MEMS accelerometer hit piezoelectric technology

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Improvements over the last two decades into Micro-electromechanical Systems (MEMS) technology enable today MEMS accelerometers to reach equivalent piezoelectric based accelerometer performances in terms of large bandwidth up to 20 000Hz, range up to ±64g and reduce noise down to 30µg/√Hz. And MEMS accelerometers are designed to operate in harsh environments such as high temperature and dust.

Piezoelectric is a technology used for decades by accelerometer sensors designed for vibration measurement of industrial rotative equipment. Over the last two decades Micro-electromechanical Systems (MEMS) technology has been dramatically improved tracked by many sensor developments such as motion sensors that compete today with QUARTZ or FoG technologies. MEMS based Accelerometers also reach today equivalent piezoelectric based accelerometers performance, with equivalent measurement bandwidth from DC up to 20 000Hz @ ±3dB, range up to ±64g and reduce noise down to 30µg/√Hz even at low frequency. And MEMS accelerometers are also able to operate in harsh environments such as temperature from -40 to + 125°C.