ETEL S.A.

This platform, METIS, is a hybrid planar mechanical/air bearing platform dedicated to step and scan applications. It is a 6 axes platform moving in X, Y, Z and Theta directions. Dynamic flatness over the full travel as well as bidirectional repeatability are key parameters. Read more...

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ETEL S.A.

The VULCANO XYZ3TH platform is made up of the standard VULCANO XY outfitted with the Z3TH combined module. This 4 degrees of freedom module, provides 364° Theta rotation, double Z-axes, a coarse one for wafer loading and unloading, and a fine one for focus adjustment, as well as a Tip and Tilt correction over ±0.1°. Read more...

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ETEL S.A.

The VULCANO XY system is a three-piece-design allowing a compact and cost engineered solution, coupled to mechanical bearings and high-end optical encoders. Read more...

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ETEL S.A.

The VULCANO XYT platform is made up of the standard Vulcano XY outfitted with the RTTB rotary module which includes high resolution encoder coupled to an outstanding mechanical bearing. Read more...

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ETEL S.A.

CHARON2 is a new semiconductor-oriented XY, XYT, ..., stacked system, backward compatible with existing modules and options. CHARON2 design extends CHARON use cases into the space of higher dynamics and larger payloads, with further improvement on accuracy and repeatability. Read more...

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H2W Technologies

H2W Technologies’ latest single rail positioning stage H-gantry design is an open frame XY positioning system. It has two bottom parallel axes with one cross axis connecting the two (H-gantry). Read more...

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H2W Technologies

H2W Technologies designed the VCS20-20-03-MC-01-XYZ as a 3-axis positioning solution where compact size and cost were important. Using voice coil motors... Read more...

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H2W Technologies

Our latest six-axis positioning stage design consists of three rotary motors, with encoders, each mounted to three independently moving linear axis. It is ideal for applications that require independent multiple motions on a single travel plane. Read more...

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Aerotech, Inc.

  • From 3-6 axes of precision motion
  • Proven reliability for 24/7 manufacturing
  • Noncontact, direct-drive for all axes enabling high-throughput alignment
  • 2 nm linear and 0.05 μrad rotary minimum incremental motion
  • Powerful controls with standard scanning algorithms and virtual pivot-p...
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Aerotech, Inc.

  • Six-degree-of-freedom positioning with linear travels to 110 mm and angular travels to 40°
  • Precision design with guaranteed positioning accuracy specifications
  • Minimum incremental motion to 20 nm in XYZ and 0.02 μrad in θxθyθz
  • Flexible configurations and customization
  • Vacuum preparation available
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