with analog and digital communication, RS-232 with Profibus-DP, Devicenet, Modbus or FLOW-BUS. Applications The instruments are
- Pipe Diameter: 0 to 0.5 inch
- Mass Flow Rate: 0.18375 to 2.205 lbs/min
- Operating Temperature: 32 to 158 F
- Operating Pressure: 0 to 1,450.377 psi
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Supplier: Bronkhorst USA
Description: the flow. Instead of using a control valve, the Coriolis flow meter can be combined with a gear pump, thus eliminating the need of pressurising the liquid source. Alternative to Thermal Gas Mass Flow Controllers Compared to traditional thermal MFCs, Coriolis based
- Pipe Diameter: 0 to 0.5 inch
- Mass Flow Rate: 0.000003675 to 0.00735 lbs/min
- Operating Temperature: 32 to 158 F
- Operating Pressure: 0 to 72.51885 psi
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Mass Flow Meters and Controllers - Mass Flow Controller - Digital Multi Range/Multi Gas -- SEC-Z500XSupplier: HORIBA Instruments, Inc.
Description: Mass flow meter and mass flow controller options with metal seal, Multi Range, Multi Gas user configurable analog / digital. Z500X is the world's leading gas Mass Flow Controller With high accuracy +/- 1.0% S.P, piezo actuator valve, high speed
- Pipe Diameter: 0.25 to 0.5 inch
- Mass Flow Rate: 0.0000013765 to 1.3765 lbs/min
- Operating Temperature: 41 to 122 F
- Operating Pressure: 43.5110518071591 psi
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Supplier: Brooks Instrument
Description: Keep critical flow processes on-target and maximize throughput with the GF135 Advanced Diagnostics Pressure Transient Insensitive (PTI) mass flow controller. The world’s first “smart” mass flow controller is a true game changer: It performs integral
- Number of Inputs: 1 inputs
- Number of Control Outputs: 1 outputs
- Accuracy: 1 ±% FS
- Control Signal: Analog Voltage, Network / Fieldbus Output, Serial / Digital
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Supplier: HORIBA Instruments, Inc.
Description: The SEC-8000F/D/E series can operate in high temperature environments, from 15 ℃ to 120 ℃, for a variety of tasks including semiconductor and compound semiconductor processing. View our MFC comparison chart here. Equipped with digital facility: high accuracy- ±1.0% S.P. High Speed
- Pipe Diameter: 0.25 to 0.75 inch
- Mass Flow Rate: 0.000013765 to 0.41295 lbs/min
- Operating Temperature: 59 to 248 F
- Operating Pressure: 43.5110518071591 psi
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Supplier: Brooks Instrument
Description: For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast response sensor and patented 4th generation MultiFlo™ technology
- Mass Flow Rate: 0.000008259 to 0.8259 lbs/min
- Operating Pressure: 150 psi
- Media Temperature: 122 F
- Media Temperature Range: 122 F
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Supplier: Brooks Instrument
Description: overshoot/undershoot Wide flow range – from 3 sccm up to 30,000 slpm High pressure rating - up to 1,500 psi Optional enhanced process internal finish - 5µ inch Ra avg Removable flow sensor Insensitive to mounting attitude Mechanically and electrically compatible with other mass
- Number of Inputs: 1 inputs
- Number of Control Outputs: 1 outputs
- Accuracy: 1 ±% FS
- Control Signal: Analog Voltage, Current Loop
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Supplier: Sierra Instruments, Inc.
