Automation Controllers for Machine Builders
Featured Product from PI (Physik Instrumente) L.P.
XYT 3-Axis Assemblies Improve Quality and Throughput in High Precision Test, Manufacturing, and Quality Assurance Applications
High Performance Motion Systems with Industrial Automation Controllers for Machine Builders
High accuracy XYT 3-axis assemblies are critical in many test and production processes related to laser precision machining, semiconductor and photonics test and production, and medical device manufacturing. PI offers a broad and deep solution set for integrated XY-Theta Motion Systems with Industrial Motion Controllers. These systems can be configured and supplied as individual components or as complete integrated motion systems with custom interfaces, cable management solutions, vacuum feedthroughs and application-optimized integrated granite and aluminum structures.
XYT Precision Motion and Positioning Assemblies based on Air Bearing Stages
An ultra-high performance, granite based XYT stage assembly based on an A-322 planar air bearing XY stage with an air bearing rotary table.
The engineering teams at PI have extensive expertise and experience with air bearing technology, motion stages and systems. The ultra-precision performance of engineered air bearing positioning systems along with their non-wearing nature make them ideal solutions for semiconductor applications involving combined linear and rotational motion.
Compact, air bearing-based XY-theta stage assembly. See the A-311 XY-air bearing stage in motion. An innovative, compact A-311 Air Bearing Planar XY Motion Table is combined with a high-precision A-623 Series Air Bearing Rotation Stage.
When more degrees of freedom are required, XY-stages can be combined with a low-profile Z-Tip-Tilt (ZTT) motion module to form 5-axis systems such as the 5-DOF wafer stage for semiconductor metrology applications, shown in the video below. The ZTT module can also be added to XY-Theta stages for 6DOF motion applications.
EtherCat®-Based Industrial Motion Controllers
PI XYT 3-axis assemblies make use of ACS Industrial Motion Control components. PI controllers based on ACS use optimized configurations for best applications performance. This includes pre-configured systems with optimized system parameter information ready for out-of-the box operation-including motion synchronized device triggering through Laser Control Module (LCM) / Laser Control Interface (LCI) hardware as well as functional safety features like Safe Torque Off.
XYT Precision Motion and Positioning Assemblies based on Mechanical Bearing Stages
V-508/V-610 based XYT stage assembly. The scanning performance of a V-508 XY stage is shown in a video here.
In many applications, compactness is critical for tool integration. The above V-508 low profile linear stage / V-610 low profile rotary stage direct-drive, multi-axis motion system, is one example of a lightweight, high-performance 3-axis assembly that is extremely low profile, highly compact, and also technologically flexible to optimally address both rapid step and settle as well as smooth coordinated scanning applications with error tolerances ranging from nanometers to microns.
High-load, high speed direct drive 3-axis stage assembly. More information on the V-817 linear translation stage family and its motion controllers
High-throughput industrial automation applications of precision motion typically involve repetitive moves with higher loads and accelerations. Here, the V-817 Series Precision Linear Motor Stage Assembly with a direct drive rotary table, shown above, provides high acceleration and high duty cycle motion with efficient 3-phase linear motors and torque motors offering high continuous and peak force. Stiff stage construction and design using aircraft grade aluminum alloys provide stiffness to handle high impulse over short time durations with suitable precision. Precision truck and rail bearings are implemented for both load characteristics and long operating lifetimes. The integrated high-speed direct drive rotary stage with high torque output is used for dynamic step-settle and scanning performance.
PI XYT Precision Motion Solutions are scaled specific to the application using travel, performance, load, and space criteria. The solutions shown here are a small cross-section of available options to address XYT motion and show the diverse array of motor, bearing, encoder, and design elements that have contributed to making PI the market leader in precision motion.
XYT Stage Assembly Questions – Get Support from an Engineer
The XYT stage solutions shown in this article represent a diverse array of proprietary technologies developed in-house at PI, including motors, encoders, bearings as well as materials and design. PI is a global leader in multi-axis precision motion control, pioneering high precision linear stages, rotary stages and multi-axis stages for numerous high technology applications. We have been continuously improving our high precision XY-Theta multi-axis motion systems and have helped many customers in semiconductor manufacturing, laser materials processing, and medical device manufacturing achieve higher throughput and quality.
Do you need help with your motion control project? Ask an engineer - it saves you time and headaches!
About PI
PI is a leading manufacturer of air bearing stages, piezoelectric solutions, precision motion control equipment, and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. The PI group employs more than 1,000 people worldwide in 15 subsidiaries and R&D / engineering centers on 3 continents.