Zygo Corporation has promoted these products / services:
ZYGO nano-position sensors are widely used in closed-loop motion control systems, mainly for lithography and inspection tool staging, as well as for deformable optical systems.
Position Metrology Systems High precision non-contact solutions for stage position and absolute position metrology applications. The ZMI™ displacement measuring interferometer system precisely measures relative changes in distance to a target. The ZPS™ system provides high-precision non-contact absolute position measurement on up to 64 synchronized channels.
3D Optical Surface Profiler with Sub-Nanometer Precision
This podcast features discussions with Jack Clark, Senior Principal Scientist at Woodward Inc., and Dr. Chris Evans, Professor of Mechanical Engineering and Director of the Center for Precision Metrology at the University of North Carolina at Charlotte.
An essential aspect for those in the field of surface metrology (or looking to become a part of it) is entertaining different per...
The NewView™ 9000 3D optical surface profiler provides powerful versatility in non-contact optical surface profiling. With the system, it is easy and fast to measure a wide range of surface types, including smooth, rough, flat, sloped, and stepped. All measurements are nondestructive, fast, and require no sample preparation.
Designed for the most demanding applications, the Nexview™ NX2 3D optical profiler combines exceptional precision, advanced algorithms, application flexibility, and automation into a single package that represents ZYGO's most advanced Coherence Scanning Interferometric (CSI) profiler.
Many ZYGO metrology instruments rely on interferometry combined with imaging systems to measure surface form, waviness, and roughness. Although these instruments have advanced software that performs data interpretation for you, it can be helpful to understand how the imaging process influences interferometric measurements at a fundamental level.
In this webinar, ZYGO Applications Engineer Mackenzie Massey highlights a case study that focuses on how measurement data can be used to drive process optimization of laser-grade optical surfaces, using advanced non-contact areal metrology tools.
As the world leader in metrology ZYGO is uniquely suited to supply plano optics for high precision reference and transmission flats. Our state-of-the-art interferometers, teamed with our proprietary polishing capabilities, keep ZYGO in the forefront.
The wide range of objectives ZYGO offers for its optical profilers is unmatched in the industry, and is continually growing, in response to the needs of our customers. With magnifications ranging from 1X to 100X, ZYGO is likely to have the optimum objective for your application both today, and in the future as your metrology needs change.
The Verifire™ XL interferometer is a stand-alone workstation designed for simplistic and reliable metrology of large flat surfaces up to twelve inches (300 mm) in diameter. Examples include front-surface reflectors, windows, and semiconductor wafers or wafer chucks.
ZYGO offers a wide variety of accessories to expand or enhance the capabilities of your interferometer system.
Wafer production technology requires extreme precision components,
whether for reticle stages, wafer stages or imaging technologies. ZYGO
is a leading supplier of stage positioning components, serving the
semiconductor industry and emerging EUV technologies through multiple
Transmission and reference flats and spheres, mounts, holders, and radius of curvature options provide the building blocks necessary for you to create optimum measurement setup to meet your metrology requirements, without the need for custom fabrication.
UltraHigh Resolution Interferometry for Precise Mid-Spatial Frequency Characterization
The APM650™ packaging metrology system is a new inspection tool for automated measurement of panel-based PCBs and other advanced packaging applications. It provides 2D & 3D measurements of a variety of surface features with sub-nanometer vertical precision and sub-micron lateral precision.
ZYGO's Mx™ software powers complete system control & data analysis, including interactive 3D maps, quantitative topography data, intuitive navigation, & built-in SPC with statistics, control charting, and pass/fail limits.
A corner cube retroreflector, also known as a CCR or trihedral prism, is an optical structure that consists of three adjacent, mutually-orthogonal plane-reflecting surfaces which form the corner of a cube. The corner cube reflects an incident ray at a specific angle, independent of the prism and beam orientations.
ZYGO's Optics business segment manufactures precision optical mirrors to exacting standards.
Dynamic metrology... with confidence
The new ZYGO DynaFiz® dynamic laser interferometer
is a highly optimized optical instrument designed specifically for
performing accurate metrology of optics in the presence of air
turbulence and extreme vibrations.
ZYGO's Optics business segment manufactures precision spheres and lenses
ranging in diameter from 50 mm to 200 mm with radii from 12.7 mm to 8
Extreme Precision Aspheric Optics
Precision aspheres are manufactured with extreme precision aspherical manufacturing technologies.
Aspheres - precision aspherical optics
manufactured by ZYGO's Optics business segment - can be manufactured in
sizes up to 500 mm, with tolerances better than λ/5000 RMS @ 633 nm.
ZYGO's Optics business segment manufactures prisms when the most
demanding angles and flatness tolerances are required. Our metrology
and polishing capabilities allow us to supply prisms with sub arc-second
angle tolerances, very flat surfaces and excellent transmitted
wavefront characteristics. In addition, ZYGO offers a broad range of
High precision optical windows, customized to your specifications.
ZYGO is trusted worldwide to provide optical windows
for the most high-precision, advanced applications. For over 45 years,
we specialize in bringing the most challenging optical designs to life.
ZYGO works as your design partner, ensuring you receive windows meeting
your most stringent specifications.
ZMI™ lasers provide frequency stabilized, two-frequency output to drive
multiple measurement axes. The small ZMI™ 7705 is used with the ZMI™
501A measurement enclosure to provide two axes of measurement. The
larger lasers include features such as more power (7702), water cooling
(7714), and separate laser source and delivery modules (7722/7724).
ZYGO's Verifire™ interferometer system provides fast high-precision measurements of plano or spherical surfaces, and transmitted wavefront of optical systems and assemblies. Measure glass or plastic optical components - like flats, lenses, and prisms - and even precision machined metal and ceramic surfaces.
The ZPS™ system provides high-precision non-contact absolute position measurement
on up to 64 synchronized channels.
ZYGO's Super Finishing process produces extremely smooth surfaces over a wide power spectral density (PSD) band on materials such as fused silica, sapphire, YAG, etc. Our unique process (also known as Super Polishing) is capable of producing a surface roughness of < 1 Angstrom (< 0.1 nm), over spatial periods ranging from 10 nm to 1 mm.
Precise, reliable, characterization of thin film topography and thickness, and substrate topography
ZYGO's Optics business segment has a long, rich heritage in developing products for the Defense market.
ZYGO's Optics business segment is the chosen leader in high fluence large optics. ZYGO understands what is required for high energy applications and we have developed processes to allow very high fluence optics with nearly damage free surfaces
The ZYGO Advantage
ZYGO's engineers, master opticians, coating
technicians and assemblers specialize in bringing the most challenging
designs to life. We have over 45 years of experience in fabricating
optics for use in the most extreme operating environments.
ZYGO's Optics business segment is uniquely positioned to design and
manufacture complex electro-optical and opto-mechanical assemblies and
products used in the Life Sciences market, including medical, dental,
and cytology applications.
ZYGO's proprietary machining techniques enable us to fabricate stage and optical components with complex geometries to exacting dimensional and angular tolerances and surface finishes.
News articles and press releases for Zygo Corporation:
The two new models, ZeGage Pro and ZeGage Pro HR, offer up to 2X improvement in data points, a 50% larger maximum field of view, and increased measurement speed with simplified setup.