Semiconductor Inspection Scanning Probe Microscopes

4 Results
Microscope Scanning Vibrometer -- MSV-400
from Polytec, Inc.

The MSV-400 Microscope Scanning Vibrometer is the successor to the award-winning MSV-300 for full-field vibration analysis of very small objects such as MEMS optical switches. Based on the laser Doppler principle, a HeNe laser maps the vibrational response of the structure with a lateral resolution... [See More]

  • Application: Measuring / Toolmaker / Inspection; Semiconductor; Microscope Scanning Vibrometer
  • Lateral Resolution: 1000
XE-3DM
from Park Systems, Inc.

Park Systems has revolutionized the AFM with the introduction of the XE-3DM, the fully automated AFM system designed for overhang and trench profiles, sidewall roughness and imaging, and critical angle measurements. The unique design of the XE-3DM, made possible by the XE-series ’ decoupled XY... [See More]

  • Application: Semiconductor
  • Lateral Resolution: 1.5
  • Scanning Probe Microscope Type: AFM
XE-HDM
from Park Systems, Inc.

XE-HDM is an automatic defect review AFM which revolutionizes the way defects in HDD substrates and media are searched, scanned, and analyzed. The new XE-HDM significantly increases throughput for the defect review process; test runs with real defects demonstrate over 500 - 800% gain in throughput... [See More]

  • Application: Semiconductor
  • Lateral Resolution: 1.5
  • Scanning Probe Microscope Type: AFM
XE-LCD
from Park Systems, Inc.

Atomic Force Microscopy (AFM) is emerging as an essential tool in many industries. With its ability to accurately measure critical dimensions in the micrometer to nanometer regime, the AFM is becoming an essential tool choice in applications involving surface roughness, trench width, depth, sidewall... [See More]

  • Application: Semiconductor
  • Scanning Probe Microscope Type: AFM