Linear Piezoelectric Motors

3 Results
Vacuum-Compatible Actuator / Piezo Linear Motor -- N-331 UHV
from PI (Physik Instrumente) L.P.

Application fields. Motion in strong magnetic fields and in a vacuum. Industrial precision positioning. Semiconductor technology. Semiconductor tests. Wafer inspection. Lithography. Nanoimprinting. Nanometrology. Suitable for sophisticated vacuum applications. N-331.xxU PICMAWalk walking drives are... [See More]

  • Motor Type: Linear
  • Diameter/Height: 55
  • Length: 123 to 124
  • Thickness: 31
High Force Piezo Motors -- HR Series
from Johnson Electric Group

Nanomotion HR Series high force motors are high precision ceramic motors. Designed and manufactured under the Nanomotion brand, HR motors combine unlimited stroke with high resolution in compact dimensions. HR series motors range in size from 1 – 8 piezo elements providing forces to 3.2kg, and... [See More]

  • Motor Type: Linear
  • Blocked Force: 4 to 32
  • No-load Speed: 250
Low Speed Piezo Motors -- L Series
from Johnson Electric Group

Nanomotion LS series motors are the ideal solution for repetitive step and settle applications with zero servo dither. These motors provide unlimited travel and step resolution better than 20 nm. Piezo motors have no intrinsic magnetic field and have no sensitivity to external magnetic fields. With... [See More]

  • Motor Type: Linear
  • Blocked Force: 2 to 8
  • No-load Speed: 50