Description: RedySmart thermal mass flow meters and mass flow controllers with ultra-stable no-drift CMOS (Complementary Metal Oxide Semiconductor) sensor are ideal for BioPharm OEMs with its modular design, cabling system, compact footprint, easy integration into a
- Pipe Diameter: 0.125 to 0.5 inch
- Gas Volumetric Flow Rate: 0 to 17.65536723163842 SCFM
- Operating Temperature: 32 to 122 F
- Operating Pressure: 3 to 160 psi
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Supplier: Brooks Instrument
Description: Ultra-fast response times and the highest level of purity – the GF125 Series are second generation multi-variable, pressure transient insensitive (PTI), metal sealed mass flow controllers and meters. First to bring PTI mass flow control technology to market, GF125
- Mass Flow Rate: 0.000008259 to 0.8259 lbs/min
- Operating Pressure: 100 psi
- Media Temperature: 122 F
- Media Temperature Range: 122 F
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Supplier: Bronkhorst USA
Description: EL-FLOW® Metal Sealed Gas Mass Flow Meters / Controllers Metal Seal Gas Mass Flow Meters and Controllers of Bronkhorst High-Tech are characterised by their unique, patented metal-to-metal seal construction with excellent resealing capability.
- Gas Volumetric Flow Rate: 0.00000706214689265537 to 1.76553672316384 SCFM
- Mass Flow Rate: 0.0000005506 to 0.13765 lbs/min
- Operating Temperature: 14 to 122 F
- Operating Pressure: 0 to 14,503.77 psi
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Supplier: Malema Sensors
Description: 8800 sensors are specially designed for measuring liquids in high-purity semiconductor, bio-pharmaceutical and other applications that require all PFA-wetted* surfaces and provide a Mass Flow Rate, Total Mass and Temperature. *Models 8808-1 and 8808-2 are also available
- Pipe Diameter: 0.375 inch
- Media Temperature Range: 59 to 104 F
- Operating Pressure: 80 psi
- Mass Flow Rate: 0.0011025 to 11.025 lbs/min
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Supplier: Bronkhorst USA
Description: General mini CORI-FLOW™ series by Bronkhorst are precise and compact Mass Flow Meters and Controllers, based on the Coriolis measuring principle. Designed to cover the needs of the low flow market, there are 4 models to overlap flow ranges from 5 g/h up to
- Pipe Diameter: 0 to 0.5 inch
- Mass Flow Rate: 0.000735 to 1.1025 lbs/min
- Operating Temperature: 32 to 158 F
- Operating Pressure: 0 to 1,450.377 psi
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Supplier: Sierra Instruments, Inc.
Description: The RedyCompact mass flow meters and regulators offers users a valuable digital upgrade to mechanical rotameters. A true thermal mass flow meter, RedyCompact is for those that want the highest accuracy and repeatability and need a drop-in replacement for a Rotameter.
- Pipe Diameter: 0.25 to 0.5 inch
- Gas Volumetric Flow Rate: 0 to 17.65536723163842 SCFM
- Operating Temperature: 32 to 122 F
- Operating Pressure: 3 to 160 psi
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Supplier: Kurz Instruments, Inc.
Description: fabrication and assembly of inlet and outlet mating pipe sizes. The Series 534FTB has 8 basic Models covering mass flow ranges to 2350 SCFM and in line sizes from ½” to 8”. This unique design uses special flow nozzles and flow diffusers to obtain flow disturbance
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Supplier: HORIBA Instruments, Inc.
Description: Accurate, stable flow control can be achieved Dynamic Range Wide control range: 0.2% F.S. to 100% F.S. Technical Article Pressure-Based Mass Flow Control Module CRITERION D507 Series (1.7MB) Abstract "Recently, with the increase of application of a semiconductor device
- Pipe Diameter: 0.25 inch
- Operating Temperature: 59 to 113 F
- Operating Pressure: 108.777629517898 psi
- End Fittings: Compression
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Supplier: Sierra Instruments, Inc.
Description: Our Ultra High Purity 780S-UHP mass flow meter is the industry-choice for bulk gas distribution service in semiconductor fabs, in pharmaceutical production and other ultra-clean processes. Real-time monitoring of gas usage provides reliable information on consumption and usage
- Pipe Diameter: 0.375 to 12 inch
- Gas Volumetric Flow Rate: 0 to 7,000 SCFM
- Operating Temperature: -40 to 120 F
- Operating Pressure: 500 psi
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Supplier: Siargo Ltd.
