New Ultra-Clean AFLAS FFKM Fluoroelastomers
Featured Product from AGC Chemicals Americas, Inc.
New Ultra-Clean AFLAS FFKM Fluoroelastomers with Higher Heat Resistance for Semiconductor Plasma Process Applications
We recently added AFLAS® FFKM PM-5000 and PM-5500 grades to our line of fluoroelastomers. These perfluorinated elastomer grades meet the unique demands of semiconductor applications because they have high temperature durability, a high molecular weight and excellent resistance to O2 and NF3 plasma.
These new grades build on the high-performance properties of other AFLAS FFKMs. They provide heat and chemical resistance and excellent electrical insulation to fabricate components that perform in aggressive and sensitive environments.
A Focus on High Temperature Durability
What sets the new AFLAS grades apart from other materials is their heat resistance. This is a critical feature for applications that require high thermal resistance 300 °C or higher, like those found in semiconductor plasma process applications. These new nitrile curable grades also have a high molecular weight that enables higher hardness without the use of fillers.
What Is FFKM? An Inside Look
FFKM is an enhanced version of FKM, a class of fluorinated carbon-based synthetic rubber known as fluoroelastomers. Derived from tetrafluoroethylene and perfluoroalkyl vinyl ether, this perfluoroelastomer compound excels in its resistance to temperatures, chemicals, oils, and solvents.
Exhibiting superior mechanical strength, excellent compression set, and high service temperatures, FFKM resins become the go-to material for fabricating parts for demanding applications.
Applications of FFKM in Semiconductor Manufacturing
- Chamber seals
- Cushioning for wafer transport
- Butterfly exhaust valves
- Centering O-rings in flanges
A Full Line of AFLAS Fluoroelastomer Grades for Semiconductor Applications
AGC now offers five grades of AFLAS FFKM elastomers that offer various price points, service conditions, compression sets, and purity levels. All are ultra-clean, have excellent plasma compatibility, chemical resistance and upper limit temperatures greater than 300 °C.
AFLAS PM-1100 and PM-3000 are our standard industrial grades. Both are peroxide cured with service temperature to 230 °C. These high molecular weight polymers provide superior toughness versus other FFKMs on the market.
AFLAS PM-3500 is a peroxide curable polymer that can achieve a hardness of 70 without adding fillers that increase the risk of contamination. This is great for semiconductor etching processes when resistance to plasma is critical. This polymer is exceptionally clean based on low trace metals evaluation. Its service temperature is rated at 250 °C.
AFLAS PM-5000 and PM-5500 are our nitrile curable polymers that have high temperature durability beyond 300 °C. Their O2 and NF3 plasma resistance make them ideal for semiconductor applications.
Follow us on:
Watch>>>AGC Group Overview
ABOUT AGC CHEMICALS AMERICAS
For almost a century, AGC Chemicals has been manufacturing high-performance materials serving industrial customers. Already the world's largest, longstanding custom compounder of PTFE and other fluoropolymer resins, AGC continues to build its product line with the introduction of FFKM resins that meet the growing demand for tougher, more durable products for today's production and manufacturing environments.
