In the production process of expensive and sensitive workpieces such as wafers, gentle and secure transport as well as reliable coating of the individual wafers are a must. Any incorrect handling within the process quickly leads to high costs. Festo offers suitable automation solutions for precision wafer handling. For example, the extremely compact 4-axis electric handling system for transporting wafers from the FOUPs all the way into the process chamber.

- Reduce carbon emissions by up to 4% in large fabs but utilizing a nitrogen purge system. The advantages of nitrogen purging are as indispensable as the materials themselves. By harnessing the power of nitrogen, you can achieve higher yields, enhanced product quality, increased equipment longevity, and a safer, more sustainable manufacturing process.