This platform, METIS, is a hybrid planar mechanical/air bearing platform dedicated to step and scan applications. It is a 6 axes platform moving in X, Y, Z and Theta directions. Dynamic flatness over the full travel as well as bidirectional repeatability are key parameters. Read more...More Product Announcements from ETEL S.A.
The VULCANO XYZ3TH platform is made up of the standard VULCANO XY outfitted with the Z3TH combined module. This 4 degrees of freedom module, provides 364° Theta rotation, double Z-axes, a coarse one for wafer loading and unloading, and a fine one for focus adjustment, as well as a Tip and Tilt correction over ±0.1°. Read more...More Product Announcements from ETEL S.A.
CHARON2 is a new semiconductor-orient
H2W Technologies’ latest single rail positioning stage H-gantry design is an open frame XY positioning system. It has two bottom parallel axes with one cross axis connecting the two (H-gantry). Read more...More Product Announcements from H2W Technologies
Our latest six-axis positioning stage design consists of three rotary motors, with encoders, each mounted to three independently moving linear axis. It is ideal for applications that require independent multiple motions on a single travel plane. Read more...More Product Announcements from H2W Technologies
- From 3-6 axes of precision motion
- Proven reliability for 24/7 manufacturing
- Noncontact, direct-drive for all axes enabling high-throughput alignment
- 2 nm linear and 0.05 μrad rotary minimum incremental motion
- Powerful controls with standard scanning algorithms and virtual pivot-p...
- Six-degree-of-freedom positioning with linear travels to 110 mm and angular travels to 40°
- Precision design with guaranteed positioning accuracy specifications
- Minimum incremental motion to 20 nm in XYZ and 0.02 μrad in θxθyθz
- Flexible configurations and customization
- Vacuum preparation available