Fused silica glass is a very excellent material. It has an exceptional high transmissivity and a very low absorption for ultraviolet light. Already at 185 nm more than 80 % of the light can be transmitted.
The enormous operating temperature range and the thermal strength of quartz glass is remarkable. It permanently can be used at temperatures of 1000°C. Moreover, quartz glass material has a high thermal shock resistance.

Quartz glass is extremely resistant to salt solutions, acids and water. The chemical resistance of quartz glass to bases surpasses almost all other glass materials.

Due to the high material purity, quartz glass has remarkably good electrical insulation properties. It offers a particularly high insulation resistivity, since electrical currents can flow essentially only through moving ionic impurities and these impurities are very small in the case of quartz glass. This is an important property not only for semiconductor applications.

Specifications:

• Dimensional tolerance: ±0.1mm
• Thickness tolerance: ±0.1mm
• Surface quality: 40-20 S/D
• Surface flatness: L/4 @633nm
• Parallelism: 3 arcmin
• Protective bevel: 0.25mm x45deg