Product Announcements:
Multi-axis Positioning Systems

IntelLiDrives introduced Open Frame XY stages designed to replace manual stages found on the microscopes to provide motorized XY positioning of microscopy samples. Read more...

Single Plane Air Bearing XY table delivers motion over 1m x 1m Read more...

Open-frame XY stages designed with a low profile for a wide range of automated accurate positioning in microscope-based applications. The drive mechanism located on the side of the unit and offers a clear unobstruced two axes aperture to enable light or objects to pass through the center of travel. Read more...

Stroke 25 mm to 300 mm in X, XY, XYZ configurations, Sub-micron resolutiion. Compact stages Read more...

The VULCANO XYZ3T^H platform is made up of the standard VULCANO XY outfitted with the Z3TH combined module. This 4 degrees of freedom module, provides 364° Theta rotation, double Z-axes, a coarse one for wafer loading and unloading, and a fine one for focus adjustment, as well as a Tip and Tilt correction over ±0.1°. Read more...

Very thin direct drive rotary table features large aperture and arc-sec precision Read more...

This platform, METIS, is a hybrid planar mechanical/air bearing platform dedicated to step and scan applications. It is a 6 axes platform moving in X, Y, Z and Theta directions. Dynamic flatness over the full travel as well as bidirectional repeatability are key parameters. Read more...

The VULCANO XY system is a three-piece-design allowing a compact and cost engineered solution, coupled to mechanical bearings and high-end optical encoders. Read more...

The VULCANO XYT platform is made up of the standard Vulcano XY outfitted with the RTTB rotary module which includes high resolution encoder coupled to an outstanding mechanical bearing. Read more...

CHARON2 is a new semiconductor-oriented XY, XYT, ..., stacked system, backward compatible with existing modules and options. CHARON2 design extends CHARON use cases into the space of higher dynamics and larger payloads, with further improvement on accuracy and repeatability. Read more...