Description: MF5000 series mass flow meters are specially designed for small pipe flow monitor and control. This series can measure gas flow in a pipe diameter as small as 0.5 mm, but not over 19 mm. Thanks to the self-flow conditioning feature of the MEMS sensors, the meters
- Pipe Diameter: 0.1181103 inch
- Operating Temperature: -4 to 149 F
- Operating Pressure: 435.110518071591 psi
- Process Media Type: Gas
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Supplier: HORIBA Instruments, Inc.
Description: supply and the intensity of plasma emission. The feedback given to the mass flow controller based on the monitored signals helps manufactures control the plasma emission at an optimal level and thereby enhance their productivity. Flow controllers and plasma
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Supplier: Shenzhen Jewellok Technology Co., Ltd.
Description: stainless steel or PFA-lined piping to maintain parts-per-trillion (PPT) purity levels. Once the chemicals reach the “point of use,” the Automatic CDU takes over. It acts as a smart controller, utilizing mass flow meters and servo-driven pumps to dilute, blend, and dispense
- Body Material: Stainless Steel
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Supplier: Saint-Gobain Coating Solutions
Description: either by a robot or an XY manipulator. The system is designed to meet additional upgrades for future needs. ProPlasma Spray System Components ProPlasma control unit -- features Siemens PLC programmable logic controller along with mass flow meters for gas regulation ProPlasma
- Equipment Type: Complete Machine
- Options / Components: Controller / Sensing System, Feeder / Metering Unit, Power Supply
- Mounting: Machine / Reciprocator
- Type: Plasma Spray
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Supplier: Shenzhen Jewellok Technology Co., Ltd.
Description: surgical precision. Equipped with advanced mass flow controllers and servo-driven pumps, it automates the blending and dispensing of chemicals with an accuracy of ±1%. This automation eliminates the variability and safety risks associated with manual handling. Integrated with
- Body Material: Stainless Steel
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Featured Products Top
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CHIPREG MFC The CHIPREG MFC Mass Flow Controller, with its ultra-compact size of less than 22mm and impressive dynamic range of up to 1000:1, offers unparalleled precision and versatility for bioreactors (read more)
Browse Mass Flow Meters and Controllers Datasheets for IMI Life Science -
that are used to properly package the resulting biopharmaceuticals. Combining superior physics, high reliability and unparalleled flexibility, RedySmart stands apart from competitive offerings. The RedySmart thermal mass flow meters & mass controllers are MEMS-based (Micro (read more)
Browse Mass Flow Meters and Controllers Datasheets for Sierra Instruments, Inc. -
. Mass flow controllers are accurate enough to supply inline gas to critical semiconductor processes, which is a testament to their performance, quality, and efficiency. How Are Mass Flow Controllers Used To Enable Accurate Calibration Standards? The accuracy and (read more)
Browse Calibration Instruments Datasheets for Environics, Inc. -
d·flux Multiparameter Mass Flow MeterMultiparameter Mass Flow Meters and Controllers for Gases Measure and control five process variables: Mass flow, volumetric flow, temperature, pressure, and density (read more)
Browse Gas Flow Meters Datasheets for Sierra Instruments, Inc. -
>>>Watch how easy it is to get started with our Mass Flow Controllers and Pressure Controllers—no guesswork, no delays, just reliable performance from day one. (read more)
Browse Mass Flow Meters and Controllers Datasheets for IMI Life Science -
The CentriFlow® Low Flow Meter is a specially designed solid-particle mass flow meter that can accurately measure bulk solids from pellets and granular materials to powders at extremely low flow rates. What is the CentriFlow Low Flow Meter? The (read more)
Browse Solids Flow Meters Datasheets for Eastern Instruments -
The PFLOW5002 / PFLOWC5002 series of gas mass flow controllers can be used for general-purpose gas flow monitor and control applications. They are available in standard or manifold configuration for the mechanical connections. Additionally, it is compatible to Axetris Massflow Controller / Flow (read more)
Browse Mass Flow Meters and Controllers Datasheets for Angst+Pfister Sensors and Power -
Semiconductor manufacturing is a complex and specialized process with numerous applications for precision gas and pressure control. Learn more about how Clippard's engineering team combined our DR-2 regulator and analytical valve with a special manifold to create a precision flow (read more)
Browse Gas Valves Datasheets for Clippard -
door controller manufacturer was dealing with a phase-change material that performed well in theory but created problems on the line. It had to be peeled from the release film extremely quickly, often (read more)
Browse Thermal Compounds and Thermal Interface Materials Datasheets for Dongguan Sheen Electronic Technology Co., Ltd. -
The light and dynamic mass flow controller VEMD works extremely quietly, thanks to piezo technology. The integrated electronics and sensor record, control, and meter the flow rate of air and inert gases proportionally. Compact module with integrated control electronics Dynamic (read more)
Browse Control Valves Datasheets for Festo Corporation
Conduct Research Top
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What is a Mass Flow Controller?
