Dry Etching (Plasma / RIE) MEMS Foundry Datasheets

Foundry Services
from Silicon Sensing Systems

In addition to manufacturing its own MEMS inertial sensor products, Silicon Sensing is now able to offer MEMS Foundry Services for prototype fabrication through to mass production. Having developed and produced 30 million MEMS devices over 13 years, Silicon Sensing has accumulated sophisticated... [See More]

  • Capabilities: Dry Etching (Plasma / RIE)
Advanced MicroSensors, Inc.
from Advanced MicroSensors, Inc.

AMS is located in Shrewsbury, Massachusetts, 35 miles west of Boston [See More]

  • Capabilities: 2D / Surface; 3D / Bulk; CVD; Dry Etching (Plasma / RIE); Inspection / Testing; Plating; Metallization - Thin Film; Photolithography; Wet / Chemical Etching; Magnetic Materials AMR GMR
  • Services: Design; Prototyping; Pilot / Scale-Up; Production; R & D / Development
  • Company Information: AMS works with customers worldwide to design, develop and manufacture wafer-based products. They specialize in MEMS/MST technology and products using magnetic materials and offer great flexibility in substrates, materials and customized solutions.
  • Materials: Silicon; Ceramic; Compound Semiconductor; Glass; Quartz; SOI; Substrates with Active Circuitry
Universal Semiconductor, Inc.
from Universal Semiconductor, Inc.

Located in San Jose, CA [See More]

  • Capabilities: 2D / Surface; 3D / Bulk; CVD; Dry Etching (Plasma / RIE); Inspection / Testing; LIGA; Plating; Metallization - Thin Film; Oxidation / Doping; Packaging / Backend Processing; Photolithography; Wafer Bonding; Wet / Chemical Etching
  • Services: Design; Prototyping; Pilot / Scale-Up; Production; R & D / Development
  • Company Information: USI offers foundry services with 3", 4", 5" and 6" capability. Additionally, USI offers Design Engineering, Manufacturing and Testing capability for wide ranging MEMs products and devices and for various applications.
  • Materials: Silicon; Ceramic; Compound Semiconductor; Glass; Metal; Polymer / Organic; Quartz; SOI