The PFLOW5002 / PFLOWC5002 series of gas mass flow controllers can be used for general-purpose gas flow monitor and control applications. They are available in standard or manifold configuration for the mechanical connections. Additionally, it is compatible to Axetris Massflow Controller / Flow Sensor.

Flow range: 0.05...20 SLPM

Accuracy: ±1% of reading or ±0.2% full-scale, whichever is higher

Humidity range: 0-95% non-condensing

Output options: Linear 0.5 to 4.5 VDC, RS232, RS485, Modbus