From their beginnings in the 1970s, mass flow controllers have come a long way in terms of their efficiency and capabilities. In the 1980s, the semiconductor industry was the biggest consumer of controllers. Then in the 1990s, manufacturers began making them more rugged and durable to suit more
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Capillary Tube Thermal Mass Flow Meters & Controllers - A User's Guide
This paper describes capillary tube mass flow meters and controllers for use in general purpose industrial and laboratory applications and in the fabrication of semiconductor devices. It provides a detailed description of the major components---flow body, flow conditioner, bypass, capillary sensor
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Understanding Capillary Tube Thermal Mass Flow Meters & Controllers:
, capillary tube flow meters and controllers. Capillary tube thermal mass flow meters and controllers have two broad fields of application: general purpose industrial and laboratory applications and semiconductor manufacturing and other high purity vacuum processes. More MFCs are manufactured than MFMs
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Video: Select The Right Mass Flow Controller For Your Application
Video: https://youtu.be/3naKb4-o6sk. Which mass flow controller will work best for my application?. Many times, we have had university professors and students contact us in tech support about which scientific flow meter they should get for their research. Sierra has two primary options for you
More Information Top
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Celerity Introduces Next Generation GF100 Series Mass Flow Controllers For Semiconductor Device And Solar Cell Manufacturing
Celerity Introduces Next Generation GF100 Series Mass Flow Controllers For Semiconductor Device And Solar Cell Manufacturing .
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Profile monitoring of reflow process using approximations of mixture second‐order polynomials
The other example applied the linear profile method to evaluate the process performance for calibration of a mass flow controller in semiconductor manufacturing.
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Surface NO and NO2 mixing ratios measured between 30° N and 30° S in the Atlantic region
The calibration mixture was prepared by using two thermostatted mass flow controllers (Advanced Semiconductor Materials), which had been calibrated by soap bubble flow meters.
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NIST Manuscript Publication Search
flow measurement, mass flow controller , semiconductor industry .
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1.26.09 -- Feature Article: Semiconducting Nanotubes Produced In Quantity At Duke
Celerity Introduces Next Generation GF100 Series Mass Flow Controllers For Semiconductor Device And Solar Cell Manufacturing .
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Thermal Mass Flow Controller (MFC) Selection For Specific Applications
• Brooks Introduces Pressure Transient Insensitive Mass Flow Controller for Semiconductor Manufacturing .
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Addressing Issues in Fiber Optics Using Direct Liquid Injection (DLI) Vaporization
• Brooks Introduces Pressure Transient Insensitive Mass Flow Controller for Semiconductor Manufacturing .
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Multi-Gas and Multi-Range Programmability in Mass Flow Technology
• Brooks Introduces Pressure Transient Insensitive Mass Flow Controller for Semiconductor Manufacturing .
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Innovations In Variable Area Flow Meters (Rotameters) – An Interview With Jim Dillon
• Brooks Introduces Pressure Transient Insensitive Mass Flow Controller for Semiconductor Manufacturing .
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Supporting NASA Research With Mass Flow Controllers
• Brooks Introduces Pressure Transient Insensitive Mass Flow Controller for Semiconductor Manufacturing .