In semiconductor manufacturing and large-size glass substrate production, traditional contact-based load transfer methods often cause surface defects, contamination, and static buildup, reducing yield and efficiency. The non-contact air floating platform overcomes these challenges by using advanced gas lubrication and porous load-bearing technology.

Zero Friction & Wear-Free Operation

• Non-contact conveying eliminates mechanical friction and wear

• Protects delicate substrates from cracks, missing corners, and damage

Silent & Smooth Motion

• Uniform air pressure with porous ceramics ensures quiet and stable operation

• Supports straight and rotational movements with high damping performance

High Precision & Cleanliness

• Nano-porous ceramic structure maintains consistent air cushion

• Oil-free and water-free operation minimizes contamination risks

Flexible Load Transfer

• Porous air bearing distributes load evenly for high motion accuracy

• Supports large customized sizes up to 1600mm × 1000mm

By combining non-contact design, zero friction, and high cleanliness, this air floating platform enhances production yield, ensures substrate integrity, and enables quiet, high-precision operations in semiconductor and TFT-LCD manufacturing.