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  • Meeting the challenge of submicron defect characterization on final-polished wafers
    sensitivity. The particle-size capability claimed for scatterometers is calibrated using polystyrene latex spheres deposited on fine-polished silicon wafers. However, because the nature of real particles varies and their differing composition and geometric shapes affect their scattering behaviors...
  • MICRO:Industry News:'Round the Circuit (April '99)
    of Sematech collaborated with ESI to develop an environmental stress chamber for correlating total amine concentration and 193-nm resist processing failure. The monitor operates in real time to quantitatively analyze the total airborne molecular base load at a sensitivity of 500 ppt. ESI lent...
  • MICRO: Expansions etc.
    and Umetrics have formed an alliance to provide chipmakers with a turnkey solution for real-time advanced process control and e-diagnostics. The Swedish company's embedded multivariate analysis engine will be integrated with MKS's TOOLWeb product suite, offering a "complete sensor-to-analysis fault...
  • MICRO:Product Technology News (June '99)
    . (Semicon West, San Francisco, Esplanade, Booth 4136) Wafer-Temperature Tool SensArray Santa Clara, CA The palm-sized Thermal Track uses Process Probe wafers equipped with multiple embedded temperature sensors to measure wafer temperature directly in real time in lithography, CVD, RTP...
  • MICRO:Archive:Back Issue TOC
    ARTICLES Surface Chemistries: Enhancing yield through argon/ nitrogen cryokinetic aerosol cleaning after via processing Analysis and Metrology Defect Classification: Using “on-the-fly” automatic defect classification to enhance yields Facilities Technologies: Conducting real-time monitoring...

Engineering Web Search: Real Surface Profilometer

A novel real-time opto-electronic profilometer using FFT...
1989 International Conference on Item Title: A novel real-time opto-electronic profilometer using FFT processing Publisher Name: IEEE Publisher
Polarization-Shifting Profilometer
Polarization-Shifting Profilometer Pub Year: 2005 Pub Date: 2005 Meeting Dates: 30-02 Aug. 2005 Conference Title: Lasers and Electro-Optics, 2005.
Three-dimensional image visualization using the real-time...
Surface reconstructions based upon this method are shown to have comparable resolution to measurements obtained using a contact profilometer.
Optical Measurement and Nondestructive Testing: Techniques and...
Physical experimental simulation of indirect surface display caused by buried geological anomaly
Development of a rapid profilometer with an application to...
Title: Development of a rapid profilometer with an application to roundness gauging Authors: Marcin B. Bauza, Shane C. Woody, Stuart T. Smith, Robert
On the influence of surface roughness on real area of contact...
On the influence of surface roughness on real area of contact in normal, dry, friction free, rough contact by using a neural network
Portable Road Surface Profilometer, pavement testing, pavement...
The Dynatest Road Surface Profilometer® Mk-IV is capable of real time continuous highway-sped measurements of longitudinal profile.
See Dynatest Consulting, Inc. Information
ME 392Q Mfg Bryant September 7, 2005 1 Surfaces "If God...
surfaces extremely complex ? Surface properties depend on topography method & history of surface formation surface & bulk composition environment ME
Characterization and Control of Subsurface Damage in Grinding...
range of grinding conditions y Monitor force and power consumption in real time y Quantify the generated palstic deformation y Correlate the depth of
ASTM E950 - 09 / E950M - 09 Standard Test Method for Measuring...
using an instrumented vehicle with an inertial plane of reference provides a satisfactory method for acquiring traveled surface profile data (1).
See ASTM International Information

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