Machining of AlN (Aluminum Nitride)

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Aluminum Nitride is a material that has heat resistance, high thermal conductivity, dielectricity, piezoelectricity, low thermal expansion, and so on. Because of those properties, this material is often used for heat sinks, heaters, substrates, and so on. For example, we machine it into a part for semiconductor manufacturing devices or  ESC for CVD devices

 You would find more details and samples of AlN here.